Micromachined electrical field-flow fractionation system

• US 6,136,171 A
• Filed: 09/18/1998
• Issued: 10/24/2000
• Est. Priority Date: 09/18/1998
• Status: Expired due to Term

• Current Assignee: University of Utah Research Foundation (State of Utah)
• Original Assignee: University of Utah Research Foundation (State of Utah)
• Inventors: Gale, Bruce K., Caldwell, Karin D., Frazier, A. Bruno
• Primary Examiner(s): Warden, Jill
• Assistant Examiner(s): STARSIAK, JOHN S
• Application Number:
  US09/156,151
• Time in Patent Office: 767 Days
• Field of Search: 204/450, 204/547, 204/600, 204/643, 209/127.1, 209/129
• US Class Current: 204/450
• CPC Class Codes: B03C 5/026 using open-gradient differential dielectric separation, i.e. using electrodes of special shapes for non-uniform field creation, e.g. Fluid Integrated Circuit [FIC]
• CPC Class Codes: B81B 1/00 Devices without movable or flexible elements, e.g. microcapillary devices
• CPC Class Codes: B81C 1/00357 involving bonding one or several substrates on a non-temporary support, e.g. another substrate
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: G01N 2030/0035 electrical field
• CPC Class Codes: G01N 30/0005 Field flow fractionation
• CPC Class Codes: G01N 30/466 with separation columns in parallel
• CPC Class Codes: G01N 30/6095 Micromachined or nanomachined, e.g. micro- or nanosize

Abstract

A micromachined system for electrical field-flow fractionation of small test fluid samples is provided. The system includes a microchannel device comprising a first substrate having a planar inner surface with an electrode formed thereon. A second substrate having a planar inner surface with an electrode formed thereon is positioned over the first substrate so that the respective electrodes face each other. An insulating intermediate layer is interposed between the first and second substrates. The intermediate layer is patterned to form opposing sidewalls of at least one microchannel, with the electrodes on the substrates defining opposing continuous boundaries along the length of the microchannel. Inlet and outlet ports are formed in one or both substrates for allowing fluid flow into and out of the microchannel. The microchannel device can be fabricated with single or multiple microchannels therein for processing single or multiple test fluids. During operation, a voltage differential is applied to the electrodes in order to induce an electric field across the microchannel. This separates particles of different types present in a fluid injected into the microchannel. The separated particles in the fluid can be collected or further processed as desired.

Claims

1. A microchannel device for electrical field-flow fractionation of a fluid, comprising:

a first substrate having a substantially planar inner surface;

a first electrically conductive layer on the inner surface of the first substrate;

a second substrate having a substantially planar inner surface and positioned over the first substrate;

a second electrically conductive layer on the inner surface of the second substrate and facing the first electrically conductive layer;

an intermediate layer interposed between the first substrate and the second substrate, the intermediate layer patterned so as to form opposing sidewalls of a microchannel, with the first and second electrically conductive layers defining opposing continuous boundaries along the length of the microchannel, wherein the microchannel is dimensioned such that the distance between the first and second electrically conductive layers along the length of the microchannel is less than about 100 μ

m;

an inlet port in the first or second substrate for allowing fluid flow into the microchannel;

an outlet port in the first or second substrate for allowing fluid flow out of the microchannel; and

one or more detectors in operative communication with the microchannel for analyzing a fluid in or from the microchannel, the detectors selected from one or more of the group consisting of electrical conductivity detectors and impedance detectors.

2. The microchannel device of claim 1, wherein the first substrate comprises a material selected from the group consisting of silicon, glass, plastics, metals, and combinations thereof.

3. The microchannel device of claim 1, wherein the second substrate comprises a material selected from the group consisting of silicon, glass, plastics, metals, and combinations thereof.

4. The microchannel device of claim 1, wherein the first and second electrically conductive layers comprise metallic materials selected from the group consisting of titanium, gold, carbon black, palladium, platinum, and combinations or alloys thereof.

