Imaging ATR spectrometer

• US 6,141,100 A
• Filed: 07/15/1998
• Issued: 10/31/2000
• Est. Priority Date: 08/15/1997
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies Australia (M) Pty., Ltd. (Agilent Technologies, Inc.)
• Original Assignee: Bio-Rad Laboratories Incorporated
• Inventors: Burka, E. Michael, Curbelo, Raul
• Primary Examiner(s): Evans, F. L.
• Application Number:
  US09/116,191
• Time in Patent Office: 839 Days
• Field of Search: 356/326, 356/328, 356/300, 356/445-448, 356/244, 356/346, 356/128, 356/135, 356/136, 356/237, 250/341.1, 250/339.11
• US Class Current: 356/451
• CPC Class Codes: G01J 3/0208 using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
• CPC Class Codes: G01J 3/021 using plane or convex mirrors, parallel phase plates, or particular reflectors
• CPC Class Codes: G01J 3/2823 Imaging spectrometer
• CPC Class Codes: G01J 3/42 Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry beam switching arrangements G01J3/08
• CPC Class Codes: G01N 21/552 Attenuated total reflection

Abstract

Method and apparatus for providing an imaging attenuated total reflection (ATR) spectrometer which provides faster measurement speed and better spatial resolution than systems collecting an equivalent amount of data using conventional, non-imaging ATR methods and systems. Apparatus includes a radiation source, an interferometer coupled to the radiation source which produces a spectrally-multiplexed input beam of radiation, an internal reflection element (IRE) engaging a sample-under-test, a focal plane array detector, a first optical system adapted and positioned to direct and concentrate the input beam through the rear surface of the IRE towards a contact area of the sample such that an angle of incidence of said input beam at the front surface is equal to or greater than the critical angle for the IRE, and a second optical system adapted and positioned to collect reflected radiation from the contact area and image the same onto the focal plane array detector.

Claims

1. An imaging attenuated total reflection (ATR) spectrometer comprising:

a radiation source;

an internal reflection element (IRE) having a front surface and a rear surface, said front surface including a contact area for engaging a sample-under-test;

a two-dimensional focal plane array detector for detecting radiation incident upon and reflected from discrete locations of said contact area;

means for directing and concentrating radiation from said radiation source through said rear surface of said IRE towards said contact area such that an angle of incidence of said input beam at said front surface is equal to or greater than a critical angle for said IRE;

means for collecting reflected radiation from said contact area and for imaging said reflected radiation onto said two-dimensional focal plane array detector, said reflected radiation including information relating to a spatial distribution of reflected energies; and

a wavelength-selective element coupled to intercept radiation traveling between said radiation source and said two-dimensional focal plane array detector to effect spectrally selective modulation of radiation intercepted by said wavelength-selective element.

2. The imaging ATR spectrometer of claim 1, further comprising a signal processor coupled to said focal plane array detector for obtaining said spatial distribution information from said two-dimensional focal plane array detector.

3. The imaging ATR spectrometer of claim 1, wherein:

said means for directing and concentrating includes one or more lens elements; and

said means for collecting reflected radiation and for imaging said reflected radiation includes one or more lens elements.

4. The imaging ATR spectrometer of claim 1, wherein:

said means for directing and concentrating includes one or more reflective elements; and

said means for collecting reflected radiation and for imaging said reflected radiation includes one or more reflective elements.

5. The imaging ATR spectrometer of claim 1, wherein said rear surface of said IRE is convex and has a spherical curvature whose center of curvature lies on said front surface of said IRE.

6. The imaging ATR spectrometer of claim 5, wherein said front surface of said IRE is convex and has a spherical curvature whose radius of curvature is substantially longer than a rear surface radius.

7. The imaging ATR spectrometer of claim 1, wherein said spectrally-selective element is an interferometer located between said radiation source and said IRE so as to produce a spectrally-multiplexed input beam of radiation to said IRE.

8. An imaging attenuated total reflection (ATR) spectrometer comprising:

a radiation source;

an internal reflection element (IRE) having a front surface and a rear surface, said front surface including a contact area for engaging a sample-under-test;

a two-dimensional focal plane array detector for detecting radiation incident upon and reflected from discrete locations of said contact area;

a first optical system adapted and positioned to direct said input beam through said rear surface of said IRE and toward said contact area such that an angle of incidence of said input beam at said front surface is equal to or greater than a critical angle for said IRE;

a second optical system adapted and positioned to collect reflected radiation from said contact area and to image said reflected radiation onto said two-dimensional focal plane array detector, said reflected radiation including information relating to a spatial distribution of reflected energies; and

an interferometer coupled to intercept radiation traveling between said radiation source and said two-dimensional focal plane array detector to effect spectrally selective modulation of radiation intercepted by said interferometer.

9. The imaging ATR spectrometer of claim 8, wherein said interferometer is of the type including a beam splitter, at least one fixed mirror, and at least one movable mirror.

10. The imaging ATR spectrometer of claim 8, wherein said radiation source comprises a broadband infrared light source.

11. The imaging ATR spectrometer of claim 8, wherein:

said first optical system includes one or more lens elements; and

said second optical system includes one or more lens elements.

12. The imaging ATR spectrometer of claim 8, wherein:

said first optical system includes one or more reflective elements; and

said second optical system includes one or more reflective elements.

13. The imaging ATR spectrometer of claim 8, wherein said rear surface of said IRE is convex and has a spherical curvature whose center of curvature lies on said front surface of said IRE.

14. The imaging ATR spectrometer of claim 13, wherein said front surface of said IRE is convex and has a spherical curvature whose radius of curvature is substantially longer than a rear surface radius.

15. A method of obtaining a spectral absorption image of a sample comprising the steps of:

positioning an ATR crystal over a portion of the sample and in contact with same so that a contact area between the ATR crystal and the sample is defined;

irradiating said contact area by directing a beam of radiation originating from a source through said ATR crystal and toward said contact area at the angle of incidence equal to or greater than the critical angle of the ATR crystal;

collecting reflected radiation from said contact area, the reflected radiation including spatial information;

imaging said reflected radiation from said contact area onto a two-dimensional array of detectors; and

interposing a wavelength-selective element between said source and said two-dimensional array of detectors to provide spectral information at different locations of said contact area.

16. The method of claim 15 further comprising the steps of:

converting data collected by said two-dimensional array of detectors into the spectral absorption image.

17. The method of claim 16, wherein said step of converting comprises the steps of:

retrieving intensity information from said two-dimensional array of detectors; and

calculating a Fourier transform representation of said intensity information.

18. An imaging attenuated total reflection (ATR) micro-spectrometer comprising:

a radiation source;

an internal reflection element (IRE) having a front surface and a rear surface, said front surface including a contact area for engaging a sample-under-test;

a two-dimensional focal plane array detector for detecting radiation incident upon and reflected from discrete locations of said contact area;

a microscope objective, wherein said IRE is at a focus of said microscope objective;

means for directing said input beam of radiation into said microscope objective;

an image-forming optic;

wherein said microscope objective is positioned and configured to focus said input beam of radiation through said rear surface of said IRE towards said contact area, to

collect said reflected radiation, and to direct said reflected radiation towards said image-forming optic;

wherein said image-forming optic images said reflected radiation onto said two dimensional focal plane array detector, said reflected radiation including information relating to a spatial distribution of reflected energies; and

an interferometer coupled to intercept radiation traveling between said radiation source and said two-dimensional focal plane array detector to effect spectrally selective modulation of radiation intercepted by said interferometer.