Multi-layer ceramic substrate and method for producing the same
First Claim
1. A multi-layer ceramic substrate, comprising:
- a laminate containing at least one internal space and comprising a plurality of laminated ceramic insulating material layers and at least one wiring conductor;
a passive component disposed in the space in the laminate and electrically connected to the wiring conductor;
the passive component comprising a monolithically sintered compact block of passive component green ceramic functional material;
an layer interposed at least between the passive component and a wall of the laminate space extending in a direction perpendicular to lamination plane of the laminate;
the interposed layer comprising a fired metal which during firing induced an oxidation reaction accompanied by expansion and optionally an inorganic compound.
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Abstract
The present invention provides a method for producing a high-density multi-layer ceramic substrate with stable characteristics, the substrate incorporating therein a passive component such as a high-precision capacitor or inductor. The method comprises the steps of providing compact blocks containing a green ceramic functional material to form the passive components; providing a composite green laminate having a plurality of ceramic green sheets comprising a ceramic insulating material and in which the compact blocks are built in pre-disposed spaces and a paste containing a metal inducing, during firing, oxidation reaction accompanied by expansion is provided in space between inside walls of the spaces and the compact blocks; firing the composite green laminate in a state in which the laminate is sandwiched by the sheet-like supports formed of green ceramics that cannot be sintered at the sintering temperature, so as to prevent shrinkage of the laminate; and removing the unsintered sheet-like supports.
170 Citations
22 Claims
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1. A multi-layer ceramic substrate, comprising:
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a laminate containing at least one internal space and comprising a plurality of laminated ceramic insulating material layers and at least one wiring conductor; a passive component disposed in the space in the laminate and electrically connected to the wiring conductor;
the passive component comprising a monolithically sintered compact block of passive component green ceramic functional material;an layer interposed at least between the passive component and a wall of the laminate space extending in a direction perpendicular to lamination plane of the laminate; the interposed layer comprising a fired metal which during firing induced an oxidation reaction accompanied by expansion and optionally an inorganic compound. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A multi-layer ceramic substrate, comprising:
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a laminate containing at least one internal space and comprising a plurality of laminated ceramic insulating material layers and at least one wiring conductor comprising at least one member selected from the group consisting of Ag, Ag--Pt alloy, Ag--Pd alloy, Au, Ni, Pd, Pt, W, Mo and Cu; a passive component disposed in the space in the laminate and electrically connected to the wiring conductor;
the passive component comprising a monolithically sintered, multi-layered compact block of passive component precursor green ceramic functional material containing a multi-layer internal conductor;an layer interposed at least between the passive component and a wall of the laminate space extending in a direction perpendicular to lamination plane of the laminate; the interposed layer comprising a fired metal which during firing induced an oxidation reaction accompanied by expansion and is at least one member selected from the group consisting of Al, Si, Ti, Fe, Cu, Mo, W, Cr and Zn and an inorganic compound comprising glass in a proportion by weight of the metal to inorganic compound of about 100/0 to 5/95.
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12. A method for producing a multi-layer ceramic substrate including a laminate having a plurality of laminated ceramic layers formed of a ceramic insulating material and a wiring conductor, and a passive component built into the laminate and being wired through the wiring conductor, comprising the steps of:
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providing a composite green laminate containing an interior space and comprising a wiring conductor and a plurality of laminated ceramic green sheets, a passive component compact block comprising a green ceramic functional material in the interior space, wherein the ceramic insulating material of the composite green laminate and the ceramic functional material of the compact block are different, and a paste comprising a metal which during firing induces an oxidation reaction accompanied by expansion and optionally an inorganic compound within a gap at least between an inside wall of the space extending perpendicular to the lamination planes of the laminate and the compact block; disposing on each of the principal surfaces located at both ends of the composite green laminate with respect to a direction perpendicular to the lamination planes of the laminate, a sheet-like support of a green ceramic which is not sintered at the firing temperature of the composite green laminate; firing the composite green laminate in a state in which the composite green laminate is sandwiched by the sheet-like supports; and removing the unsintered sheet-like supports. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification