Microelectromechanical rotary structures

• US 6,137,206 A
• Filed: 03/23/1999
• Issued: 10/24/2000
• Est. Priority Date: 03/23/1999
• Status: Expired due to Term

• Current Assignee: Memscap Incorporated
• Original Assignee: Cronos Integrated Microsystems, Inc. (Lumentum Holdings Inc.)
• Inventors: Hill, Edward A.
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): LE, DANG D
• Application Number:
  US09/275,058
• Time in Patent Office: 581 Days
• Field of Search: 310/306, 310/307, 310/309, 310/346, 310/40 MM, 318/117, 60/528, 60/523, 60/513, 322/2 A, 322/2 R, 136/200, 374/176, 376/317, 505/150, 505/166
• US Class Current: 310/306
• CPC Class Codes: F03G 7/06 using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like using thermal expansion of non-vaporising liquids F01K
• CPC Class Codes: H01G 5/18 due to change in inclination, e.g. by flexing, by spiral wrapping
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 19/00 Switches operated by an operating part which is rotatable about a longitudinal axis thereof and which is acted upon directly by a solid body external to the switch, e.g. by a hand
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 61/00 Electrothermal relays thermal switches not operated by electrical input, thermal switches with anticipating electrical input H01H37/00; thermally-sensitive members H01H37/32

Abstract

MEMS (Microelectromechanical System) structures are provided that are designed to rotate in response to thermal actuation or the like. In one embodiment, the MEMS rotary structure includes a hub having one or more radial spoke members that impose a rotational force upon the hub in response to applied changes in temperature. The MEMS rotary structure can also include a ring at least partially encircling the hub and connected to the hub by means of one or more hub spoke members. Controllable clockwise, counterclockwise, or both clockwise and counterclockwise rotation of the hub or ring are provided. The MEMS rotary structures can also include thermal arched beam actuators that are operably connected to the spoke member. As the temperature changes, the thermal arched beam actuators move the spoke members in order to rotate the MEMS structure. Various applications are provided for these rotating MEMS structures, including but not limited to rotary actuators, rotary switches and relays, variable capacitors, variable resistors, shutters, and valves.

Claims

1. A microelectromechanical rotary structure comprising:

a microelectronic substrate;

a hub disposed upon a surface of said microelectronic substrate, said hub defining a central axis extending therethrough; and

at least two hub spoke members extending outwardly from said hub, wherein each of the at least two hub spokes has an imaginary center line extending through at least a portion of said hub spoke member that is displaced from the central axis of said hub, and wherein said at least two hub spoke members are operably adapted to impose a rotational force upon said hub in response to changes in temperature that provide for thermophysical motion of said at least two hub spoke members.

2. A microelectromechanical rotary structure according to claim 1, further comprising a ring spaced apart from said microelectronic substrate and at least partially encircling said hub, wherein said at least two hub spoke members extend between said ring and said hub, and wherein said at least two hub spoke members are adapted to respond to changes in temperature by changing in length so as to rotate said ring relative to said hub.

3. A microelectromechanical rotary structure according to claim 2, wherein said at least two hub spoke members comprise first and second hub spoke members, wherein said hub comprises a first portion operably connected to said first hub spoke member and a second portion operably connected to said second hub spoke member, wherein said first portion and said second portion are electrically isolated such that an electrical voltage differential introduced therebetween creates an electrical current flowing from said first portion, through both said first and second hub spoke members and through said ring, to said second portion, thereby changing the temperature of both said first and second hub spoke members.

4. A microelectromechanical rotary structure according to claim 2, further comprising:

at least two anchor members disposed on a surface of said microelectronic substrate and connected thereto; and

at least two anchored spoke members disposed between a respective anchor member and said ring, wherein said at least two anchored spoke members are adapted to respond changes in temperature by changing in length so as to rotate said ring relative to said hub.

5. A microelectromechanical rotary structure according to claim 2, further comprising at least one lever member extending from said ring.

