Plasma enhancement apparatus and method for physical vapor deposition

• US 6,139,964 A
• Filed: 06/06/1995
• Issued: 10/31/2000
• Est. Priority Date: 04/22/1991
• Status: Expired due to Fees

• Current Assignee: Ionbond LLC (IHI Corporation)
• Original Assignee: Multi-Arc, Inc.
• Inventors: Sathrum, Paul E., Coll, Bernard F.
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US08/468,781
• Time in Patent Office: 1,974 Days
• Field of Search: 428/408, 428/336, 428/457, 428/698, 428/446, 204/192, 427/577
• US Class Current: 428/408
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 37/32055 Arc discharge
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/3266 Magnetic control means
• CPC Class Codes: Y10T 428/265 1 mil or less
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer
• CPC Class Codes: Y10T 428/31678 Of metal

Abstract

The present invention provides a plasma enhancement method and apparatus for electric arc vapor deposition. The plasma enhancement apparatus is positioned to act upon plasma generated from a plasma source before the plasma reaches a substrate to be coated by the plasma. The plasma enhancement apparatus includes a magnet disposed about a magnet axis and defining a first aperture, and a core member disposed about a core member axis and at least partially nested within the first aperture. The core member defines a second aperture, and the plasma enhancement apparatus is arranged and configured in such a manner that the evaporated cathode source material passes from the cathode source and through the second aperture toward the substrate to be coated by the evaporated cathode source material. The plasma is favorably conditioned as it passes through the plasma enhancement apparatus.

Claims

1. An article manufactured by an electric arc vapor deposition process, said article comprising:

(a) a substrate having a surface; and

(b) a layer of amorphous carbon arranged on said substrate surface, said amorphous carbon being applied to said substrate surface by electric arc vapor deposition and being thin, homogeneous, dense, smooth, extremely hard, having less than one percent hydrogen.

2. The article of claim 1 wherein said substrate comprises a metal.

3. The article of claim 2 wherein said substrate comprises a ferrous metal.

4. The article of claim 2 wherein said substrate comprises steel.

5. The article of claim 1 wherein said substrate comprises tungsten carbide.

6. The article of claim 1 wherein said substrate comprises silicon.

7. The article of claim 1 wherein said layer of amorphous carbon is arranged directly contiguous to said surface of said substrate.

8. The article of claim 1, wherein said amorphous carbon layer has an SP³ fraction of greater than 50%.

9. The article of claim 8 wherein said SP³ fraction is greater than 80 percent.

10. The article of claim 1 wherein the amorphous carbon has a hardness of at least 60 giga Pascals.

11. The article of claim 1 wherein said amorphous carbon layer has a density of at least about 3 g/cm².

12. The article of claim 1 wherein said amorphous carbon layer has a thickness of greater than 3 microns.

13. An article manufactured by an electric arc vapor deposition process, said article comprising:

(a) a metal substrate having a surface; and

(b) a layer of amorphous carbon arranged on said substrate surface, said amorphous carbon being applied directly contiguous to said metal surface by electric arc vapor deposition and having less than one percent hydrogen.

14. The article of claim 13 wherein said amorphous carbon layer is thin, homogeneous, dense, smooth, extremely hard and has an SP³ fraction of greater than 50 percent.

15. The article of claim 14 wherein said SP³ fraction is greater than 80 percent.

16. The article of claim 13 wherein the amorphous carbon has a hardness of at least 60 giga Pascals.

17. The article of claim 13 wherein said amorphous carbon layer has a density of at least about 3 g/cm².

18. The article of claim 13 wherein said amorphous carbon layer has a thickness of greater than 3 microns.