Photonic device having an integal guide and method of manufacturing

• US 6,151,430 A
• Filed: 07/08/1998
• Issued: 11/21/2000
• Est. Priority Date: 07/08/1998
• Status: Expired due to Term

• Current Assignee: W. L. Gore & Associates (W.L. Gore & Associates)
• Original Assignee: Gore Enterprise Holdings Incorporated
• Inventors: Traver, Jr., Robert F., Lowes, Theodore D., Donhowe, Mark N., Kilcoyne, Sean P.
• Primary Examiner(s): Palmer, Phan T. H.
• Application Number:
  US09/111,943
• Time in Patent Office: 867 Days
• Field of Search: 385/14, 385/49, 385/50, 385/65, 385/83, 385/88, 385/92, 385/52
• US Class Current: 385/14
• CPC Class Codes: G02B 6/423 using guiding surfaces for the alignment
• CPC Class Codes: G02B 6/4249 comprising arrays of active devices and fibres

Abstract

A process is provided for creating microstructure coupling guides for aligning photonic devices with optical signal carrying apparatuses. The process includes applying a photoresist to a semiconductor material, spinning the semiconductor material, baking the semiconductor material, exposing the photoresist, baking the semiconductor material a second time, and developing the resist. The process creates a microstructure that acts as an integral guide to align and maintain the relative position between an optical signal carrying apparatus and a photonic device.

Claims

1. An article comprising:

a photonic device having an optical signal receiving surface and an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second free end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element.

2. The article of claim 1, wherein a wall of the guide is substantially perpendicular to a substantially planar surface of the article.

3. The article according to claim 1, wherein said integral guide being configured to receive and align a plurality of optical signal conveying elements.

4. The article of claim 1, wherein the integral polymeric guide is V-shaped.

5. The article of claim 1, wherein the photonic device is a light emitting diode.

6. The article of claim 1, further including an optical signal conveying element.

7. The article of claim 6, wherein the optical signal conveying element is an optical fiber or a waveguide.

8. The article of claim 1, wherein the photonic device is a surface emitting laser.

9. The article of claim 1, wherein the photonic device is a photodetector.

10. The article of claim 1, wherein the photonic device is a vertical cavity surface emitting laser.

11. The article of claim 1, wherein the polymeric material includes an epoxidized novolak.

12. An article comprising:

a photonic device having an optical signal receiving surface; and

an integral polymeric optical signal conveying element guide, said guide having a first end integral with said surface and a second end extending outwardly away from said surface, said guide being configured to align and receive an optical signal conveying element and being formed by a plating material, wherein a resist is used to form openings which are filled with the plating material before the resist is removed.

13. The article of claim 12, wherein the plating material is deposited by electroplating.

14. The article of claim 12, wherein the resist material includes epoxidized novolak.

15. An article comprising:

a photonic device having an optical signal receiving surface;

an optical element guide formed by a photo-definable polymer material, said guide having a first end adjacent said surface and a second end extending outwardly away from said surface, and being configured to align and receive an optical signal conveying element.

16. The article of claim 15, wherein said guide is V-shaped.

17. The article of claim 15, wherein the photo-definable polymer material includes a negative photoresist.

18. The article of claim 15, wherein the photo-definable polymer material includes an epoxidized novolak.

19. Preparing a photonic device comprising:

applying a polymeric material to a surface of a substrate having the photonic device; and

forming an integral guide from the polymeric material on the photonic device, said integral guide extending outwardly from said surface to form a free end and being configured to align and receive an optical signal conveying element.

20. The method of claim 19, wherein the forming step includes reactive ion etching.

21. The method of claim 19, wherein the photonic device is a light emitting diode.

22. The method of claim 19, wherein the guide is configured to receive an optical fiber.

23. The method of claim 19, wherein the guide is configured to receive a waveguide.

24. The method of claim 19, wherein the photonic device is a photodiode.

25. The method of claim 19, wherein the photonic device is a photodetector.

26. The method of claim 19, wherein the photonic device is a vertical cavity surface emitting laser.

27. The method of claim 19, wherein the photonic device is a light emitting diode.

28. A photonic device produced according to the process of claim 19.