Four-mirror extreme ultraviolet (EUV) lithography projection system

• US 6,142,641 A
• Filed: 06/18/1998
• Issued: 11/07/2000
• Est. Priority Date: 06/18/1998
• Status: Expired due to Fees

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California), Ultratech Stepper, Inc. (Veeco Instruments Incorporated)
• Inventors: Shafer, David R, Cohen, Simon J, Jeong, Hwan J
• Primary Examiner(s): Spyrou, Cassandra
• Assistant Examiner(s): Robinson, Mark A.
• Application Number:
  US09/099,571
• Time in Patent Office: 873 Days
• Field of Search: 359/364, 359/365, 359/366, 359/727, 359/730, 359/731, 359/857, 359/858, 359/859, 359/861
• US Class Current: 359/859
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 11/255 for measuring radius of curvature measuring diameter G01B11/08
• CPC Class Codes: G01M 11/005 Testing of reflective surfaces, e.g. mirrors
• CPC Class Codes: G02B 17/0657 off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
• CPC Class Codes: G03F 7/70233 Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
• CPC Class Codes: G03F 7/70258 Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
• CPC Class Codes: G03F 7/70591 Testing optical components

Abstract

The invention is directed to a four-mirror catoptric projection system for extreme ultraviolet (EUV) lithography to transfer a pattern from a reflective reticle to a wafer substrate. In order along the light path followed by light from the reticle to the wafer substrate, the system includes a dominantly hyperbolic convex mirror, a dominantly elliptical concave mirror, spherical convex mirror, and spherical concave mirror. The reticle and wafer substrate are positioned along the system'"'"'s optical axis on opposite sides of the mirrors. The hyperbolic and elliptical mirrors are positioned on the same side of the system'"'"'s optical axis as the reticle, and are relatively large in diameter as they are positioned on the high magnification side of the system. The hyperbolic and elliptical mirrors are relatively far off the optical axis and hence they have significant aspherical components in their curvatures. The convex spherical mirror is positioned on the optical axis, and has a substantially or perfectly spherical shape. The spherical concave mirror is positioned substantially on the opposite side of the optical axis from the hyperbolic and elliptical mirrors. Because it is positioned off-axis to a degree, the spherical concave mirror has some asphericity to counter aberrations. The spherical concave mirror forms a relatively large, uniform field on the wafer substrate. The mirrors can be tilted or decentered slightly to achieve further increase in the field size.

Claims

1. A system for transferring a pattern on a reticle to a substrate, the reticle illuminated with light, the system comprising:

a dominantly hyperbolic convex mirror positioned to receive the light from the reticle, and reflecting the received light;

a dominantly elliptical concave mirror positioned to receive the light reflected from the hyperbolic mirror, and reflecting the light received from the hyperbolic mirror;

a first substantially spherical convex mirror positioned to receive the light reflected from the elliptical mirror, and reflecting the light received from the elliptical mirror; and

a second approximately spherical concave mirror positioned to receive the light reflected from the first spherical mirror, and reflecting the light to the substrate.

2. A system as claimed in claim 1, further comprising:

an aperture stop positioned at the convex spherical mirror.

3. A system as claimed in claim 1, wherein said system has an optical axis, and wherein a surface or symmetrical projection of a surface of each of the mirrors is substantially symmetrically arranged about the optical axis of the system.

4. A system as claimed in claim 1, wherein at least one of the mirrors is tilted relative to the optical axis of the system to increase the field size of the image plane at the substrate.

5. A system as claimed in claim 1, wherein at least one of the mirrors is decentered relative to the optical axis of the system to increase the field size at the substrate.

6. A system as claimed in claim 1, wherein the field size produced by the system at the substrate is at least 26 millimeters by 1.5 millimeters.

7. A system as claimed in claim 1, wherein the field size produced by the system at the substrate is at least 26 millimeters by 2.0 millimeters.

8. A system as claimed in claim 1, further comprising:

a light source generating the light irradiated onto the reticle, the light source positioned to direct the light at an oblique angle to the surface of the reticle so that the hyperbolic convex mirror receives patterned light from the reticle at a position that is spaced apart from the light source so that the light source and hyperbolic convex mirror do not obstruct the light traveling through the system.

