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Electrostatic chuck

  • US 6,141,203 A
  • Filed: 11/07/1997
  • Issued: 10/31/2000
  • Est. Priority Date: 03/03/1994
  • Status: Expired due to Fees
First Claim
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1. A fork style electrostatic end effector, comprising:

  • a holder having a top surface, a bottom surface, a set of tines, and two terminals, wherein the top surface includes a plurality of recesses, the bottom surface includes a plurality of grooves, the holder defines a plurality of passages, each passage extending from one recess to one groove, and each groove extends from at least one passage to one terminal;

    a plurality of electrostatic buttons, wherein one of the electrostatic buttons is disposed in a recess; and

    a plurality of conductors, wherein of the conductors is disposed in one groove and connects one of the electrostatic buttons to one of the terminals.

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