Wide dynamic range capacitive transducer

• US 6,151,967 A
• Filed: 03/10/1998
• Issued: 11/28/2000
• Est. Priority Date: 03/10/1998
• Status: Expired due to Fees

• Current Assignee: Horizon Technologies LLC
• Original Assignee: Horizon Technologies LLC
• Inventors: McIntosh, Robert B., Mauger, Philip E., Goodman, Gene A., Patterson, Steven R.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US09/037,733
• Time in Patent Office: 994 Days
• Field of Search: 73/514.18, 73/514.32, 73/718, 73/724, 73/862.626, 361/278, 361/280, 361/283.4
• US Class Current: 73/514.32
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2203/0392 profiles not provided for in B81B2203/0376 - B81B2203/0384
• CPC Class Codes: B81B 3/0086 Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G01L 11/008 electrostatic or electromagnetic counterbalancing forces
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means

Abstract

A variable area capacitor with a flexible electrode responsive to a physical effect and a rigid electrode with a predetermined surface contour. The surface contour is dimensioned to provide a specific change in capacitance with deflection of the flexible electrode. A thin dielectric layer maintains a substantially fixed spacing between the two electrodes. Preferred embodiments include a pressure sensor, microphone and accelerometer. A differential transconductance amplifier detects changes of the variable capacitor in a low-impedance, bridge-like circuit and feeds back current to balance the bridge. The voltage that controls the feedback current is proportional to capacitance over a wide dynamic range.

Claims

1. A variable area capacitor comprising:

a. a flexible electrode responsive to a physical effect;

b. a rigid electrode with a three-dimensional surface contour facing said flexible electrode;

c. a dielectric spacer sandwiched between said flexible electrode and said rigid electrode;

d. said dielectric spacer maintains a substantially fixed capacitance spacing between regions of mutually opposed areas of said rigid electrode and said flexible electrode, said regions of said fixed capacitance spacing increasing as said flexible electrode deflects in response to said physical effect;

e. said surface contour having a shape that provides a substantially linear change in capacitance of said variable area capacitor in response to said physical effect.

2. The variable area capacitor of claim 1 wherein the shape of said surface contour provides a substantially linear change in capacitance in response to said physical effect when a generatrix of said flexible electrode is determined primarily by bending stresses.

3. The variable area capacitor of claim 1 wherein the shape of said surface contour provides a substantially linear change in capacitance in response to said physical effect when a generatrix of said flexible electrode is determined primarily by tensile stresses.

4. The variable area capacitor of claim 1, further comprising an insulative support body with said surface contour on which is deposited a conducting film electrode.

5. The variable area capacitor of claim 1 further comprising said flexible electrode with a central aperture.

6. The variable area capacitor of claim 1 wherein said flexible electrode is a diaphragm with an integral support rim.

7. The variable area capacitor of claim 1, wherein said flexible electrode is a diaphragm with a central proof mass.

8. The variable area capacitor of claim 1 wherein said flexible electrode comprises a conducting film adhered to a flexible electrically insulative material selected from a group consisting of glass, fused silica, quartz, sapphire, intrinsic silicon, PMMA, epoxy, moldable plastics, thermoplastics, and thermoset plastics.

9. The variable area capacitor of claim 1 wherein said rigid electrode comprises a conductive film deposited on said surface contour of a material selected from a group consisting of glass, fused silica, quartz, sapphire, intrinsic silicon, PMMA, epoxy, moldable plastics, thermoplastics, and thermoset plastics.

10. The variable area capacitor of claim 1, wherein said dielectric spacer is affixed to a surface of said flexible electrode.

11. The variable area capacitor of claim 1, wherein said dielectric spacer is affixed to a surface of said rigid electrode.

12. The variable area capacitor of claim 1, further comprising a support body with said surface contour with said support body bonded to a perimeter of said flexible electrode.

13. A variable area capacitor comprising:

a. a flexible electrode responsive to a physical effect;

b. a rigid electrode with a surface contour facing said flexible electrode;

c. a dielectric spacer sandwiched between said rigid electrode and said flexible electrode that extends at least up to an inflection point of said surface contour;

d. said dielectric spacer maintains a substantially fixed capacitance spacing between regions of mutually opposed areas of said rigid electrode and said flexible electrode, said regions of said fixed capacitance spacing increasing in extent as said flexible electrode deflects in response to said physical effect.