9. A system as claimed in claim 8, wherein the light generated by the source has a wavelength in the extreme ultraviolet (EUV) range.

10. A system as claimed in claim 1, further comprising:

a stage holding the reticle, for positioning the reticle with respect to the light source and the hyperbolic mirror.

11. A system as claimed in claim 1, further comprising:

a stage holding the substrate, for positioning the substrate with respect to the second spherical mirror.

12. A system as claimed in claim 11, wherein the stage is used to move the substrate in a step-and-scan fashion to produce repeated reticle patterns on the substrate.

13. A system as claimed in claim 1, further comprising:

at least one stage having one of said mirrors mounted thereto, for positioning the one mirror with respect to at least one of the other mirrors.

14. A system as claimed in claim 1, wherein the mirrors are configured to reduce the scale of the patterned light at the substrate relative to its size at the reticle.

15. A system as claimed in claim 1, wherein at least one mirror has a multilayer reflective coating.

16. A system as claimed in claim 1, wherein the ray incidence angle of patterned light upon each of the mirror surfaces is 15°

or less from normal.

17. A system as claimed in claim 1, wherein the reticle and substrate are positioned on opposite sides of the mirrors.

18. A system as claimed in claim 1, wherein the hyperbolic and elliptical mirrors are on the same side of the system'"'"'s optical axis as the reticle, the spherical concave mirror is on the same side of the optical axis as the substrate, and the spherical convex mirror is positioned on the optical axis.

19. A system as claimed in claim 1, wherein, starting from the wafer substrate and ending at the reticle, the successive physical position order of mirrors along the system'"'"'s optical axis is the hyperbolic mirror, the spherical convex mirror, spherical concave mirror, and the elliptical mirror.

20. A system as claimed in claim 1, wherein the shapes and the relative positions of the mirrors are determined using a gross adjustment in which the radii of curvature, fourth-order aspherical terms of mirror curvature, and relative distances between mirrors, are allowed to vary to obtain a gross optimal solution for the system, followed by a subsequent fine adjustment in which aspherical terms of the mirror curvatures higher than fourth-order are allowed to vary together with the radii of curvature, fourth-order aspherical terms of mirror curvature, and relative distances between the mirrors, to obtain optimal mirror spacings and shapes.

21. A system as claimed in claim 20, wherein tilt and decenter of the mirrors are used as additional degrees of freedom in fine optimization to increase the image field width produced by the system.

22. A system as claimed in claim 1, wherein the substrate is a semiconductor wafer.

23. A system for transferring a pattern on a reticle to a substrate, the system having an optical axis, the system comprising:

a first, concave mirror having a radius of curvature of 400 to 600 millimeters, the first mirror positioned from 400 to 600 millimeters from the substrate in a first direction along the system'"'"'s optical axis;

a second, convex mirror having a radius of curvature of 300 to 500 millimeters, the second mirror positioned from 200 to 400 millimeters from the first mirror in a second direction along the system'"'"'s optical axis, the second direction opposite to the first direction;

a third, concave mirror having a radius of curvature of 900 to 1400 millimeters, the third mirror positioned from 400 to 600 millimeters from the second mirror in the first direction along the system'"'"'s optical axis; and

a fourth, convex mirror having a radius of curvature of 2000 to 6000 millimeters, the fourth mirror positioned from 500 to 800 millimeters from the third mirror in the second direction along the system'"'"'s optical axis, and the distance from the fourth mirror to the reticle in a range from 800 to 1500 millimeters in the first direction;

wherein the first, second, third and fourth mirrors are decentered between the values of 1 to 5, 0 to -2, 2 to 7, and 1 to 4 millimeters, respectively, along an axis normal to the system'"'"'s optical axis.

