Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same

• US 6,139,983 A
• Filed: 06/23/1998
• Issued: 10/31/2000
• Est. Priority Date: 07/15/1997
• Status: Expired due to Term

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Katsuda, Yuji, Araki, Kiyoshi, Ohashi, Tsuneaki, Shimura, Sadanori
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US09/102,582
• Time in Patent Office: 861 Days
• Field of Search: 428/698, 428/704, 428/901, 428/472, 428/469, 269/289 R, 118/726, 118/728, 432/253, 432/262, 432/264, 432/265, 414/935, 248/176.1, 248/346.01, 206/710, 206/832
• US Class Current: 428/698
• CPC Class Codes: C04B 35/10 based on aluminium oxide
• CPC Class Codes: C04B 35/14 based on silica
• CPC Class Codes: C04B 35/563 based on boron carbide
• CPC Class Codes: C04B 35/565 based on silicon carbide
• CPC Class Codes: C04B 35/581 based on aluminium nitride
• CPC Class Codes: C04B 35/584 based on silicon nitride
• CPC Class Codes: C04B 41/0072 Heat treatment
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/4529 applied from the gas phase
• CPC Class Codes: C04B 41/4533 plasma assisted
• CPC Class Codes: C04B 41/4556 coating or impregnating with a product reacting with the substrate, e.g. generating a metal coating by surface reduction of a ceramic substrate
• CPC Class Codes: C04B 41/4558 Coating or impregnating involving the chemical conversion of an already applied layer, e.g. obtaining an oxide layer by oxidising an applied metal layer
• CPC Class Codes: C04B 41/5018 with fluorine compounds
• CPC Class Codes: C04B 41/5032 Aluminates aluminate spinels C04B41/5046
• CPC Class Codes: C04B 41/52 Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
• CPC Class Codes: C04B 41/85 with inorganic materials
• CPC Class Codes: C04B 41/89 for obtaining at least two superposed coatings having different compositions
• CPC Class Codes: C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber
• CPC Class Codes: Y10S 206/832 Semiconductor wafer boat
• CPC Class Codes: Y10S 428/901 Printed circuit
• CPC Class Codes: Y10T 428/265 : 1 mil or less

Abstract

This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.

Claims

1. A wafer-supporting member exposed to a plasma of a halogen based corrosive gas, said member comprising (1) a main body made of a material selected from the group consisting of a silicon nitride, a silicon carbide, alumina, boron carbide, silicon oxide, and an aluminum nitride and (2) a corrosion-resistant layer formed on a surface of the main body, in which the corrosion-resistant layer contains a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.

2. A wafer-supporting member according to claim 1, wherein the main body is made of an aluminum nitride-base ceramic having a thermal conductivity of not less than 60 W/(m·

K).

3. A wafer-supporting member according to claim 1, wherein the fluoride is a fluoride of a rare earth element.

4. A wafer-supporting member according to claim 1, wherein the fluoride is a fluoride of a metal selected from the group consisting of calcium, strontium, and barium.