Platform positionable in at least three degrees of freedom by interaction with coils

• US 6,147,421 A
• Filed: 11/16/1998
• Issued: 11/14/2000
• Est. Priority Date: 11/16/1998
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Novak, W. Thomas, Hazelton, Andrew J., Takita, Mark K.
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US09/192,637
• Time in Patent Office: 729 Days
• Field of Search: 310/12, 33/1 M, 74/471, 108/137, 108/138, 29/721, 29/760, 29/785, 318/38, 318/135
• US Class Current: 310/12.24
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/03 Synchronous motors; Motors moving step by step; Reluctance motors H02K41/035 takes precedence

Abstract

The invention comprises a platform positionable in at least three degrees of freedom at least partly by interaction with coils. The platform includes a support member having a surface. Magnets are attached to the surface and part of a magnet bearing is attached to the support member. Inner and outer platforms are coupled to each other by magnet bearings and interact with coils to position the inner platform in six degrees of freedom. The invention may be particularly useful in precise positioning of semiconductor wafers and materials during photolithography and other processing.

Claims

1. A positioning platform comprising:

a member having a generally planar surface;

a plurality of first magnets disposed on said member surface and having a plurality of first magnetic fields generally perpendicular to said member surface, the magnetic field of each magnet being directed in an opposite direction from the magnetic field of an adjacent magnet along at least one direction; and

a first magnet bearing portion of each of at least one bearing, said first magnet bearing portion being attached to said member and comprising a magnetically permeable material.

2. The platform of claim 1, wherein each of said first magnet bearing portion is adapted to interact with a second magnet bearing portion of each of said at least one bearing to form each bearing to exert forces upon said member.

3. The platform of claim 2, wherein said forces are exerted upon said member in a first direction and in a second direction, the first and the second directions being generally parallel to said planar member surface.

4. The platform of claim 3, wherein said forces exerted on said member approximately comprises of forces only in the first and second directions.

5. The platform of claim 1, wherein said at least one bearing comprises at least two bearings, said bearings being non-colinearly positioned.

6. The platform of claim 5, comprising at least six of said bearings disposed around a periphery of the member, each of said bearings being disposed opposite another of said bearings relative to said member.

7. The platform of claim 1, wherein said first magnet bearing portion comprises two magnetically permeable portions separated by a magnetically impermeable portion.

8. The platform of claim 1, said member defines an aperture therethrough, further comprising:

a support disposed within said aperture of said member; and

a second magnet bearing portion of each of said at least one bearing, said second magnet bearing portion being attached to said support, said first and second magnet bearing portions form each of said at least one bearing and interact to exert forces upon said member.

9. The platform of claim 8, wherein said support has a generally planar surface, further comprising a plurality of second magnets disposed on said member surface and having second magnetic fields.

10. The platform of claim 1, further comprising:

a second member having a generally planar surface and defining an aperture therein, said member is disposed within said aperture; and

a second magnet bearing portion of each of said at least one bearing, said second magnet bearing portion being attached to said second member, said first and second magnet bearing portions form each of said at least one bearing and interact to exert forces upon said member.

11. The platform of claim 10, further comprising a plurality of second magnets disposed on said second member surface and having second magnetic fields.

12. A planar electric motor comprising:

a first member defining an aperture therethrough;

a second member disposed within said aperture and movable relative to said first member within said aperture;

a plurality of first magnets disposed on a surface of one of said first and second members and having a plurality of first magnetic fields;

a planar coil array positioned adjacent to the plurality of first magnets and operable to interact with the first magnet fields to provide a force between the coil array and the first magnets in a first and a second direction.

13. The planar electric motor of claim 12, further comprising a first magnet bearing portion on said first member and a second magnet bearing portion on said second member, said first and second magnet bearing portions interact to form a first bearing to couple said second member relative to said first member.

14. The planar electric motor of claim 12, further comprising a plurality of bearings, each bearing comprising a first magnet bearing portion disposed on said first member and a second magnet bearing portion disposed on said second member, said first and second magnet bearing portions of each bearing interact to form said bearing to couple said second member relative to said first member and to allow movement of said second member relative to said first member about the first and second directions and in a third direction generally orthogonal to the first and second directions.

15. The planar electric motor of claim 14, comprising at least six of said bearings disposed around a periphery of the aperture of said first member, each of said bearings being disposed opposite another of said bearings relative to said second member.

16. The planar electric motor of claim 12, wherein the plurality of first magnets are distributed with a first period in the first direction and a second period in the second direction.

17. The planar electric motor of claim 12, wherein said planar coil array comprises a plurality of coils distributed with a first period in the first direction and a second period in the second direction, said first coil period being approximately three-fourths of said first magnet period and said second coil period being approximately three-fourths of said second magnet period.

18. The planar electric motor of claim 12, further comprising a plurality of second magnets having a plurality of second magnetic fields and disposed on a surface of one of said first and second members other than the member having the plurality of first magnets, said planar coil array positioned adjacent to the plurality of second magnets and operable to interact with the second magnetic fields to provide a torque between the coil array and the second magnets about the first and second directions and to provide a force between the coil array and the second magnets in a third direction generally perpendicular to the first and second directions.

19. A lithography system comprising:

an optical system for imaging a pattern onto an article, the optical system comprising a frame;

a member defining an aperture therethrough;

a stage disposed within said aperture for supporting the article relative to the optical system for imaging, said stage being movable relative to said member within said aperture;

at least one bearing coupling said member to said stage and allowing movement of said member relative to said stage;

a plurality of first magnets having a plurality of first magnetic fields and disposed on one of said member and stage; and

a planar coil array positioned adjacent to the plurality of first magnets and operable to interact with the first magnet fields to provide a force between the coil array and the first magnets in a first and a second direction, said coil array being attached to the frame.

20. The lithography system of claim 19, wherein said bearing comprises a first magnet bearing portion attached to the stage and a second magnet bearing portion attached to the member, said bearing allows relative movement of the stage and member about the first and second directions and in a third direction generally orthogonal to the first and second directions.

21. The lithography system of claim 20, comprising at least six of said bearings disposed around a periphery of the aperture of the member, each of said bearings being disposed opposite another of said bearings relative to the stage.

22. The lithography system of claim 19, wherein the plurality of first magnets are distributed with a first period in the first direction and a second period in the second direction and the planar coil array comprises a plurality of coils distributed with a first period in the first direction and a second period in the second direction.

23. The lithography system of claim 22, wherein the first coil period is approximately three-fourths of the first magnet period and the second coil period is approximately three-fourths of the second magnet period.

24. The lithography system of claim 19, further comprising a plurality of second magnets having a plurality of second magnetic fields and disposed on one of the stage and member other than the stage or member having the plurality of first magnets, the planar coil array being positioned adjacent to the plurality of second magnets and operable to interact with the second magnetic fields to provide a torque between the coil array and the second magnets about the first and second directions and to provide a force between the coil array and the second magnets in a third direction generally perpendicular to the first and second directions.