Angular velocity sensing device
First Claim
1. An angular velocity sensing device comprising:
- a first vibration element having a piezoelectric element or an electrode for generating oscillation;
a second vibration element having a piezoelectric element or an electrode for sensing angular velocity;
a supporting portion;
first connection portions to connect nodes of vibration of said first vibration element with said second vibration element; and
second connection portions to connect said second vibration element with said supporting portion,wherein said first and second vibration elements, said supporting portion, and said first and second connection portions have a plane structure with almost uniform thickness, and both of said first and second vibration elements have shapes symmetric with respect to a common center point.
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Accused Products
Abstract
The angular velocity sensing device is structured in such a manner that a first vibration element 1 having piezoelectric elements or electrodes (two or more) for generating oscillation and a second vibration element 2 having piezoelectric elements or electrodes (two or more) for sensing angular velocity are connected through first connection portions (two or more) on nodes of vibration (two or more) of the first vibration element 1, and the second vibration element 2 and a supporting portion are connected with each other through second connection portions (two or more). These first, second vibration elements, the supporting portion, and the first, second connection portions have a plane structure with almost uniform thickness, and both of the first vibration element and the second vibration element are made to have symmetric shapes with respect to the common center point P.
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Citations
13 Claims
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1. An angular velocity sensing device comprising:
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a first vibration element having a piezoelectric element or an electrode for generating oscillation; a second vibration element having a piezoelectric element or an electrode for sensing angular velocity; a supporting portion; first connection portions to connect nodes of vibration of said first vibration element with said second vibration element; and second connection portions to connect said second vibration element with said supporting portion, wherein said first and second vibration elements, said supporting portion, and said first and second connection portions have a plane structure with almost uniform thickness, and both of said first and second vibration elements have shapes symmetric with respect to a common center point. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An angular velocity sensing device, comprising:
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a first vibration element having a piezoelectric element or an electrode for generating oscillation; a second vibration element having a piezoelectric element or an electrode for sensing angular velocity; a third vibration element; a supporting portion to support said first vibration element or said second vibration element; connection portions to connect nodes of vibration of said first vibration element with said third vibration element; and connection portions to connect said third vibration element with said second vibration element, wherein said first, second, and third vibration elements, said supporting portion, and each of said connection portions form a plane structure with almost uniform thickness and each of said first, second, third vibration elements have a shape symmetric with respect to a common center point. - View Dependent Claims (12, 13)
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Specification