24. A system for transferring a pattern on a reticle to a substrate, the system having an optical axis, the system comprising:

a first, concave mirror having a radius of curvature of 400 to 600 millimeters, the first mirror positioned from 400 to 600 millimeters from the substrate in a first direction along the system'"'"'s optical axis;

a second, convex mirror having a radius of curvature of 300 to 500 millimeters, the second mirror positioned from 200 to 400 millimeters from the first mirror in a second direction along the system'"'"'s optical axis, the second direction opposite to the first direction;

a third, concave mirror having a radius of curvature of 900 to 1400 millimeters, the third mirror positioned from 400 to 600 millimeters from the second mirror in the first direction along the system'"'"'s optical axis; and

a fourth, convex mirror having a radius of curvature of 2000 to 6000 millimeters, the fourth mirror positioned from 500 to 800 millimeters from the third mirror in the second direction along the system'"'"'s optical axis, and the distance from the fourth mirror to the reticle in a range from 800 to 1500 millimeters in the first direction;

wherein the object field at the reticle is decentered between the values of 200 to 250 millimeters along an axis normal to the optical axis.

25. A system for transferring a pattern on a reticle to a substrate, the system having an optical axis, the system comprising:

a first, concave mirror having a radius of curvature of 400 to 600 millimeters, the first mirror positioned from 400 to 600 millimeters from the substrate in a first direction along the system'"'"'s optical axis;

a second, convex mirror having a radius of curvature of 300 to 500 millimeters, the second mirror positioned from 200 to 400 millimeters from the first mirror in a second direction along the system'"'"'s optical axis, the second direction opposite to the first direction;

a third, concave mirror having a radius of curvature of 900 to 1400 millimeters, the third mirror positioned from 400 to 600 millimeters from the second mirror in the first direction along the system'"'"'s optical axis; and

a fourth, convex mirror having a radius of curvature of 2000 to 6000 millimeters, the fourth mirror positioned from 500 to 800 millimeters from the third mirror in the second direction along the system'"'"'s optical axis, and the distance from the fourth mirror to the reticle in a range from 800 to 1500 millimeters in the first direction;

wherein the first, second, third and fourth mirrors are tilted between the values of 0 to 1, 0 to -1, 0 to 1, 0 to -1 degrees, respectively, about an axis orthogonal to the optical axis.

26. A system for transferring a pattern on a reticle to a substrate, the system having an optical axis, the system comprising:

a first, concave mirror having a radius of curvature of 400 to 600 millimeters, the first mirror positioned from 400 to 600 millimeters from the substrate in a first direction along the system'"'"'s optical axis;

a second, convex mirror having a radius of curvature of 300 to 500 millimeters, the second mirror positioned from 200 to 400 millimeters from the first mirror in a second direction along the system'"'"'s optical axis, the second direction opposite to the first direction;

a third, concave mirror having a radius of curvature of 900 to 1400 millimeters, the third mirror positioned from 400 to 600 millimeters from the second mirror in the first direction along the system'"'"'s optical axis; and

a fourth, convex mirror having a radius of curvature of 2000 to 6000 millimeters, the fourth mirror positioned from 500 to 800 millimeters from the third mirror in the second direction along the system'"'"'s optical axis, and the distance from the fourth mirror to the reticle in a range from 800 to 1500 millimeters in the first direction;

wherein the reticle is tilted between the values of 0 to -1 degrees relative to an axis normal to the optical axis.

27. A system for projecting patterned light from a reticle to a substrate, the system comprising:

a dominantly hyperbolic convex mirror;

a dominantly elliptical concave mirror;

a dominantly spherical convex mirror; and

a dominantly spherical concave mirror,

the mirrors, in the stated sequence, for transferring patterned light from the reticle, through said system of mirrors, to the substrate.

28. A system as claimed in claim 27, wherein the mirrors are sections of surfaces that are axially symmetric about an optical axis of the system.

29. A system as claimed in claim 28, wherein the hyperbolic and elliptical mirrors are positioned together with the reticle on one side of the optical axis, the spherical concave mirror is positioned on the other opposite side of the optical axis together with the substrate, and the spherical concave mirror is positioned on the optical axis.

30. A system as claimed in claim 28, wherein at least one mirror is decentered relative to the optical axis to increase the image field size at the substrate.

31. A system as claimed in claim 28, wherein at least one mirror is tilted relative to the optical axis to increase the image field size at the substrate.