Angular velocity sensor
First Claim
1. An angular velocity sensor having a center comprising:
- a loop spring beam which is flexible in an x-axis and a y-axis passing through the center of the sensor, said loop spring beam being supported by floating support members for being vibrated in directions extending along an xy-plane relatively to a substrate;
oscillation means for driving at least one point of said loop spring beam which intersects said x-axis or y-axis to vibrate in a direction in which said one axis extends;
a first drive frame and a second drive frame which are continuous with a respective intersection point of said loop spring beam with said x-axis, said first drive frame and second drive frame being located at positions symmetric with respect to said y-axis, and being supported afloat for movement relative to the substrate by support members that are flexible in the direction in which the x-axis extends;
a first vibrator disposed in said first drive frame and continuous with spring beams that are flexible in the y-direction, the first vibrator being continuous with said first drive frame;
a second vibrator disposed in said second drive frame and continuous with spring beams that are flexible in the y-direction, the first vibrator being continuous with said second drive frame;
first displacement detection means for detecting a y-directional vibration of said first vibrator; and
second displacement detection means for detecting a y-directional vibration of said second vibrator.
1 Assignment
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Accused Products
Abstract
An angular velocity sensor includes coupling beams supported afloat by highly flexible support beams so as to be movable relative to a substrate, with the support beams being flexible in the x-axis and a y-axis directions and being symmetrical with respect to the center of the sensor. A first vibrator and a second vibrator are supported by respective coupling beams through spring beams that are highly flexible in the x-direction, with the spring beams being symmetrical with respect to the x-axis passing through the center symmetrical to each other with respect to the y-axis passing through the center. Drive electrodes drive at least one of the first vibrator and the second vibrator to vibrate in the x-direction. First displacement detection electrodes detect a y-directional vibration of the first vibrator and second displacement detection electrodes detect a y-directional vibration of the second vibrator. Precision with respect to detecting the angular velocity is prevented from being lowered by electrical and mechanical disturbances.
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Citations
8 Claims
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1. An angular velocity sensor having a center comprising:
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a loop spring beam which is flexible in an x-axis and a y-axis passing through the center of the sensor, said loop spring beam being supported by floating support members for being vibrated in directions extending along an xy-plane relatively to a substrate; oscillation means for driving at least one point of said loop spring beam which intersects said x-axis or y-axis to vibrate in a direction in which said one axis extends; a first drive frame and a second drive frame which are continuous with a respective intersection point of said loop spring beam with said x-axis, said first drive frame and second drive frame being located at positions symmetric with respect to said y-axis, and being supported afloat for movement relative to the substrate by support members that are flexible in the direction in which the x-axis extends; a first vibrator disposed in said first drive frame and continuous with spring beams that are flexible in the y-direction, the first vibrator being continuous with said first drive frame; a second vibrator disposed in said second drive frame and continuous with spring beams that are flexible in the y-direction, the first vibrator being continuous with said second drive frame; first displacement detection means for detecting a y-directional vibration of said first vibrator; and second displacement detection means for detecting a y-directional vibration of said second vibrator. - View Dependent Claims (2, 3, 4, 5)
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6. An angular velocity sensor having a center comprising:
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coupling beams which are supported afloat by floating support members so as to be movable relative to a substrate, the floating support members being flexible in directions of an x-axis and a y-axis and being symmetrical with respect to the center of the sensor; a first vibrator and a second vibrator supported by a respective one of said coupling beams through spring beams that are flexible in the x-direction, and symmetrical with respect to the x-axis passing through the center, and symmetrical to each other with respect to the y-axis passing through the center; oscillation means for driving at least either of said first vibrator and said second vibrator to vibrate in the x-direction; first displacement detection means for detecting a y-directional vibration of said first vibrator; and second displacement detection means for detecting a y-directional vibration of said second vibrator. - View Dependent Claims (7)
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8. An angular velocity sensor having a center comprising:
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a loop spring beam which is flexible in an x-axis and a y-axis passing through the center of the sensor, said loop spring beam being supported by floating support members for being vibrated in directions extending along an xy-plane relatively to a substrate; oscillation means for driving at least one point of said loop spring beam to vibrate in a direction in which one of said x-axis and y-axis extends; a first drive frame connected to the loop spring beam at a point at which the loop spring beam intersects one of said x-axis and y-axis; a second drive frame connected to the loop spring beam at a point at which the loop spring beam intersects one of said x-axis and y-axis, said first drive frame and second drive frame being located at positions symmetric with respect to one of said x-axis and y-axis and being supported for movement relative to the substrate by support members that are flexible in the direction in which the x-axis extends; a first vibrator that is connected with said first drive frame; a second vibrator that is connected with said second drive frame; first displacement detection means for detecting a y-directional vibration of said first vibrator; and second displacement detection means for detecting a y-directional vibration of said second vibrator.
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Specification