Multiple stage wet processing platform and method of use
First Claim
1. A multiple stage wet processing platform comprising:
- a sealable enclosure;
at least two processing modules positioned within the enclosure, each module including;
a housing having an opening and a door moveable into position covering the opening,at least two processing vessels within the housing, andan intra-module robot within the housing and including a support member, the intra-module robot moveable to a first position in which the support member is disposed in a first one of the processing vessels and a second position in which the support member is disposed in a second one of the processing vessels; and
an inter-module robot moveable between a first position adjacent to a first one of the modules and a second position adjacent to a second one of the modules.
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Accused Products
Abstract
A multiple stage wet processing platform includes a sealable enclosure, at least two processing modules positioned within the enclosure, at least one of them including a housing having an opening and a door moveable into position covering the opening, at least two processing vessels within the housing, and an intra-module robot within the housing and including a wafer support member, the intra-module robot moveable to a first position in which the support is disposed in a first one of the processing vessels and a second position in which the support is disposed in a second one of the processing vessels. An inter-module robot is positioned within the enclosure and is moveable between a first position adjacent to a first one of the modules and a second position adjacent to a second one of the modules.
29 Citations
30 Claims
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1. A multiple stage wet processing platform comprising:
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a sealable enclosure; at least two processing modules positioned within the enclosure, each module including; a housing having an opening and a door moveable into position covering the opening, at least two processing vessels within the housing, and an intra-module robot within the housing and including a support member, the intra-module robot moveable to a first position in which the support member is disposed in a first one of the processing vessels and a second position in which the support member is disposed in a second one of the processing vessels; and an inter-module robot moveable between a first position adjacent to a first one of the modules and a second position adjacent to a second one of the modules. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A multiple stage wet processing platform comprising:
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a sealable enclosure; a first processing module positioned within the enclosure, the first processing module including; a housing having an opening and a door moveable into position covering the opening, at least two processing vessels within the housing, and an intra-module robot within the housing and including a wafer support member, the intra-module robot moveable to a first position in which the support is disposed in a first one of the processing vessels and a second position in which the support is disposed in a second one of the processing vessels; a second processing module positioned within the enclosure, the second processing module including at least one process vessel; and an inter-module robot moveable between a first position adjacent to a first one of the modules and a second position adjacent to a second one of the modules. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A wet processing chamber including:
a housing having an opening and a door moveable into position covering the opening, least two processing vessels within the housing, and an intra-module robot within the housing and including a support member and a lid, the intra-module robot moveable to a first position in which the support member is disposed in a first one of the processing vessels and in which the lid covers the first one of the processing vessels, and a second position in which the support member is disposed in a second one of the processing vessels and the lid covers the second one of the processing vessels.
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30. A processing chamber including:
a housing having an opening and a door moveable into position covering the opening, at least two processing vessels within the housing, and an intra-module automation system within the housing, the intra-module robot moveable to a first position in which the support member is disposed in a first one of the processing vessels, and a second position in which the support member is disposed in a second one of the processing vessels, the automation system including, an object support member, a sealed robot housing coupled to the support member, the sealed housing containing at least one motor and an inductive receiver electrically coupled to the motor; an inductive transmitter external to the sealed robot housing and positioned remotely of the sealed robot housing, the motor responsive to inductive signals transmitted from the transmitter to the receiver to activate the intra-module automation.
Specification