Nanoparticles of silicon oxide alloys
First Claim
1. A method of making a porous material in a three-dimensional web structure of fused silicon oxide alloy nanoparticles comprising simultaneously subjecting silicon and a metal in a chamber containing an oxygen-containing inert carrier gas to a pulsed laser, generating mixed vapors of silicon oxide and oxide of the metal in the chamber as a result of the pulsed laser, cooling the mixture of vapor phase silicon oxide and vapor phase oxide of the metal with the carrier gas, and condensing the cooled mixture of vapor phase oxides to form silicon oxide alloy nanoparticles.
1 Assignment
0 Petitions
Accused Products
Abstract
Nanoparticles of silicon oxide alloys (i.e., oxides of SiMo, SiPt, and SiAl) are produced by laser vaporization of a silicon target and a target of a metal (i.e., Mo, Pt, or Al), in an oxygen containing atmosphere in a diffusion cloud chamber, where the target metal vapors aggregate into novel three-dimensional porous web structures. The structures have a homogeneous composition with a uniform ratio of silicon to the metal.
224 Citations
10 Claims
- 1. A method of making a porous material in a three-dimensional web structure of fused silicon oxide alloy nanoparticles comprising simultaneously subjecting silicon and a metal in a chamber containing an oxygen-containing inert carrier gas to a pulsed laser, generating mixed vapors of silicon oxide and oxide of the metal in the chamber as a result of the pulsed laser, cooling the mixture of vapor phase silicon oxide and vapor phase oxide of the metal with the carrier gas, and condensing the cooled mixture of vapor phase oxides to form silicon oxide alloy nanoparticles.
Specification