Parallel plate type oscillatory gyroscope

• US 6,140,739 A
• Filed: 05/25/1999
• Issued: 10/31/2000
• Est. Priority Date: 05/29/1998
• Status: Expired due to Fees

• Current Assignee: Fumihito Arai, Kabushiki Kaisha Tokai RIKA Denki Seisakusho, Toshio Fukuda
• Original Assignee: Fumihito Arai, Kabushiki Kaisha Tokai RIKA Denki Seisakusho, Toshio Fukuda
• Inventors: Fukuda, Toshio, Arai, Fumihito, Iwata, Hitoshi, Itoigawa, Koichi
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US09/318,488
• Time in Patent Office: 525 Days
• Field of Search: 310/321, 310/323, 310/329, 310/316.01, 310/317, 310/319, 73/505
• US Class Current: 310/321
• CPC Class Codes: G01C 19/5642 using vibrating bars or beams

Abstract

An oscillatory gyroscope having an improved detecting sensitivity. The oscillatory gyroscope includes an elastic metal body in the form of a rectangular column having first to fourth surfaces. The elastic metal body includes a distal portion having a distal through hole extending from the second surface to the fourth surface and a proximal portion having a second through hole extending from the first surface to the third surface. Two first ferroelectric substance films are provided on the first and third surfaces in the distal portion. Two second ferroelectric substance films are provided over the second and fourth surfaces in the proximal portion. First and second electrodes are provided on each of the first ferroelectric substance films, and third and fourth electrodes are provided on the respective second ferroelectric substance films. Voltages of reverse polarities are applied to the first and second electrodes. The positions of the first and second electrodes on the first surface are reversed with respect to those of the third surface.

Claims

1. An oscillatory gyroscope comprising:

an elastic metal body in the form of a rectangular column having first to fourth surfaces, the first and third surfaces being opposite, the second and fourth surfaces being opposite, the elastic metal body including a distal portion having a distal through hole extending from the second surface to the fourth surface and a proximal portion having a second through hole extending from the first surface to the third surface;

two first ferroelectric substance films provided on the first and third surfaces in the distal portion;

two second ferroelectric substance films provided over the second and fourth surfaces in the proximal portion;

first and second electrodes provided on each of the first ferroelectric substance films, wherein voltages of reverse polarities are applied to the first and second electrodes; and

third and fourth electrodes provided on the respective second ferroelectric substance films,

wherein the positions of the first and second electrodes on the first surface are reversed with respect to those of the third surface.

2. The oscillatory gyroscope according to claim 1, wherein voltages of reverse polarities are applied to the third and fourth electrodes, and wherein the positions of the third and fourth electrodes on the second surface are reversed with respect to those of the fourth surface.

3. The oscillatory gyroscope according to claim 1, wherein the first and second electrodes are provided on portions of the first ferroelectric substances films where stresses concentrate when the elastic metal body deforms.

4. The oscillatory gyroscope according to claim 1, wherein the elastic metal body is made of titanium, and the two first ferroelectric substance films comprise PZT thin films provided directly on the first and third surfaces and wherein the two second ferroelectric substance films comprise PZT thin films provided directly on the second and fourth surfaces.

5. The oscillatory gyroscope according to claim 1, wherein the first and second through holes have rectangular cross-sections.

6. The oscillatory gyroscope apparatus comprising:

an oscillatory gyroscope, the gyroscope including;

an elastic metal body in the form of a rectangular column having first to fourth surfaces, the first and third surfaces being opposite, the second and fourth surfaces being opposite, the elastic metal body including a distal portion having a distal through hole extending from the second surface to the fourth surface and a proximal portion having a proximal through hole extending from the first surface to the third surface,

two first ferroelectric substance films provided on the first and third surfaces in the distal portion,

two second ferroelectric substance films provided on the second and fourth surfaces in the proximal portion,

first and second electrodes provided on each of the first ferroelectric substance films, wherein voltages of reverse polarities are applied to the first and second electrodes, and

third and fourth electrodes provided on each of the second ferroelectric substance films, wherein the positions of first and second electrodes are reversed with respect to those of the third surface;

an oscillation circuit for generating an oscillation signal having a predetermined frequency;

a reverse amplification circuit connected to the oscillation circuit for reversing the oscillation signal and for generating a reverse voltage signal, the voltage signal being applied to the third electrodes;

a non-reverse amplification circuit connected to the oscillation circuit for generating a voltage signal based on the oscillation signal, the voltage signal being applied to the fourth electrodes;

a first differential circuit connected to the first electrode of the first surface and the second electrode of the third surface, wherein the first differential circuit receives first piezoelectric signals generated by deformation of portions of the first ferroelectric substance films that correspond to the first and second electrodes that are connected to the differential circuit, and the first differential circuit generates a first differential voltage signal representing the difference of the first piezoelectric signals;

a second differential circuit connected to the second electrode of the first surface and the first electrode of the third surface, wherein the second differential circuit receives second piezoelectric signals generated by deformation of portions of the first ferroelectric substance films that correspond to the first and second electrodes that are connected to the second differential circuit, and the second differential circuit generates a second differential voltage signal representing the difference of the second piezoelectric signals; and

an adder connected to the first and second differential circuits for adding the first and second differential voltage signals and generating a detection signal.

7. The oscillatory gyroscope apparatus according to claim 6, voltages of reverse polarities are applied to the third and fourth electrodes, and wherein the positions of the third and fourth electrodes on the second surface are reversed with respect to those of the fourth surface.

8. The oscillatory gyroscope apparatus according to claim 6, wherein the first and second electrodes are provided on portions of the first ferroelectric substance films where stresses concentrate when the elastic metal body deforms.

9. The oscillatory gyroscope apparatus according to claim 6, wherein the elastic metal body is made of titanium, and the two first ferroelectric substance films comprise PZT thin films provided directly on the first and third surfaces, and wherein the two second ferroelectric substance films comprise PZT thin films provided directly on the second and fourth surfaces.

10. The oscillatory gyroscope apparatus according to claim 6, wherein the first and second through holes have rectangular cross-sections.