Method for verifying semiconductor device tester

• US 6,133,727 A
• Filed: 01/05/1999
• Issued: 10/17/2000
• Est. Priority Date: 01/15/1998
• Status: Expired due to Term

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Park, Yun Soon, Lee, Sang Hon, Chun, Byoung Ok, Cho, Byung Rae
• Primary Examiner(s): Metjahic, Safet
• Assistant Examiner(s): Nguyen, Jimmy
• Application Number:
  US09/225,614
• Time in Patent Office: 651 Days
• Field of Search: 324/158.1, 324/754, 324/765, 714/745, 714/721, 365/201, 702/57, 702/58, 702/116-123, 235/375
• US Class Current: 324/750.02
• CPC Class Codes: G01R 31/31908 Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
• CPC Class Codes: G01R 31/3191 Calibration
• CPC Class Codes: G01R 35/00 Testing or calibrating of apparatus covered by the other groups of this subclass

Abstract

A method for verifying correct operation and functional stability of a tester for semiconductor devices is disclosed. In addition, a method for creating a standard device for use with the tester is also disclosed. In creating a standard device according to the present invention, the tester repeatedly tests a candidate device a predefined number of times and evaluates the test results to determine whether the candidate device is suitable for use as a standard device. In verifying the operation and functional stability of a semiconductor device tester, data generated by repeatedly testing a standard device a predefined number of times are compared to recorded reference data of previous tests of the standard device.

Claims

1. A method for analyzing the functional stability of a semiconductor device tester of the type that has:

1) A tester-check mode for analyzing correct operation and functional stability of the tester by reference to characteristic data of a pre-tested standard semiconductor device; and

,

     2) a standard-device-creation mode for creating a new standard device for use with the tester, the method comprising;

reading a mode of operation selected by a test engineer; and

,

if in the standard-device-creation mode, then;

reading the type number and serial number of a candidate standard device loaded in the tester;

determining whether a standard device having identical type and serial numbers is available, and if such standard device is available, determining whether to replace such standard device; and

,

if such standard device is not available, or if it is determined to replace such standard device, then;

repeatedly testing the candidate device a predefined number of times to measure during each test a predefined set of test items comprising electrical characteristics of the candidate device;

calculating the mean values and standard deviations of every test item in the sets; and

,

determining whether the candidate device is suitable for use as a standard device, based on whether the calculated values and standard deviations are within predetermined distribution ranges; and

,

if in the tester-check mode, then;

reading the type number and serial number of a standard device loaded in the tester;

fetching reference data comprising a set of previously measured electrical characteristics of the standard device;

repeatedly testing the standard device with the tester a predefined number of times to measure during each test a set of electrical characteristics of the standard device corresponding to the previously measured electrical characteristics of the standard device fetched;

calculating a mean value X of every electrical characteristic measured in the sets;

comparing the test data with the reference data to determine whether the tester is functionally stable; and

,

if the calculated data is outside of a predetermined range;

checking the tester.

2. The method of claim 1, wherein the tester includes a test instrument, a test option, and a test option check program, and is determined to be malfunctioning, and wherein checking the tester further comprises:

retrieving previously-stored information relating to both the standard device and the tester;

comparing the information relating to the standard device with the information relating to the tester;

re-calibrating the test instrument of the tester in accordance with the comparing of the information relating to the standard device and the tester;

re-testing the standard device with the re-calibrated tester to determine whether the re-calibrated tester is functioning properly; and

,

if the re-calibrated tester is determined to be still malfunctional;

running the test-option check program; and

,

outputting the results of the test-option check program.

3. The method of claim 1, wherein, in the standard-device-creation mode, the candidate standard device is tested 30 times.

4. The method of claim 1, wherein, in the tester-check mode, the standard device is tested 30 times.

5. The method of claim 1, wherein, in the standard-device-creation mode, determining whether the candidate device is suitable for use as a standard device comprises:

calculating from the repeated tests of the candidate device a mean value, a standard deviation and a distribution index of each of the electrical characteristics of the candidate device in the set, wherein the distribution index is defined as (mean value-lower limit)/(upper limit-lower limit)/2, wherein the upper limit and the lower limit are respectively the highest and lowest allowable values within a predefined specification for each of the electrical characteristics of the device; and

,

determining whether the distribution index calculated for the candidate device is within the range of from between 0.8413 and 1.1587.

6. The method of claim 1, wherein, in the tester-check mode, the reference data fetched include a mean value m and a standard deviation σ

'"'"' of each of the electrical characteristics of the standard device, and wherein comparing the test data with the reference data to determine whether the tester is functionally stable comprises;

determining whether X is within the range of from (m-0.1587σ

'"'"') to (m+0.1587σ

'"'"').

7. A method for verifying the correct operation of a tester for semiconductor devices, comprising:

loading a standard device into the tester;

identifying the standard device to the tester by entering the type number and serial number of the standard device;

fetching reference data comprising a set of previously measured electrical characteristics of the standard device, the reference data including a mean value m and a standard deviation value σ

'"'"' of each measured characteristic of the standard device;

repeatedly testing the standard device with the tester a predefined number of times to measure during each test a set of electrical characteristics of the standard device corresponding to the previously measured electrical characteristics of the standard device;

generating test data from the measured electrical characteristics of the standard device resulting from the repeated testing of the standard device, including calculating a mean value X of each measured electrical characteristic;

comparing the test data to the reference data; and

,

determining whether the tester is functioning correctly, based on the comparing of the test data and the reference data.

8. The method of claim 7, wherein determining whether the tester is functioning correctly comprises:

computing from the reference data an allowable range of variation of the mean value X of each measured electrical characteristic of the standard device; and

,

determining whether the mean value X of each measured electrical characteristic of the standard device tested falls within the allowable range.

9. The method of claim 8, wherein the allowable range of X computed from the reference data is from (m-0.1587σ

'"'"') to (m+0.1587σ

'"'"').

10. The method of claim 7, wherein the tester is determined to be malfunctioning and includes a test instrument, a test option, and a test-option check program, and further comprising:

retrieving previously-stored information relating to both the standard device and the tester;

comparing the information relating to the standard device with the information relating to the tester; and

,

re-calibrating the test instrument of the tester in accordance with the comparing of the information relating to the standard device and the tester.

11. The method of claim 10, further comprising running the test-option check program to check the test option of the tester.

12. The method of claim 11, wherein the testing of the standard device is repeated 30 times.

13. A method for creating a standard device for use by a tester for semiconductor devices comprising:

loading a candidate standard device into the tester;

identifying the candidate device to the tester by entering a type number and a serial number of the candidate device;

repeatedly testing the candidate device with the tester a predefined number of times to measure during each test a predefined set of electrical characteristics of the standard device;

calculating from the repeated tests of the candidate device a mean value, a standard deviation and a distribution index of each of the electrical characteristics of the candidate device in the set, wherein the distribution index is defined as (mean value-lower limit)/(upper limit-lower limit)/2, wherein the upper limit and the lower limit are respectively the highest and lowest allowable values within a predefined specification for each of the electrical characteristics of the device; and

,

determining whether the distribution index calculated for the candidate device is within the allowable range.

14. The method of claim 13, further comprising:

reading the entered type number and serial number of the candidate device;

determining whether another standard device having the same type and serial number exists; and

,

determining whether or not to replace the standard device with the candidate device.

15. The method of claim 13, wherein testing of the candidate device is repeated 30 times.

16. The method of claim 15, wherein the allowable range for the distribution index is from 0.8413 to 1.1587.