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Semiconductor dynamical quantity sensor device having electrodes in Rahmen structure

  • US 6,151,966 A
  • Filed: 05/05/1999
  • Issued: 11/28/2000
  • Est. Priority Date: 05/11/1998
  • Status: Active Grant
First Claim
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1. A semiconductor sensor device comprising:

  • a semiconductor substrate;

    a movable unit supported on the semiconductor substrate, and having a weight portion movable in response to a dynamical force exerted thereon and a movable electrode formed integrally with the weight portion and having a detection surface; and

    a fixed electrode cantilevered on the semiconductor substrate and having a detection surface facing the detection surface of the movable electrode,wherein the movable electrode and the fixed electrode are constructed in Rahmen structure which includes a series of a plurality of rectangular frames.

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