Method for electronically tracking containers to avoid misprocessing of contents

• US 6,138,058 A
• Filed: 01/06/1998
• Issued: 10/24/2000
• Est. Priority Date: 01/06/1998
• Status: Expired due to Term

• Current Assignee: Jenoptik Infab, Inc.
• Original Assignee: Jenoptik Infab, Inc.
• Inventors: Myers, Dennis L., Van Antwerp, Kenneth D. Jr., Hardee, Bedford E.
• Primary Examiner(s): Ellis, Christopher P.
• Assistant Examiner(s): Tran, Khoi H.
• Application Number:
  US09/003,542
• Time in Patent Office: 1,022 Days
• Field of Search: 700/225, 700/215, 700/221, 700/222, 700/229, 340/825, 340/54, 340/572, 340/505, 340/568, 340/825.49
• US Class Current: 700/225
• CPC Class Codes: G03F 7/70541 Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G05B 19/128 the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/31432 Keep track of conveyed workpiece, batch, tool, conditions of stations, cells
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 2219/49302 Part, workpiece, code, tool identification
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

An apparatus for tracking items in a factory is disclosed. The apparatus is partially well suited for manufacturing environments wherein there are a plurality of items to be kept together in groups. The invention is particularly useful in semiconductor processing facilities wherein batches of semiconductor wafers to be processed are placed in wafer carriers which are, in turn, placed in work-in-progress boxes. Applying identification tags to one item that can be read and processed by a microterminal attached to the other item provides an effective way to prevent improper grouping of the items which can lead to misprocessing or handling of the batches of wafers.

Claims

1. An apparatus for tracking items in a work place, said apparatus comprising:

(a) a set of inner containers;

(b) a plurality of first tracking devices, each inner container of said set of inner containers having one of said first tracking devices attached to it, each of said first tracking devices having a unique identification code to identify the inner container to which the first tracking device is attached;

(c) a set of outer containers;

(d) a plurality of second tracking devices, each outer container of said set of outer containers having a second tracking device attached to it, each of said second tracking devices having means for accessing the identification code of the first tracking device attached to an inner container located within said outer container and having a microcontroller for processing a identification code to determine whether a proper inner container is located within said outer container;

at least one of said second tracking devices having an audible alarm which is activated if an inner container other than the proper inner container is located within the outer container.

2. The apparatus of claim 1 wherein said first tracking device is a label and the unique identification code is a machine readable code.

3. The apparatus of claim 2 wherein said machine readable code is a bar code.

4. The apparatus of claim 3 wherein said means for accessing the identification code of the first tracking device is a bar code reader.

5. The apparatus of claim 1 wherein at least one of said first tracking devices further includes a transmitter for transmitting an identification signal containing the unique identification code of said first tracking device.

6. The apparatus of claim 5 wherein the means for reading the identification code of said first tracking device comprises a receiver on the second tracking device which receives the identification signal containing the unique identification code transmitted by the transmitter of a first tracking device.

7. The apparatus of claim 5 wherein said identification signal is transmitted in response to an interrogation signal.

8. The apparatus of claim 7 wherein said second tracking device further includes a transmitter which transmits an interrogation signal.

9. The apparatus of claim 1 wherein said alarm is a visual alarm which is activated if an inner container other than the proper inner container is located within the outer container.

10. The apparatus of claim 1 wherein said second tracking device further includes a visual alarm which is also activated if an inner container other than the proper inner container is located within the outer container.

11. The apparatus of claim 1 further including a central controller.

12. The apparatus of claim 11 further including a plurality of first transceivers, each of said transceivers coupled to said central controller for two-way communication between the central controller and said transceivers, said transceivers strategically positioned throughout the work place.

13. The apparatus of claim 12 wherein at least one of said second tracking devices include a second transceiver for two-way communication with said first transceivers.

14. The apparatus of claim 13 wherein said second transceiver of a second tracking device and at least one of said first transceivers cooperate to indicate to the central controller the identity of an inner container located within the outer container to which said second tracking device is attached.

15. The apparatus of claim 1 wherein said microcontroller of the second tracking device is programmable to change which of said inner containers is the proper inner container to be located within said outer container.

16. The apparatus of claim 13 wherein said microcontroller of said second tracking device is reprogrammable based upon instructions received from the central controller via at least one of said first transceivers and the second transceiver of the second tracking device.

17. An apparatus for tracking items in a work place, said apparatus comprising:

(a) a set of outer containers;

(b) a plurality of labels, each outer container of said set of outer containers having one of said labels attached to it, each of said labels having a bar code to identify the outer container to which the label is attached;

(c) a set of inner containers;

(d) a plurality of second tracking devices, each inner container of said set of inner containers having a second tracking device attached to it, each of said second tracking devices having means for accessing the bar code of the label attached to an outer container within which said inner container is located and microcontroller for processing the bar code to determine whether said inner container is located within a proper outer container.

18. The apparatus of claim 17 wherein said means for accessing the bar code of the label is a bar code reader.

19. The apparatus of claim 17 further including a central controller.

20. The apparatus of claim 19 further including a plurality of first transceivers, each of said transceivers coupled to said central controller for two-way communication between the central controller and said transceivers, said transceivers strategically positioned throughout the work place.

21. The apparatus of claim 20 wherein at least one of said second tracking devices include a second transceiver for two-way communication with said first transceivers.

22. The apparatus of claim 21 wherein said second transceiver of a second tracking device and at least one of said first transceivers cooperate to indicate to the central controller the identity of a pair of containers comprising an inner container located within an outer container.

23. The apparatus of claim 17 wherein said microcontroller of the second tracking device is programmable to change which of said inner containers is the inner container to be located within the proper outer container.

24. The apparatus of claim 21 wherein said microcontroller of said second tracking device is reprogrammable based upon instructions received from the central controller via at least one of said first transceivers and the second transceiver of the second tracking device.

25. An apparatus for tracking items in a work place, said apparatus comprising:

(a) a set of outer containers;

(b) a plurality of first tracking devices, each outer container of said set of outer containers having one of said first tracking devices attached to it, each of said first tracking devices having a unique identification code to identify the outer container to which the first tracking device is attached;

(c) a set of inner containers;

(d) a plurality of second tracking devices wherein at least one of said second tracking devices includes an alarm, and each inner container of said set of inner containers having a second tracking device attached to it, each of said second tracking devices having means for accessing the identification code of the first tracking device attached to an outer container within which said inner container is located and a microcontroller for processing the identification code to determine whether said inner container is located within a proper outer container.

26. The apparatus of claim 25 wherein said alarm is an audible alarm which is activated if an inner container is located within the outer container other than the proper outer container.

27. The apparatus of claim 25 wherein said alarm is a visual alarm which is activated if an inner container is located within the outer container other than the proper outer container.

28. The apparatus of claim 26 wherein said second tracking device further includes a visual alarm which is also activated if an inner container is located within the outer container other than the proper outer container.