Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning method
First Claim
1. A plasma process apparatus having in situ monitoring, the apparatus comprising:
- a plasma chamber;
a process gas supply in flow communication with the plasma chamber, the process gas supply supplying a process gas to the plasma chamber;
a waste gas discharge assembly in flow communication with the plasma chamber, the waste gas discharge assembly including a discharge pump and removing a waste gas resulting from a process performed in the plasma chamber;
a sampling manifold in flow communication with the plasma chamber;
a sampling pump in flow communication with the sampling manifold, wherein flow of a sample gas is induced from the plasma chamber through the sampling manifold; and
a gas analyzer in flow communication with the sampling manifold, the gas analyzer analyzing the sample gas flowing through the sampling manifold.
1 Assignment
0 Petitions
Accused Products
Abstract
A plasma process apparatus having a plasma chamber with in situ monitoring, a monitoring method, and a method for in situ cleaning a plasma chamber. The apparatus includes a sampling manifold which induces flow of a sample gas from a plasma chamber through the manifold. A gas analyzer analyzes the sample gas flowing through the sampling manifold. The in situ monitoring method monitors an initial gas to establish background levels, and bakes the apparatus to reduce contaminants, if necessary. The monitoring method then monitors a process reaction and, after unloading a wafer and discharging a waste gas, monitors an in situ cleaning reaction. Monitoring involves inducing flow of a gas from the plasma chamber through the sampling manifold, and then analyzing the gas in the manifold with a gas analyzer. The cleaning method includes using a mixture of sulfur hexafluoride and chlorine to clean the plasma chamber after etching a polysilicon layer.
-
Citations
23 Claims
-
1. A plasma process apparatus having in situ monitoring, the apparatus comprising:
-
a plasma chamber; a process gas supply in flow communication with the plasma chamber, the process gas supply supplying a process gas to the plasma chamber; a waste gas discharge assembly in flow communication with the plasma chamber, the waste gas discharge assembly including a discharge pump and removing a waste gas resulting from a process performed in the plasma chamber; a sampling manifold in flow communication with the plasma chamber; a sampling pump in flow communication with the sampling manifold, wherein flow of a sample gas is induced from the plasma chamber through the sampling manifold; and a gas analyzer in flow communication with the sampling manifold, the gas analyzer analyzing the sample gas flowing through the sampling manifold. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A plasma process apparatus comprising:
-
a plasma chamber; a gas supply section supplying a process gas and a purge gas to said plasma chamber; a sampling manifold in flow communication with said plasma chamber, said sampling manifold being maintained at a manifold pressure different than a chamber pressure of said plasma chamber; a gas analyzer in flow communication with said sampling manifold; and a sampling pump coupled to said gas analyzer, said sampling pump inducing flow of a sample gas from said plasma chamber through said sampling manifold to said gas analyzer, said gas analyzer analyzing the purge gas supplied to said plasma chamber, and the process gas as mixed with a reaction gas generated during processing in said plasma chamber, as respective different samples. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23)
-
Specification