Multilayer ion plated coatings comprising titanium oxide

• US 6,139,968 A
• Filed: 02/04/1998
• Issued: 10/31/2000
• Est. Priority Date: 03/08/1995
• Status: Expired due to Term

• Current Assignee: Newport Corporation (MKS Instruments Incorporated)
• Original Assignee: Corion Corp (Thermo Fisher Scientific Incorporated)
• Inventors: LeBlanc, Luke Alec, Knapp, Jamie
• Primary Examiner(s): Speer, Timothy M.
• Application Number:
  US09/018,751
• Time in Patent Office: 1,000 Days
• Field of Search: 428/428, 428/432, 428/701, 428/702
• US Class Current: 428/428
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium
• CPC Class Codes: C23C 14/10 Glass or silica
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: G21K 1/062 Devices having a multilayer structure
• CPC Class Codes: G21K 2201/067 Construction details
• CPC Class Codes: H01J 2237/3132 Evaporating

Abstract

The present invention provides multilayer ion plated coatings comprising a titanium oxide as well as methods for applying such coatings onto a variety of substrates. In particular, the invention provides ion plated transparent multilayer coatings comprising layers of titanium oxide (particularly TiO_x, x≈2) and materials of low refractive indices such as SiO₂, Al₂ O₃, MgO etc. Further provided are articles of manufacture comprising such multilayer coatings and novel deposition methods.

Claims

1. A substantially transparent multilayer ion plated coating, comprising one or more alternating layers of 1) titanium oxide and 2) a material having an index of refraction of less than 2.0.

2. The coating of claim 1 wherein one or more layers of titanium oxide contain TiO_x (x≈

2).

3. The coating of claim 1 wherein the coating transmits 97 percent or more of incident light intended for transmission.

4. The coating of claim 1 wherein the material having an index of refraction of less than 2.0 is SiO₂, Al₂ O₃, SiO, a fluoride, or MgO.

5. The coating of claim 1 wherein the material having an index of refraction of less than 2.0 is SiO₂.

6. The coating of claim 1 wherein the coating contains about 30 or more alternating layers.

7. The coating of claim 1 wherein the multilayer coating is obtainable by a process comprising steps of (a) depositing an ion plated titanium oxide film layer on a substrate, and (b) thereafter depositing over the titanium oxide film layer an ion plated film layer of the material having an index of refraction of less than 2.0, wherein a titanium reagent material used to deposit the titanium oxide film layer is cooled to a temperature below its deposition temperature before commencing the depositing over the titanium oxide film layer.

8. The coating of claim 1 wherein the multilayer coating is obtainable by a process comprising steps of (a) depositing an ion plated titanium oxide film layer on a substrate, and (b) depositing over the titanium oxide film layer an ion plated film L layer of material having an index of refraction of less than 2.0, the L layer formed from materials comprising a vaporized metal reagent and oxygen reagent, wherein the vaporized metal and oxygen reagents are present to form the layer in amounts sufficient to substantially inhibit formation of optically absorbing titanium oxide or L materials.

9. The coating of claim 8 wherein the material having an index of refraction of less than 2.0 is deposited at rate of less than about 0.4 nm/second.

10. A substrate comprising an optical filter that is the coating of claim 1.

11. The substrate of claim 10 wherein the substrate comprises a glass, plastic, semiconductor or metal material.

12. The substrate comprising a coating of claim 1 on an optical filter glass, color filter glass, visible transmitting glass or semiconductor.

13. A microelectronic device comprising a coating of claim 1.

14. The microelectronic device of claim 13 wherein the device is a photovoltaic or photoconductive device.

15. The coating of claim 1, wherein the coating has high transmission of infrared light.

16. The coating of claim 1, wherein the coating has high transmission of visible light.

17. The coating of claim 1, wherein the coating has high transmission of light with wavelengths ranging from about 400 to about 5000 nm.