×

Compact electrostatic comb actuator

  • US 6,133,670 A
  • Filed: 06/24/1999
  • Issued: 10/17/2000
  • Est. Priority Date: 06/24/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. An electrostatic comb actuator, comprising:

  • (a) a stationary comb having a first plurality of spaced fingers extending outward from a first cross-beam;

    (b) a moveable comb having a second plurality of spaced fingers extending outward from a second cross-beam toward the first plurality of spaced fingers to partially mesh therewith in a rest position, the second plurality of spaced fingers being electrostatically moveable in response to an applied voltage to further mesh with the first plurality of spaced fingers; and

    (c) at least one restoring spring underlying or overlying the moveable comb and connected thereto for restoring the moveable comb to the rest position upon removal of the applied voltage.

View all claims
  • 5 Assignments
Timeline View
Assignment View
    ×
    ×