Method for detecting process sensitivity to integrated circuit layout by compound processing

• US 6,140,140 A
• Filed: 09/16/1998
• Issued: 10/31/2000
• Est. Priority Date: 09/16/1998
• Status: Expired due to Fees

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Hopper, C. Bradford
• Primary Examiner(s): Bowers, Charles
• Assistant Examiner(s): Thompson, Craig
• Application Number:
  US09/154,075
• Time in Patent Office: 776 Days
• Field of Search: 438/8, 438/7, 438/14, 438/16, 356/394
• US Class Current: 438/8
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A method and apparatus that uses compound processing for detecting defects in integrated circuits involves processing two portions of a semiconductor wafer differently according to a first and a second process. The first process and the second process are performed on alternating columns on the wafer. Image subtraction is used to detect differences between the layouts in adjacent columns. After differences are detected, the layout is examined to determine whether the difference represents a defect. If so, the design rules of the layout can be changed to accommodate a wider process variation.

Claims

1. A method of detecting defects in integrated circuits, comprising:

applying a first manufacturing process to only a first portion on a starting material;

applying a second manufacturing process, different from the first process, to only a second portion on the starting material; and

comparing the first and second portions to each other using an image subtraction method of defect detection by subtracting an image of the first portion from an image of the second portion to detect systematic pattern defects present in one of the first and second portions.

2. The method of claim 1, wherein the first and second portions are arranged in respective alternating columns on the starting material.

3. The method of claim 2, wherein the step of comparing the first and second portions includes scanning across the alternating columns, storing the image of the first portion in one of the alternating columns, and comparing the stored image of the first portion with the image of the second in an adjacent one of the alternating columns.

4. The method of claim 1, further comprising examining a circuit layout of the first or second portion at a location at which the defect is detected.

5. The method of claim 4, further comprising altering design rules as a function of the examination of the circuit layout at the location at which the defect is detected.

6. The method of claim 1, wherein the first manufacturing process comprises:

providing a first layer of photoresist on semiconductor material;

exposing a first pattern in first alternating columns;

etching the first pattern with a first controlled process to create the first portions; and

stripping the remaining first layer of photoresist.

7. The method of claim 6, wherein the second manufacturing process comprises:

applying a second layer of photoresist on semiconductor material following stripping of the first layer of photoresist;

exposing the first pattern in second alternating columns;

etching the first pattern with a second controlled process which is different from the first controlled process to create the second portions; and

stripping the second layer of photoresist remaining after etching with the second controlled process prior to the step of comparing the first and second portions to each other.

8. A method according to claim 1, wherein the first and second portions are cells within a die.

9. The method according to claim 1, wherein the first and second portions are dies.

10. A method of compound processing a wafer having repeating portions with identical layouts to detect systematic pattern defects, comprising the steps of:

processing only a first subset of the portions with a first processing step;

processing only a second subset of the portions with a second processing step that is different from the first processing step;

comparing a digitized image of one of the portions in the first subset of portions with a digitized image of one of the portions in the second subset of portions;

detecting differences between the digitized images based on the comparison of the digitized images; and

examining the detected differences to determine whether the detected differences represent systematic pattern defects.

11. The method of claim 10, wherein processing the first subset and processing the second subset occurs separately from each other by masking one subset while the other is being processed.

12. The method of claim 10, further comprising arranging the first and second subsets of portions in alternating first and second columns, respectively.

13. The method of claim 12, further comprising obtaining digitized images of the alternating first and second columns by scanning across the columns.

14. The method of claim 10, further comprising altering the design rules to avoid creating systematic pattern defects, after detecting the differences and determining that the detected differences represent systematic pattern defects.