14. The variable area capacitor of claim 13 wherein a generatrix of said flexible electrode is determined primarily by bending stresses.

15. The variable area capacitor of claim 13 wherein one of a plurality of capacitance response characteristics are selected from a group consisting of a linear, nonomial, polynomial, exponential, and logarithmic response characteristic.

16. The variable area capacitor of claim 13, further comprising an insulative support body with said surface contour on which is deposited a conducting film electrode.

17. The variable area capacitor of claim 13 further comprising said rigid electrode with a central aperture.

18. The variable area capacitor of claim 13 wherein said flexible electrode is a diaphragm with an integral support rim.

19. The variable area capacitor of claim 13, wherein said flexible electrode is a diaphragm with a central proof mass.

20. The variable area capacitor of claim 13 wherein said flexible electrode comprises a conducting film adhered to a flexible electrically insulative material selected from a group consisting of glass, fused silica, quartz, sapphire, intrinsic silicon, PMMA, epoxy, moldable plastics, thermoplastics, and thermoset plastics.

21. The variable area capacitor of claim 13 wherein said rigid electrode comprises a conductive film deposited on said predetermined surface contour of a material selected from a group consisting of glass, fused silica, quartz, sapphire, intrinsic silicon, PMMA, epoxy, moldable plastics, thermoplastics, and thermoset plastics.

22. The variable area capacitor of claim 13, wherein said dielectric spacer is affixed to a surface of said flexible electrode facing said rigid electrode.

23. The variable area capacitor of claim 13, wherein said dielectric spacer is affixed to said rigid electrode.

24. The variable area capacitor of claim 13, further comprising a support body with said surface contour with said support body bonded to the perimeter of said flexible electrode.

25. A variable area capacitor constructed to avoid a saturation-type of nonlinear capacitance response comprising:

a. a flexible electrode responsive to a physical effect;

b. a rigid electrode with a surface contour facing said flexible electrode;

c. a dielectric spacer sandwiched between said rigid electrode and said flexible electrode;

d. said dielectric spacer maintains a substantially fixed capacitance spacing between regions of mutually opposed areas of said rigid electrode and said flexible electrode, said regions of said fixed capacitance spacing increasing in extent as said flexible electrode deflects in response to said physical effect;

e. said surface contour having a shape that provides an increase in said regions of said fixed capacitive spacing at least up to an inflection point on said surface contour, whereby said capacitance response of said variable area capacitor is prevented from reaching a level of saturation.

26. The variable area capacitor of claim 25 wherein a generatrix of said flexible electrode is determined primarily by bending stresses.

27. The variable area capacitor of claim 25 wherein one of a plurality of capacitance response characteristics functions are selected from a group consisting of a linear, nonomial, polynomial, exponential, and a logarithmic response characteristic.

28. The variable area capacitor of claim 25, further comprising an insulative support body with said surface contour on which is deposited a conducting film electrode.

29. The variable area capacitor of claim 25 further comprising said rigid electrode with a central aperture.

30. The variable area capacitor of claim 25 wherein said flexible electrode is a diaphragm with an integral support rim.

31. The variable area capacitor of claim 25, wherein said flexible electrode is a diaphragm with a central proof mass.

32. The variable area capacitor of claim 25 wherein said flexible electrode comprises a conducting film adhered to a flexible electrically insulative material selected from a group consisting of glass, fused silica, quartz, sapphire, intrinsic silicon, PMMA, epoxy, moldable plastics, thermoplastics, and thermoset plastics.

33. The variable area capacitor of claim 25 wherein said rigid electrode comprises a conductive film deposited on said surface contour of a material selected from a group consisting of glass, fused silica, quartz, sapphire, intrinsic silicon, PMMA, epoxy, moldable plastics, thermoplastics, and thermoset plastics.

34. The variable area capacitor of claim 25, wherein said dielectric spacer means is affixed to a surface of said flexible electrode facing said rigid electrode.

35. The variable area capacitor of claim 25, wherein said dielectric spacer means is affixed to said rigid electrode.

36. The variable area capacitor of claim 25, further comprising a support body with said surface contour with said support body bonded to a perimeter of said flexible electrode.