Continuous gas saturation system and method

• US 6,135,433 A
• Filed: 02/18/1999
• Issued: 10/24/2000
• Est. Priority Date: 02/27/1998
• Status: Expired due to Term

• Current Assignee: Air Liquide America LP (Mitsubishi Chemical Group Corp.)
• Original Assignee: Air Liquide America LP (Mitsubishi Chemical Group Corp.)
• Inventors: Nurmi, Douglas B.
• Primary Examiner(s): BUSHEY, CHARLES S
• Application Number:
  US09/251,744
• Time in Patent Office: 614 Days
• Field of Search: 261/128, 261/130, 261/136, 261/138, 261/139, 261/142, 261/153, 261/122.1, 261/DIG. 29
• US Class Current: 261/128
• CPC Class Codes: C23C 16/448 characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
• CPC Class Codes: Y10S 261/29 Heaters submerged in liquid

Abstract

Provided are a system and method for saturating a gas with a vapor from a liquid chemical. The system includes: (a) a saturation vessel connected to receive a liquid chemical and a carrier gas; (b) a gas sparger in the saturation vessel for sparging the carrier gas into the liquid chemical; (c) means for maintaining the liquid chemical in the saturation vessel at a substantially constant level; (d) means for controlling the temperature of the liquid chemical in the saturation vessel to a desired value, comprising (I) a system for cooling the liquid chemical, and (ii) a heater inside the saturation vessel extending vertically in the liquid a distance at least half of the height of the liquid chemical level for heating the liquid chemical; and (e) means for controlling the pressure of the saturated gas to a desired value. The invention also relates to novel methods and systems for controlled delivery of a vaporized liquid chemical. The invention has particular applicability to the semiconductor manufacturing industry.

Claims

1. A system for saturating a gas with a vapor from a liquid chemical, comprising:

(a) a saturation vessel connected to receive a liquid chemical and a carrier gas;

(b) a gas sparger in the saturation vessel for sparging the carrier gas into the liquid chemical;

(c) means for maintaining the liquid chemical in the saturation vessel at a substantially constant level;

(d) means for controlling the temperature of the liquid chemical in the saturation vessel to a desired value, comprising (I) a system for cooling the liquid chemical, and (ii) a heater inside the saturation vessel extending vertically in the liquid a distance at least half of the as height of the liquid chemical level for heating the liquid chemical; and

(e) means for controlling the pressure of the saturated gas to a desired value.

2. The system according to claim 1, wherein the heater comprises a heating element surrounded by a liquid heat transfer fluid, the heating element and heat transfer fluid being separated from the liquid chemical.

3. The system according to claim 2, wherein the heat transfer fluid is mineral oil.

4. The system according to claim 1, wherein the system for cooling comprises a cooling jacket around the saturation vessel having a liquid cooling fluid circulating therethrough.

5. The system according to claim 1, wherein the means for maintaining the liquid chemical level comprises a weight or mass scale disposed beneath the saturation vessel and a controller for controlling flow of the liquid chemical to the saturation vessel based on the weight or mass measurement from the scale.

6. A method of saturating a gas with a vapor from a liquid chemical, comprising the steps of:

(a) introducing a liquid chemical and a carrier gas into a saturation vessel, wherein the carrier gas is sparged into the liquid chemical to form a gas saturated with vapor from the liquid chemical;

(b) maintaining the liquid chemical in the saturation vessel at a substantially constant level;

(c) controlling the temperature of the liquid chemical in the saturation vessel to a desired sub-ambient value by cooling the liquid chemical to the desired value, and adding heat to the liquid chemical, as necessary to adjust the temperature, with a heater inside the saturation vessel, the heater extending vertically in the liquid a distance at least half of the height of the liquid chemical level; and

(d) controlling the pressure of the saturated gas to a desired value.

7. The method according to claim 6, wherein the heater comprises a heating element surrounded by a liquid heat transfer fluid, the heater and heat transfer fluid being separated from the liquid chemical.

8. The method according to claim 7, wherein the heat transfer fluid is mineral oil.

9. The method according to claim 6, wherein the liquid chemical cooling comprises circulating a liquid cooling fluid through a cooling jacket around the saturation vessel.

10. The method according to claim 6, wherein the maintaining of the liquid chemical level comprises measuring the weight or mass of the saturation vessel and controlling flow of the liquid chemical to the saturation vessel based on the weight or mass measurement.