5. The microchannel device of claim 1, wherein the intermediate layer comprises an insulating material selected from the group consisting of a photosensitive polyimide, photosensitive ceramics, acrylics, epoxies, photoresist, and combinations thereof.

6. The microchannel device of claim 1, wherein the microchannel has an aspect ratio of width to height of about 20:

1 or greater.

7. The microchannel device of claim 1, wherein the microchannel has an aspect ratio of width to height of about 80:

1 or greater.

8. The microchannel device of claim 1, wherein the microchannel is dimensioned such that the distance between the first and second electrically conductive layers along the length of the microchannel is about 40 μ

m or less.

9. The microchannel device of claim 1, wherein the microchannel is dimensioned such that the distance between the first and second electrically conductive layers along the length of the microchannel is about 10 μ

m or less.

10. The microchannel device of claim 1, wherein the microchannel has a transverse cross-sectional profile that is substantially rectangular.

11. The microchannel device of claim 1, wherein the first and second electrically conductive layers comprise electrodes that are capable of inducing an electric field across the microchannel when a voltage differential is applied to the electrodes.

12. A microchannel device for electrical field-flow fractionation of a fluid, comprising:

a first substrate having a substantially planar inner surface;

a first plurality of electrodes on the inner surface of the first substrate;

a second substrate having a substantially planar inner surface and positioned over the first substrate;

a second plurality of electrodes on the inner surface of the second substrate and facing the first plurality of electrodes;

an intermediate layer interposed between the first substrate and the second substrate, the intermediate layer patterned so as to form opposing sidewalls of a plurality of microchannels, with the first and second plurality of electrodes each defining opposing continuous boundaries along the lengths of the microchannels, wherein the microchannels are dimensioned such that the distance between the first and second plurality of electrodes along the lengths of the microchannels is less than about 100 μ

m;

a plurality of inlet ports in the first or second substrate for allowing fluid flow into the microchannels;

a plurality of outlet ports in the first or second substrate for allowing fluid flow out of the microchannels; and

a plurality of detectors in operative communication with the microchannels for analyzing fluids in or from the microchannels, the detectors selected from one or more of the group consisting of electrical conductivity detectors and impedance detectors.

13. The microchannel device of claim 12, wherein the first substrate comprises a material selected from the group consisting of silicon, glass, plastics, metals, and combinations thereof.

14. The microchannel device of claim 12, wherein the second substrate comprises a material selected from the group consisting of silicon, glass, plastics, metals, and combinations thereof.

15. The microchannel device of claim 12, wherein the first and second plurality of electrodes comprise metallic materials selected from the group consisting of titanium, gold, carbon black, palladium, platinum, and combinations or alloys thereof.

16. The microchannel device of claim 12, wherein the intermediate layer comprises an insulating material selected from the group consisting of a photosensitive polyimide, photosensitive ceramics, acrylics, epoxies, photoresist, and combinations thereof.

17. The microchannel device of claim 12, wherein the microchannels have an aspect ratio of width to height of about 20:

1 or greater.

18. The microchannel device of claim 12, wherein the microchannels have an aspect ratio of width to height of about 80:

1 or greater.

19. The microchannel device of claim 12, wherein the microchannels are dimensioned such that the distance between the first and second plurality of electrodes along the lengths of the microchannels is about 40 μ

m or less.

20. The microchannel device of claim 12, wherein the microchannels are dimensioned such that the distance between the first and second plurality of electrodes along the lengths of the microchannels is about 10 μ

m or less.

21. The microchannel device of claim 12, wherein the microchannels have a transverse cross-sectional profile that is substantially rectangular.

22. The microchannel device of claim 12, wherein the first and second plurality of electrodes are capable of inducing an electric field across the microchannels when a voltage differential is applied to the electrodes.

