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Vibratory angular rate sensor

  • US 6,155,115 A
  • Filed: 01/14/1993
  • Issued: 12/05/2000
  • Est. Priority Date: 01/02/1991
  • Status: Expired due to Fees
First Claim
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1. An inertial sensor comprising:

  • an inertia member extending substantially in a plane,a first and second reference axes extending in said plane and a third reference axis extending perpendicular to the plane, said three reference axes being mutually perpendicular and intersecting the center of gravity of said inertia member,suspension means connecting the inertia member to a support for supporting the inertia member in said plane,wherein said suspension means comprises four elastic beams extending substantially in said plane between said support and said inertia member, the longitudinal axes of said beams intersecting said center of gravity,said elastic beams allowing limited angular motion of said inertia member about said reference axes;

    electrostatic driving means to drive said inertia member in an angular oscillatory motion about said first reference axis; and

    electrostatic sensing means for sensing angular oscillatory motion of the inertia member about the second reference axis, said angular oscillatory motion caused by Coriolis forces due to angular rotation of the inertial sensor about said third reference axis.

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