Projection and exposure apparatus including an optical member and a holding member

• US 6,144,504 A
• Filed: 01/29/1999
• Issued: 11/07/2000
• Est. Priority Date: 01/29/1998
• Status: Expired due to Term

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Kosugi, Masao, Sudoh, Yuji, Ebinuma, Ryuichi
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Seyrafi, David
• Application Number:
  US09/239,784
• Time in Patent Office: 648 Days
• Field of Search: 359/811, 359/819, 359/649, 359/633, 359/726, 359/730, 359/754, 359/784, 359/813, 359/818, 359/822, 359/823
• US Class Current: 359/811
• CPC Class Codes: G02B 7/026 using retaining rings or springs G02B7/027 takes precedence
• CPC Class Codes: G03F 7/70825 Mounting of individual elements, e.g. mounts, holders or supports workpiece or mask holders G03F7/707

Abstract

A projection and exposure apparatus includes an optical member, a holding member for holding the optical member with a gap between the optical member and the holding member, and a powder charged in the gap between the optical member and the holding member, such that the optical member and the holding member are maintained in a spaced-apart relationship.

Claims

1. An optical apparatus comprising:

an optical member;

a holding member for holding said optical member with a gap between said optical member and said holding member; and

a powder charged in the gap between said optical member and said holding member such that the optical member and holding member are maintained in a space a part relationship.

2. An optical apparatus according to claim 1, wherein said optical member is one of a lens and a mirror.

3. An optical apparatus according to claim 1, wherein said powder comprises particles and an average diameter of the particles of said powder is larger than a maximum size of the gap between said optical member and said holding member.

4. An optical apparatus according to claim 1, wherein said optical member comprises concave-shaped recesses and said holding member comprises concave-shaped recesses, which oppose those of said optical member, and said powder is also charged in a space defined by said recesses.

5. An optical apparatus according to claim 1, wherein said optical member is circular-shaped and said holding member is ring-shaped.

6. An optical apparatus according to claim 1, wherein said powder contains particles of one of SiO₂ and Al₂ O₃.

7. An optical apparatus according to claim 6, wherein said powder further contains silica beads.

8. An optical apparatus according to claim 7, wherein said powder comprises particles and an average diameter of the particles of said powder is larger than a maximum size of the gap between said optical member and said holding member.

9. A projection and exposure apparatus comprising:

(i) an optical member,

(ii) a holding member for holding said optical member with a gap between said optical member and said holding member; and

(iii) a powder charged in the gap between said optical member and said holding member, such that said optical member and said holding member are maintained in a spaced-apart relationship.

10. A projection and exposure apparatus according to claim 9, wherein said optical member is one of a lens and a mirror.

11. A projection and exposure apparatus according to claim 9, wherein said powder comprises particles and an average diameter of the particles of said powder is larger than a maximum size of the gap between said optical member and said holding member.

12. A projection and exposure apparatus according to claim 9, wherein said optical member comprises concave-shaped recesses and said holding member comprises concave-shaped recesses, which oppose those of said optical member, and said powder is also charged in a space defined by said recesses.

13. A projection and exposure apparatus according to claim 9, wherein said optical member is circular-shaped and said holding member is ring-shaped.

14. A projection and exposure apparatus according to claim 9, wherein said powder contains particles of one of SiO₂ and Al₂ O₃.

15. A projection and exposure apparatus according to claim 14, wherein said powder further contains silica beads.

16. A projection and exposure apparatus according to claim 15, wherein said powder comprises particles and an average meter of the particles of said powder is larger than a maximum size of the gap between said optical member and said holding member.