23. A micromachined system for electrical field-flow fractionation of a fluid, comprising:

a first microchannel device comprising;

a first substrate having a substantially planar inner surface;

at least one first electrode on the inner surface of the first substrate;

a second substrate having a substantially planar inner surface and positioned over the first substrate;

at least one second electrode on the inner surface of the second substrate and facing the first electrode; and

an insulating intermediate layer interposed between the first substrate and the second substrate, the intermediate layer patterned so as to form opposing sidewalls of at least one microchannel, with the first and second electrodes defining opposing continuous boundaries along the length of the microchannel, wherein the microchannel is dimensioned such that the distance between the first and second electrodes along the length of the microchannel is less than about 100 μ

m;

an inlet port in the first or second substrate for allowing fluid flow into the microchannel; and

an outlet port in the first or second substrate for allowing fluid flow out of the microchannel;

a reservoir means in fluid communication with the inlet port, for holding a fluid to be injected into the microchannel; and

a first detector operatively connected with the first microchannel device for analyzing a fluid in the microchannel, wherein the first detector is an electrical conductivity detector or an impedance detector.

24. The system of claim 23, wherein the intermediate layer comprises a material selected from the group consisting of a photosensitive polyimide, photosensitive ceramics, acrylics, epoxies, photoresist, and combinations thereof.

25. The system of claim 23, wherein the microchannel has an aspect ratio of width to height of about 20:

1 or greater.

26. The system of claim 23, wherein the microchannel is dimensioned such that the distance between the first and second electrodes along the length of the microchannel is about 40 μ

m or less.

27. The system of claim 23, wherein the reservoir means is in fluid communication with a pump, a sample input device, and a flow control device, each of which is disposed between the reservoir means and the inlet port.

28. The system of claim 23, wherein the first detector is adjacent to the outlet port.

29. The system of claim 23, further comprising at least one additional microchannel device implemented with the first microchannel device for multiple parallel processing of single or multiple test fluids.

30. The system of claim 23, further comprising a second microchannel device in downstream fluid communication with the first microchannel device, the second microchannel device comprising the same components as the first microchannel device.

31. The system of claim 30, further comprising a second detector operatively connected to the second microchannel device.

32. The system of claim 30, further comprising a third microchannel device in downstream fluid communication with the second microchannel device, the third microchannel device comprising the same components as the first microchannel device.

33. The system of claim 32, further comprising a third detector operatively connected to the third microchannel device.

34. A micromachined system for electrical field-flow fractionation of a fluid, comprising:

a first substrate having a substantially planar inner surface;

a first plurality of electrodes on the inner surface of the first substrate;

a second substrate having a substantially planar inner surface and positioned over the first substrate;

a second plurality of electrodes on the inner surface of the second substrate and facing the first plurality of electrodes;

an intermediate layer interposed between the first substrate and the second substrate, the intermediate layer patterned so as to form opposing sidewalls of a plurality of microchannels, with the first and second plurality of electrodes each defining opposing continuous boundaries along the lengths of the microchannels, wherein the microchannels are dimensioned such that the distance between the first and second plurality of electrodes along the lengths of the microchannels is less than about 100 μ

m;

a plurality of inlet ports in the first or second substrate for allowing fluid flow into the microchannels;

a plurality of outlet ports in the first or second substrate for allowing fluid flow out of the microchannels;

a buffer reservoir in fluid communication with the inlet ports; and

a plurality of detectors operatively connected with the microchannels for multiple parallel processing of single or multiple test fluids in the microchannels, wherein the detectors are selected from one or more of the group consisting of electrical conductivity detectors, and impedance detectors.

35. The system of claim 34, wherein the intermediate layer comprises a material selected from the group consisting of a photosensitive polyimide, photosensitive ceramics, acrylics, epoxies, photoresist, and combinations thereof.

36. The system of claim 34, wherein the microchannels have an aspect ratio of width to height of about 20:

1 or greater.

37. The system of claim 34, wherein the microchannels are dimensioned such that the distance between the first and second electrodes along the lengths of the microchannels is about 40 μ

m or less.

38. The system of claim 34, wherein the reservoir is in fluid communication with a plurality of pumps, sample input devices, and flow control devices, each of which is disposed between the reservoir and the plurality of inlet ports.

