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Use of a chemically reactive plasma for thermal-chemical processes

  • US 6,153,852 A
  • Filed: 02/12/1999
  • Issued: 11/28/2000
  • Est. Priority Date: 02/12/1999
  • Status: Expired due to Term
First Claim
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1. A method for maximizing an operating efficiency of an inductively coupled plasma (ICP) torch in which a plasma is generated, comprising the steps of:

  • (a) specifying a gaseous fluid used to generate the plasma;

    (b) as a function of the gaseous fluid used to generate the plasma, modeling the ICP torch to determine an optimal flow rate of the gaseous fluid and an optimal power level for energizing an induction coil of the ICP torch to generate the plasma; and

    (c) operating the ICP torch with the optimal flow rate of the gaseous fluid, and with the optimal power level applied to energize the induction coil of the ICP torch, so that the efficiency of the ICP torch is substantially maximized.

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