6. A microelectromechanical rotary structure according to claim 2, further comprising at least one microelectromechanical actuator disposed on the surface of said microelectronic substrate and operably connected to said ring so as to controllably move said ring in response to thermal actuation, said at least one microelectromechanical actuator comprising:

at least one ring spoke member extending outwardly from said ring;

at least two anchor members disposed on the surface of said microelectronic substrate and connected thereto; and

at least one arched beam extending between said at least two anchor members, wherein said at least one arched beam is operably connected to said ring through said at least one ring spoke member, and wherein said at least one arched beam is adapted to further arch in response to thermal actuation so as to move said respective spoke member, thereby causing said ring to rotate relative to said hub.

7. A microelectromechanical rotary structure according to claim 6, wherein said at least one microelectromechanical actuator comprises:

a first set of microelectromechanical actuators having arched beams that are arched in a direction such that further arching of said arched beams causes said ring to rotate in a clockwise direction relative to said hub; and

a second set of microelectromechanical actuators having arched beams that are arched in a direction such that further arching of said arched beams causes said ring to rotate in a counterclockwise direction relative to said hub.

8. A microelectromechanical rotary structure according to claim 6, further comprising a plurality of arched beams, and wherein said at least one microelectromechanical actuator further comprises a coupler for interconnecting said plurality of arched beams.

9. A microelectromechanical rotary structure according to claim 1, further comprising a heater for providing thermal energy to said at least two hub spoke members.

10. A microelectromechanical rotary structure according to claim 1, wherein said at least two hub spoke members are spaced about said hub at an angular displacement selected from the group consisting of equal angular displacements and unequal angular displacements.

11. A microelectromechanical rotary structure according to claim 1, further comprising at least one lever member extending from said hub.

12. A microelectromechanical rotary structure according to claim 1, further comprising at least one microelectromechanical actuator disposed on the surface of said microelectronic substrate and operably connected to a respective hub spoke member so as to controllably move said hub spoke member in response to thermal actuation, said at least one microelectromechanical actuator comprising:

at least two anchor members disposed on the surface of said microelectronic substrate and connected thereto; and

at least one arched beam extending between said at least two anchor members, wherein said at least one arched beam is operably connected to said respective hub spoke member, and wherein said at least one arched beam is adapted to further arch in response to thermal actuation so as to move said respective hub spoke member, thereby imposing a rotational force upon said hub.

13. A microelectromechanical rotary structure according to claim 12, wherein said at least one microelectromechanical actuator comprises:

a first set of microelectromechanical actuators having arched beams that are arched in a direction such that further arching of said arched beams imposes a rotational force in a clockwise direction upon said hub; and

a second set of microelectromechanical actuators having arched beams that are arched in a direction such that further arching of said arched beams imposes a rotational force in a counterclockwise direction upon said hub.

14. A microelectromechanical rotary structure according to claim 12, further comprising a plurality of arched beams, and wherein said at least one microelectromechanical actuator further comprises a coupler for interconnecting said plurality of arched beams.

15. A microelectromechanical rotary structure comprising:

a microelectronic substrate;

a hub disposed upon a surface of said microelectronic substrate;

a ring disposed above the surface of said microelectronic substrate and at least partially encircling said hub; and

at least one hub spoke member that connects said ring and said hub, wherein said at least one hub spoke member is operably adapted to impose a rotational force upon said hub and said ring by changing in length in response to changes in temperature.

16. A microelectromechanical rotary structure according to claim 15, wherein said hub defines a central axis extending therethrough, and wherein an imaginary center line extending through at least a portion of said at least one hub spoke member also extends through said hub at a location displaced from the central axis of said hub.

17. A microelectromechanical rotary structure according to claim 15, further comprising:

at least one anchor member disposed on a surface of said microelectronic substrate and connected thereto; and

at least one anchored spoke member disposed between a respective anchor member and said ring, wherein said at least one anchored spoke member is adapted to respond changes in temperature by changing in length so as to rotate said ring relative to said hub.

18. A microelectromechanical rotary structure according to claim 15, further comprising a heater for providing thermal energy to said at least one hub spoke member.

19. A microelectromechanical rotary structure according to claim 15, further comprising a plurality of hub spoke members, said plurality of hub spoke members being spaced at an angular displacement selected from the group consisting of equal angular displacements and unequal angular displacements.

20. A microelectromechanical rotary structure according to claim 15, further comprising at least one lever member extending from said ring.