39. The system of claim 34, wherein the detectors are adjacent to the outlet ports.

40. A method of fabricating a microchannel device for electrical field-flow fractionation of a fluid, comprising the steps of:

providing a first substrate having a substantially planar inner surface;

providing a second substrate having a substantially planar inner surface;

forming at least one inlet port and at least one outlet port in the first or second substrates;

forming at least one first electrode layer on the inner surface of the first substrate;

forming at least one second electrode layer on the inner surface of the second substrate;

forming an insulating layer on the inner surface of the first substrate such that the insulating layer forms opposing sidewalls of at least one microchannel adjacent to the first electrode layer;

attaching the second substrate to the insulating layer such that each of the first and second electrode layers define opposing continuous boundaries along the length of the microchannel, the distance between the first and second electrode layers along the length of the microchannel being less than about 100 μ

m; and

forming a detector in the microchannel, the detector configured to analyze a fluid in the microchannel.

41. The method of claim 40, wherein the inlet and outlet ports are formed by etching conically-shaped openings in the first substrate.

42. The method of claim 40, wherein the first electrode layer is formed by sputtering and patterning a metallic material on the inner surface of the first substrate to form an elongated electrode strip.

43. The method of claim 40, wherein the second electrode layer is formed by sputtering and patterning a metallic material on the inner surface of the second substrate to form an elongated electrode strip.

44. The method of claim 40, wherein the insulating layer is formed by depositing and patterning a material selected from the group consisting of a photosensitive polyimide, photosensitive ceramics, acrylics, epoxies, photoresist, and combinations thereof.

45. The method of claim 40, wherein the second substrate is attached to the insulating layer with a biocompatible, ultraviolet light curable adhesive.

46. The method of claim 40, wherein the microchannel device is fabricated to have a plurality of microchannels therein.

47. The method of claim 40, wherein the detector formed in the microchannel is an electrical conductivity detector or an impedance detector.

48. An electrical field-flow fractionation process, comprising the steps of:

providing a first microchannel device comprising;

a first substrate having a substantially planar inner surface;

at least one first electrode on the inner surface of the first substrate;

a second substrate having a substantially planar inner surface and positioned over the first substrate;

at least one second electrode on the inner surface of the second substrate and facing the first electrode; and

an insulating intermediate layer interposed between the first substrate and the second substrate, the intermediate layer patterned so as to form opposing sidewalls of at least one microchannel, with the first and second electrodes defining opposing continuous boundaries along the length of the microchannel, wherein the microchannel is dimensioned such that the distance between the first and second electrodes along the length of the microchannel is less than about 100 μ

m;

applying a voltage differential to the first and second electrodes in order to induce an electric field across the microchannel;

injecting a fluid through an inlet port in one of the substrates and into the microchannel;

passing the fluid through the microchannel with the electric field therein in order to separate particles in the fluid; and

monitoring the separated particles in the fluid with a first detector selected from the group consisting of an electrical conductivity detector and an impedance detector.

49. The process of claim 48, wherein the first microchannel device includes a plurality of microchannels therein for multiple parallel processing of single or multiple test fluids.

50. The process of claim 48, further comprising the step of providing at least one additional microchannel device implemented with the first microchannel device for multiple parallel processing of single or multiple test fluids.

51. The process of claim 48, further comprising the step of directing a portion of the fluid from the outlet port to a fraction collector.

52. The process of claim 48, further comprising the step of directing a portion of the fluid from the outlet port to a waste collector, and directing the remaining portion of the fluid to a second microchannel device for further separation of particles in the fluid, the second microchannel device comprising the same components as the first microchannel device.

53. The process of claim 52, further comprising the step of monitoring the separated particles in the second microchannel device with a second detector.

54. The process of claim 52, further comprising the step of directing a portion of the fluid from the second microchannel device to a waste collector, and directing the remaining portion of the fluid to a third microchannel device for further separation of particles in the fluid, the third microchannel device comprising the same components as the first microchannel device.

55. The process of claim 54, further comprising the step of monitoring the separated particles in the third microchannel device with a third detector.

56. The process of claim 54, further comprising the step of directing the fluid from the third microchannel device to a sample collector.