Fast automated spectral fitting method

• US 6,137,104 A
• Filed: 09/22/1998
• Issued: 10/24/2000
• Est. Priority Date: 06/12/1998
• Status: Expired due to Term

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Varian Incorporated (Agilent Technologies, Inc.)
• Inventors: Wilson, Philip V., Webb, Christopher
• Primary Examiner(s): LE, QUE TAN
• Application Number:
  US09/158,648
• Time in Patent Office: 763 Days
• Field of Search: 250/226, 250/208.1, 250/576, 250/461.2, 250/339.07, 356/346, 356/300, 356/349, 356/326, 126/665
• US Class Current: 250/226
• CPC Class Codes: G01J 2003/2866 Markers; Calibrating of scan
• CPC Class Codes: G01J 3/28 Investigating the spectrum using colour filters G01J3/51
• CPC Class Codes: G01N 21/274 Calibration, base line adjustment, drift correction

Abstract

A spectral interval excited by ICP-ES containing expected lines is modeled from wavelength calibration information and from spectra of model components. A sample is then excited and fit to the data with concurrent observation of wavelength calibration and a linear least squares fit obtained with analysis of residuals to determine presence of unexpected spectral features which, if present, provide additional model components for an iterative fitting.

Claims

1. A method for treatment of spectra observed on the focal plane of an optical spectrometer wherein spectra are excited by inductively coupled plasma processes, comprising the steps of

(a) forming a representation for expected features in a predetermined spectral interval,

(b) locating at least one first selected wavelength corresponding to a position on said focal plane, whereby a wavelength reference is established over said predetermined spectral interval on said focal plane,

(c) observing at least one predetermined spectral feature having a known concentration, whereby a scale of concentration is established,

(d) representing each said spectral feature by the combination of a selected mathematical form dependent upon wavelength and the residuals realized by comparison of said form and said observed spectral feature whereby a model spectral component is obtained,

(e) analyzing a sample,

(f) recording the spectra of said sample at least within said spectral window and simultaneously therewith observing again said at least one first selected wavelength,

(g) determining any shift in location on said focal plane for said first selected wavelength as obtained at step (b) compared to step (f) and incorporating any said shift in each said model spectral component by transforming said mathematical form and said residuals accordingly,

(h) performing a linear least squares fit of said recorded spectra to said model spectral components whereby the intensity of spectral features corresponding to said model components is established together with the distribution of residuals resulting therefrom,

(i) analyzing said residuals and determining whether said fit meets predetermined criteria for terminating said treatment, and in default thereof,

(j) inspecting said distribution of residuals to determine whether a significant residual maximum is located therein and in response thereto,

locating the wavelength corresponding to said residual maximum and defining another model component located at the wavelength of said residual maximum and repeating steps (h) and (i), or,

where no significant residual maximum is located, displaying said intensity and terminating the treatment.

2. The method of claim 1 wherein said step of representing each said spectral feature comprises treating each spectral feature forming a peak as comprising two portions of similar statistical significance, separately fitting the portions to a selected function, and selecting that fitting corresponding to the more narrow of the two fits as an initial representation of said peak.

3. The method of claim 2 wherein either of said portions includes the residual maximum of said peak.

4. The method of claim 1 wherein said step of locating comprises applying a smoothing filter to data in said spectral interval and performing a quadratic fit to the three most prominent datums whereby said wavelength is located.

5. The method of claim 4 wherein said step of locating further comprises selecting wavelengths corresponding to prominent spectral features attributable to a plasma gas of said inductively coupled plasma.

6. The method of claim 5 further comprising establishing the integrity of said selected first wavelength, comprising locating additional said wavelength references attributable to said plasma gas and subsequently observing each said wavelength reference spectral features and deriving the corresponding apparent shift in the position thereof, and determining whether the consistency among said derived shifts indicates the presence of an interference affecting at least one said first and additional wavelength reference spectral feature.

7. The method of claim 6 wherein the aggregate of said derived shifts is treated to obtain the expected statistical variance in the aggregate of said derived shifts, disregarding any one of said aggregate deviating from the average thereof by more than said expected statistical variance, re-determining the average value of said derived shift and adopting said re-determined value for said step (g).

8. The method of claim 1 wherein said step of transforming comprises shifting said mathematical form by said shift determined at step (g) and linearly interpolating the residuals as determined at step (d) by said shift.