Pressure-type flow rate control apparatus

• US 6,152,168 A
• Filed: 05/24/1999
• Issued: 11/28/2000
• Est. Priority Date: 08/15/1997
• Status: Expired due to Term

• Current Assignee: Fujikin Incorporated, Tadahiro Ohmi, Tokyo Electron Limited
• Original Assignee: Fujikin Incorporated, Tadahiro Ohmi, Tokyo Electron Limited
• Inventors: Ohmi, Tadahiro, Yamaji, Michio, Ikeda, Nobukazu, Nishino, Kouji, Dohi, Ryousuke, Uno, Tomio, Sugiyama, Kazuhiko, Fukuda, Hiroyuki, Kagazume, Tetu
• Primary Examiner(s): Michalsky, Gerald A.
• Application Number:
  US09/284,352
• Time in Patent Office: 554 Days
• Field of Search: 137/487.5, 137/486
• US Class Current: 137/487.5
• CPC Class Codes: G05D 7/0647 the plurality of throttling means being arranged in series
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q=KP1 (K=constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves a variable orifice wherein the gap is adjusted by the orifice drive.

Claims

1. A pressure-type fluid flow rate control apparatus comprising an orifice, a control valve provided on an upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit which calculates a fluid flow rate on the basis of pressure P1 detected by the pressure detector with the equation Qc=KP1 (K=constant) and outputs, in a drive for the control valve, the difference between a set flow rate signal Qs and the calculated flow rate signal Qc as a control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate Q of the fluid downstream of the orifice, so that the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 is maintained at not higher than the critical pressure ratio of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that a ring-shaped gap between a valve seat and a diaphragm serves as a variable orifice, and a pulse motor type drive for regulating said ring-shaped gap.

2. A pressure-type fluid flow rate control apparatus as claimed in claim 1 wherein the working stroke L of the diaphragm ranges from 0 to 0.12 mm.

3. A pressure-type fluid flow rate control apparatus as claimed in claim 1 wherein the ring-shaped gap between the valve seat and the diaphragm has an area equal to a sectional area of a circular bore of 0.14 to 0.25 mm in diameter.

4. A pressure-type flow rate control apparatus as claimed in claim 1 wherein the pulse motor drive comprises a stepping motor and a ball screw mechanism.

5. A pressure-type fluid flow rate control apparatus comprising an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit which calculates a fluid flow rate on the basis of pressure P1 detected by the pressure detector with the equation Qc=KP1 (K=constant) and outputs, in a drive for the control valve, the difference between a set flow rate signal Qs and the calculated flow rate signal Qc as a control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate Q of the fluid downstream of the orifice, so that the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 is maintained at not higher than the critical pressure ratio of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that a ring-shaped gap between a valve seat and a diaphragm serves as a variable orifice and a piezoelectric element type drive for regulating said ring-shaped gap.

6. A pressure-type fluid flow rate control apparatus as claimed in claim 5 wherein the working stroke L of the diaphragm ranges from 0 to 0.12 mm.

7. A pressure-type flow rate control apparatus as claimed in claim 5 wherein the ring-shaped gap between the valve seat and the diaphragm has an area equal to a sectional area of a circular bore of 0.14 to 0.25 mm in diameter.

8. A pressure-type flow rate control apparatus for controlling a fluid, said apparatus comprising:

a variable orifice comprising a ring-shaped gap between a valve seat and a diaphragm of a direct touch type metal diaphragm valve unit, said valve unit being responsive to an electrical orifice degree of opening setting signal for setting the degree of opening of said variable orifice;

a control valve disposed on an upstream side of said variable orifice;

a pressure detector disposed between said control valve and said variable orifice for measuring an upstream pressure P1 at an upstream side of said orifice;

a control unit for calculating a fluid flow rate signal Qc according to the equation Qc=KP1, where K is a constant, said control unit producing an output signal Qy representing the difference between a set flow rate signal Qs and said calculated flow rate signal Qc,

said signal Qy being applied to said control valve to control a flow rate Q of fluid on a downstream side of said variable orifice such that the ratio of P2/P1 between the pressure P1 on the upstream side of said variable orifice and a pressure P2 on a downstream side of said variable orifice is maintained at not higher than the critical pressure ratio of the controlled fluid.

9. A pressure-type flow rate control apparatus as claimed in claim 8 wherein said valve unit includes a pulse motor type drive for setting the degree of opening of said variable orifice.

10. A pressure-type flow rate control apparatus as claimed in claim 9, wherein the pulse motor drive comprises a stepping motor and a ball screw mechanism.

11. A pressure-type flow rate control apparatus as claimed in claim 8, wherein said valve unit includes a piezoelectric element type drive for setting the degree of opening of said variable orifice.

12. A pressure-type flow rate control apparatus as claimed in claim 11, wherein the working stroke L of said diaphragm ranges from 0 to 0.12 mm.

13. A pressure-type flow rate control apparatus as claimed in claim 12, wherein the ring-shaped gap between the valve seat and the diaphragm has an area equal to a sectional area of a circular bore of 0.14 to 0.25 mm in diameter.

14. A pressure-type flow rate control apparatus as claimed in claim 8, wherein the working stroke L of said diaphragm ranges from 0 to 0.12 mm.

15. A pressure-type flow rate control apparatus as claimed in claim 14, wherein the ring-shaped gap between the valve seat and the diaphragm has an area equal to a sectional area of a circular bore of 0.14 to 0.25 mm in diameter.