Glass substrate having fine holes

• US 6,143,382 A
• Filed: 06/02/1998
• Issued: 11/07/2000
• Est. Priority Date: 06/04/1997
• Status: Expired due to Fees

• Current Assignee: Nippon Sheet Glass Company Limited (Nippon Telegraph and Telephone Corporation)
• Original Assignee: Nippon Sheet Glass Company Limited (Nippon Telegraph and Telephone Corporation)
• Inventors: Koyama, Tadashi, Tsunetomo, Keiji, Imanishi, Hideki
• Primary Examiner(s): Robinson, Ellis
• Assistant Examiner(s): RAYFORD, SANDRA M
• Application Number:
  US09/088,863
• Time in Patent Office: 889 Days
• Field of Search: 428/131, 428/34.4, 428/434, 428/36.91, 264/400, 219/121.7, 219/121.71, 219/121.72, 359/350, 359/900, 216/11, 216/24, 65/61
• US Class Current: 428/34.4
• CPC Class Codes: C03C 23/0025 by a laser beam
• CPC Class Codes: C03C 4/0071 for laserable glass
• CPC Class Codes: C03C 4/04 for photosensitive glass
• CPC Class Codes: H05K 1/0306 Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 3/0017 Etching of the substrate by chemical or physical means
• CPC Class Codes: Y10S 359/90 Methods
• CPC Class Codes: Y10T 428/131 Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
• CPC Class Codes: Y10T 428/139 Open-ended, self-supporting conduit, cylinder, or tube-type article
• CPC Class Codes: Y10T 428/24273 including aperture

Abstract

A glass substrate having fine holes formed therein by use of a laser beam without cracks or fragmentation occurring. A glass substrate is used in which silver is contained in the form Ag atoms, Ag colloid or Ag ions, to a predetermined depth from a surface of the glass, and further the concentration gradient of the silver is a maximum at one side surface on which the fine hole machining is performed and gradually decreases toward the other side surface, whereby ablation and evaporation occurs from the surface having the maximum concentration of silver layer by layer without causing cracking or fragmentation.

Claims

1. A glass substrate having at least one fine hole extending therein, wherein silver is contained in glass at a side surface of said glass substrate, in a form of any one of Ag atoms, Ag colloid or Ag ions, to a predetermined depth from one opening of said one fine hole, wherein a concentration gradient of the silver gradually decreases from said one opening of said one fine hole until the predetermined depth.

4. A glass substrate having at least one fine hole therein, as described in claim 1, wherein said glass substrate has a plate-like configuration.

5. A glass substrate having at least one fine hole therein, as described in claim 1, wherein said glass substrate has a cylinder-like configuration.

6. A glass substrate having at least one fine hole therein, as described in claim 1, wherein said glass substrate is made of silicate glass mainly containing SiO₂.

7. A glass substrate having at least one fine hole therein, as described in claim 1, wherein a plurality of the fine holes are aligned in one dimension or two dimensions.

8. A glass substrate having at least one fine hole therein, as described in claim 1, wherein said fine hole has a diameter within a range from 10 μ

m to 300 μ

m.

9. A glass substrate having at least one fine hole therein, as described in claim 1, wherein the maximum concentration of silver is greater than 0.1 mol %.

2. A glass substrate having at least one fine hole extending therethrough, wherein silver is contained in glass at a side surface of said glass substrate, in a form of any one of Ag atoms, Ag colloid or Ag ions, from one opening of said one fine hole to another opening thereof, wherein a concentration gradient of the silver is a maximum value at said one opening of said one fine hole and a minimum value at said another opening of said one fine hole.

10. A glass substrate having at least one fine hole therein, as described in claim 2, wherein said glass substrate has a plate-like configuration.

11. A glass substrate having at least one fine hole therein, as described in claim 2, where said glass substrate has a cylinder-like configuration.

12. A glass substrate having at least one fine hole therein, as described in claim 2, wherein said glass substrate is made of silicate glass mainly containing SiO₂.

13. A glass substrate having at least one fine hole therein, as described in claim 2, wherein a plurality of the fine holes are aligned in one dimension or two dimensions.

14. A glass substrate having at least one fine hole therein, as described in claim 2, wherein said fine hole has a diameter within a range from 10 μ

m to 300 μ

m.

15. A glass substrate having at least one fine hole therein, as described in claim 2, wherein the maximum concentration of silver is greater than 0.1 mol %.

3. A glass substrate having at least one fine hole extending therethrough, wherein silver is contained in glass at a side surface of said glass substrate, in a form of any one of Ag atoms, Ag colloid or Ag ions, from one opening of said one fine hole to another opening thereof, and further a concentration gradient of the silver is a maximum value at both openings of said one fine hole and gradually decreases towards opposite sides thereof.

16. A glass substrate having at least one fine hole therein, as described in claim 3, wherein said glass substrate has a plate-like configuration.

17. A glass substrate having at least one fine hole therein, as described in claim 3, where said glass substrate has a cylinder-like configuration.

18. A glass substrate having at least one fine hole therein, as described in claim 3, wherein said glass substrate is made of silicate glass mainly containing SiO₂.

19. A glass substrate having at least one fine hole therein, as described in claim 3, wherein a plurality of the fine holes are aligned in one dimension or two dimensions.

20. A glass substrate having at least one fine hole therein, as described in claim 3, wherein said fine hole has a diameter within a range from 10 μ

m to 300 μ

m.

21. A glass substrate having at least one fine hole therein, as described in claim 3, wherein the maximum concentration of silver is greater than 0.1 mol %.