21. A microelectromechanical rotary structure according to claim 15, further comprising a rotational connection element between said hub and said microelectronic substrate to facilitate relative rotation therebetween.

22. A microelectromechanical rotary structure according to claim 15, wherein said ring comprises a reflective surface on at least a portion of the surface of said ring.

23. A microelectromechanical rotary structure according to claim 15, wherein said ring defines at least one hole having an axis intersecting the surface of said microelectronic substrate, and wherein said at least one hole defined by said ring can be disposed proximate a predetermined area of the surface of said microelectronic substrate as said ring rotates relative to said hub.

24. A microelectromechanical rotary structure according to claim 23, wherein the surface of said microelectronic substrate defines at least one hole therethrough, said at least one hole defined in said microelectronic substrate being positioned such that said at least one hole defined by said ring and said at least one hole defined by said microelectronic substrate can be selectively aligned to provide a passage through said ring and said microelectronic substrate as said ring rotates relative to said hub.

25. A microelectromechanical rotary structure according to claim 15, further comprising at least one contact affixed to the surface of said microelectronic substrate and at least one contact affixed to said ring so that the contacts can alternately interconnect and disconnect as said ring rotates relative to said hub.

26. A microelectromechanical rotary structure according to claim 15, further comprising at least one contact affixed to the surface of said microelectronic substrate and at least one contact affixed to said ring and adapted for rotation therewith such that the contacts are selectively electrically connected to provide different amounts of electrical resistance as said ring rotates relative to said hub.

27. A microelectromechanical rotary structure according to claim 15, further comprising:

a first conductive surface disposed on the surface of said microelectronic substrate; and

a complimentary second conductive surface disposed on said ring overlying said microelectronic substrate and spaced apart from the first conductive surface such that a portion of the complimentary second conductive surface overlies the first conductive surface on said microelectronic substrate, wherein the portion of the complimentary second conductive surface which overlies the first conductive surface varies as said ring rotates relative to said hub.

28. A microelectromechanical rotary structure comprising:

a microelectronic substrate;

a hub disposed on a surface of said microelectronic substrate;

at least one hub spoke member extending outwardly from said hub and spaced from the surface of said microelectronic substrate; and

at least one microelectromechanical actuator disposed on the surface of said microelectronic substrate and operably connected to a respective hub spoke member so as to controllably move said respective hub spoke member in response to thermal actuation, said at least one microelectromechanical actuator comprising;

at least two anchor members disposed on the surface of said microelectronic substrate; and

at least one arched beam extending between said at least two anchor members, wherein said at least one arched beam is operably connected to said respective hub spoke member, and wherein said at least one arched beam is adapted to further arch in response to thermal actuation so as to move said respective hub spoke member, thereby imposing a rotational force upon said hub.

29. A microelectromechanical rotary structure according to claim 28, further comprising a heater for providing thermal energy to said at least one microelectromechanical actuator.

30. A microelectromechanical rotary structure according to claim 28, further comprising a plurality of hub spoke members extending outwardly in different directions from said hub, and a plurality of microelectromechanical actuators operably connected to respective ones of said hub spoke members.

31. A microelectromechanical rotary structure according to claim 30, wherein said plurality of microelectromechanical actuators comprise:

a first set of microelectromechanical actuators having arched beams that are arched in a direction such that further arching of said arched beams impose a rotational force in a clockwise direction upon said hub; and

a second set of microelectromechanical actuators having arched beams that are arched in a direction such that further arching of said arched beams imposes a rotational force in a counterclockwise direction upon said hub.

32. A microelectromechanical rotary structure according to claim 28, further comprising a plurality of arched beams, and wherein said at least one microelectromechanical actuator further comprises a coupler for interconnecting said plurality of arched beams.

33. A microelectromechanical rotary structure according to claim 28, wherein said hub defines a central axis extending therethrough, and wherein an imaginary line extending through at least a portion of said at least one hub spoke member also extends through said hub at a location displaced from the central axis of said hub.

34. A microelectromechanical rotary structure according to claim 28, further comprising at least one lever member extending from said hub.

35. A microelectromechanical rotary structure according to claim 28, further comprising a rotational connection element between said hub and said microelectronic substrate to facilitate relative rotation therebetween.