Electrostatic chuck

• US 6,141,203 A
• Filed: 11/07/1997
• Issued: 10/31/2000
• Est. Priority Date: 03/03/1994
• Status: Expired due to Fees

• Current Assignee: Dr. Arthur Sherman
• Original Assignee: Dr. Arthur Sherman
• Inventors: Sherman, Arthur
• Primary Examiner(s): FLEMING, FRITZ M
• Application Number:
  US08/965,867
• Time in Patent Office: 1,089 Days
• Field of Search: 361/230, 361/233, 361/234, 361/235, 269/8, 269/903, 279/128
• US Class Current: 361/234
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

An electrostatic chuck is provided having a plurality of small electrostatic structures for holding an electrically conductive workpiece forming a plate of a capacitor. Each electrostatic structure includes a first thermally conductive single-crystal dielectric sheet, and a first electrode in sheet form sandwiched between the first dielectric sheet and a second dielectric surface. The workpiece, typically a conductive or semiconductive wafer, is juxtaposed to the first dielectric sheet of each electrostatic structure and forms a second electrode. The second dielectric sheet, if thick, is used as a thermally conducting base plate which can be attached to a low pressure reactor. If the second dielectric is a thin sheet, then it is mounted to a thermally conductive metal base plate through which heat can be controllably conducted. The resultant electrostatic structure may be brazed to the metal base plate if the thermal expansion characteristics of the two elements are sufficiently matched. The first thermally conductive dielectric sheet is preferably formed of sapphire (Al₂ O₃), which is sufficiently thermally conductive to allow for rapid heat transfer between the base plate and the workpiece. The first electrodes of different electrostatic structures are held at different electrical potentials (typically of several thousand volts difference) and a charge is maintained by this potential difference between selected electrostatic structures.

Claims

1. A fork style electrostatic end effector, comprising:

a holder having a top surface, a bottom surface, a set of tines, and two terminals, wherein the top surface includes a plurality of recesses, the bottom surface includes a plurality of grooves, the holder defines a plurality of passages, each passage extending from one recess to one groove, and each groove extends from at least one passage to one terminal;

a plurality of electrostatic buttons, wherein one of the electrostatic buttons is disposed in a recess; and

a plurality of conductors, wherein of the conductors is disposed in one groove and connects one of the electrostatic buttons to one of the terminals.

2. The fork style electrostatic end effector of claim 1, wherein at least one of the plurality of electrostatic buttons comprises a bottom plate with a hole, a conductor plate fixed to the bottom plate, a separator surrounding the conductor plate, and a top plate fixed to conductor plate, wherein the bottom plate, the separator and the top plate are either isotropic sapphire or crystal-aligned anisotropic sapphire.

3. The fork style electrostatic end effector of claim 1, wherein at least one of the electrostatic buttons is disposed in the recess such that the top surface of the one button in the recess is substantially flush with the top surface of the holder and includes a stud residing in the passage, and one conductor disposed in the groove.

4. The fork style electrostatic end effector of claim 1, further comprising means for applying a positive and a negative high voltage to the respective terminals to activate an electrostatic clamping action.

5. The fork style electrostatic end effector of claim 4, wherein the plurality of electrostatic buttons is arranged such that the surface area of the one or more electrostatic buttons connected to the positive voltage is substantially equal to the surface area of the one or more electrostatic buttons connected to the negative voltage.