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Pneumatic support device with a controlled gas supply, and lithographic device provided with such a support device

  • US 6,144,442 A
  • Filed: 06/10/1998
  • Issued: 11/07/2000
  • Est. Priority Date: 10/23/1997
  • Status: Expired due to Term
First Claim
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1. A support device comprising a first support part, a second support part, a gas spring with a pressure chamber for supporting the second support part relative to the first support part parallel to a support direction, an intermediate space which is connected to the pressure chamber via a pneumatic restriction, a gas supply connected to the intermediate space, and means for controlling a gas pressure prevailing in said intermediate space.

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