Wafer fabricated electroacoustic transducer

• US 6,145,186 A
• Filed: 10/30/1998
• Issued: 11/14/2000
• Est. Priority Date: 09/06/1996
• Status: Expired due to Term

• Current Assignee: Northrop Grumman Systems Corporation (Northrop Grumman Corporation)
• Original Assignee: Northrop Grumman Corporation
• Inventors: Beavers, Bob Ray
• Primary Examiner(s): Young, Lee
• Assistant Examiner(s): TUGBANG, ANTHONY D
• Application Number:
  US09/183,383
• Time in Patent Office: 746 Days
• Field of Search: 29/25.41, 29/25.35, 29/594, 29/595, 310/322, 310/324, 310/369, 381/174, 381/191, 381/113, 381/116
• US Class Current: 29/594
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 31/00 Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182
• CPC Class Codes: H04R 31/006 Interconnection of transducer parts of diaphragm and outer suspension by moulding H04R31/003
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/43 Electric condenser making
• CPC Class Codes: Y10T 29/49005 Acoustic transducer
• CPC Class Codes: Y10T 29/49226 Electret making
• CPC Class Codes: Y10T 29/49789 Obtaining plural product pieces from unitary workpiece

Abstract

A method of producing a capacitive electroacoustic transducer comprising the initial step forming a substrate having top and bottom surfaces each having a periphery thereof. A first electrode of the transducer is formed upon a portion of the top surface of the substrate. A diaphragm mounting ring of a conductive material is disposed about the periphery of the top surface and separated from the first electrode, and is sized to be thicker than the first electrode by a desired electrode separation distance. The diaphragm mounting ring is characterized by physical dimensions thereof. A compensation ring is aligned with the diaphragm mounting ring upon the bottom surface, and is formed of the same conductive material as the diaphragm mounting ring. The compensation ring is sized to have the same physical dimensions as the diaphragm mounting ring. A diaphragm constituting a conductive second electrode of the transducer is formed and attached to the diaphragm mounting ring to separate the first and second electrodes in electrical and physical spaced relationship so as to constitute a capacitive relationship therebetween, such that an electric field formed between the first and second electrodes varies in relationship with deflections of the second electrode to permit conversion between electrical and acoustic signals.

Claims

1. A method of producing a capacitive electroacoustic transducer comprising the steps of:

(a) depositing a conductive first electrode of the transducer upon a portion of a top surface of an electrically insulative substrate having top and bottom surfaces, the top and bottom surfaces each having a periphery thereof;

(b) sizing a diaphragm mounting ring of a conductive material disposed about the periphery of the top surface of the substrate and separated from the first electrode to be thicker than the first electrode by a desired electrode separation distance, the diaphragm mounting ring characterized by physical dimensions thereof;

(c) balancing stresses potentially formed within the substrate due to thermal expansion/contraction of the diaphragm mounting ring by aligning a compensation ring with the diaphragm mounting ring upon the bottom surface of the substrate, the compensation ring to have the same physical dimensions as the diaphragm mounting ring, the compensation ring being formed of the same conductive material as the diaphragm mounting ring;

(d) mounting a diaphragm to the diaphragm mounting ring, the diaphragm constituting a conductive second electrode of the transducer, the first and second electrodes being separated in electrical and physical spaced relationship so as to constitute a capacitive relationship therebetween; and

(e) deflecting the diaphragm constituting the second electrode in relation to the first electrode such that an electric field formed between the first and second electrodes varies in relationship with deflections of the second electrode to permit conversion between electrical and acoustic signals.

2. The method according to claim 1, wherein the step of forming an electrically insulative substrate comprises the step of:

cutting a circular slot through a wafer comprising an electrically insulating material, the circular slot being interrupted by at least two tabs connecting a circular area enclosed by the circular slot and constituting the substrate, with the remainder of the wafer, wherein the tabs are breakable so as to release the substrate from the remainder of the wafer.

3. The method according to claim 1, wherein step (a) comprises:

depositing a metal layer in a central region on the top surface of the substrate.

4. The method according to claim 1, further comprising the step of:

forming at least one through-hole in the substrate and the first electrode for allowing air trapped in a space between the diaphragm and the top surface of the substrate and the first electrode to escape to a region adjacent the bottom surface of the substrate.

5. The method according to claim 1, further comprising the step of:

electrically connecting the diaphragm mounting ring and the compensation ring.

6. The method according to claim 1, wherein the substrate and diaphragm comprise materials having dissimilar thermal expansion coefficients, the method further comprising the steps of:

(a) forming a first layer of a thermally compensating material interposed between the first electrode and the substrate; and

,

(b) forming a second layer of the thermally compensating material disposed on the bottom surface of the substrate in an area corresponding to the first layer on the top surface of the substrate; and

wherein,

(c) the thermally compensating material exhibits a thermal coefficient of expansion such that the substrate is induced to expand and contract at a rate substantially similar to that of the diaphragm.

7. The method according to claim 1, further comprising the step of:

forming a vent hole in the diaphragm for equalizing relative pressure between ambient air exterior of the diaphragm and air interior of the diaphragm.

8. The method according to claim 1 wherein steps (a) and (b) comprise:

(i) depositing a metal layer upon the top surface of the substrate; and

(ii) etching a portion of the metal layer to form the conductive first electrode and the diaphragm.

9. The method according to claim 8, further comprising the step of:

forming a layer of conductive material on the sides of the at least one through-hole and on the bottom surface of the substrate to provide an electrical pathway between the first electrode and the layer of conductive material on the bottom surface of the substrate.

10. The method according to claim 1 wherein the diaphragm is attached to the diaphragm mounting ring by thermal diffusion.