Isolation trench in semiconductor substrate with nitrogen-containing barrier region, and process for forming same

• US 6,156,620 A
• Filed: 07/22/1998
• Issued: 12/05/2000
• Est. Priority Date: 07/22/1998
• Status: Expired due to Term

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: LSI Logic Corporation (Broadcom, Inc.)
• Inventors: Puchner, Helmut, Aronowitz, Sheldon, Huang, Shih-Fen
• Primary Examiner(s): Nelms, David
• Assistant Examiner(s): DANG, PHUC T
• Application Number:
  US09/121,283
• Time in Patent Office: 867 Days
• Field of Search: 437/67, 437/64, 437/238, 438/296, 438/437, 438/400
• US Class Current: 438/400
• CPC Class Codes: H01L 21/76232 of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls H01L21/76229 takes precedence

Abstract

An isolation trench in a silicon semiconductor substrate is provided with a barrier region containing nitrogen atoms formed in the trench, contiguous with the silicon semiconductor substrate surfaces of the trench. The novel isolation trench structure of the invention is formed by forming an isolation trench in a silicon semiconductor substrate; forming in the isolation trench a barrier region by treating the trench structure with nitrogen atoms from a nitrogen plasma; and then forming a silicon oxide layer over the barrier region in the trench to confine the nitrogen atoms in the barrier region. In a preferred embodiment, a silicon oxide liner is first formed over the silicon semiconductor substrate surfaces of the trench, and then the trench structure is treated with nitrogen atoms from a nitrogen plasma to form, on the silicon semiconductor substrate surfaces of the trench, a barrier layer which contains silicon atoms, oxygen atoms, and nitrogen atoms.

Claims

1. A process for forming an improved isolation trench in a silicon semiconductor substrate containing nitrogen atoms formed in said trench which comprises:

a) forming an isolation trench in a silicon semiconductor substrate;

b) forming in said isolation trench a barrier region by treating said trench structure with nitrogen atoms from a nitrogen plasma, said barrier region formed contiguous with the silicon semiconductor substrate surfaces of said isolation trench; and

c) forming a silicon oxide layer over said barrier region in said trench to confine said nitrogen atoms in said barrier region be the steps of;

i) forming an amorphous silicon layer over said barrier region in said trench, and

ii) then oxidizing said layer of amorphous silicon to form said layer of silicon oxide over said barrier region in said trench.

2. The process of claim 1 wherein said barrier region formed by treating said trench structure with nitrogen atoms from a nitrogen plasma comprises a barrier region consisting essentially of silicon atoms and nitrogen atoms formed by treating the silicon semiconductor substrate surfaces of said trench structure with nitrogen atoms.

3. The process of claim 1 wherein said step of forming said barrier region further comprises the initial step of forming a silicon oxide liner on the silicon semiconductor substrate surfaces of said trench, and then treating said trench structure with said nitrogen atoms from said nitrogen plasma to form a barrier region on said silicon semiconductor substrate surfaces of said trench containing silicon atoms, oxygen atoms, and nitrogen atoms.

4. The process of claim 1 wherein said step of forming said barrier region further comprises:

a) forming a first silicon oxide layer over the silicon semiconductor substrate surfaces in said trench;

b) then treating said first silicon oxide layer with said nitrogen atoms from said nitrogen plasma to form on said surfaces of said trench a barrier region containing silicon atoms, oxygen atoms, and nitrogen atoms.

5. The process of claim 1 wherein said step of treating said trench structure with said nitrogen atoms from said nitrogen plasma further comprises treating said trench structure with nitrogen atoms from a remote nitrogen plasma.

6. A process for forming an improved isolation trench in a silicon semiconductor substrate comprising a barrier region formed in said trench which inhibits penetration of dopant from said silicon semiconductor substrate into said isolation trench which comprises:

a) forming an isolation trench in a silicon semiconductor substrate;

b) forming a first silicon oxide layer over the silicon semiconductor substrate surfaces in said trench;

c) then treating said first silicon oxide layer with nitrogen atoms from a nitrogen plasma to form on said silicon semiconductor substrate surfaces of said trench a barrier region containing silicon atoms, oxygen atoms, and nitrogen atoms, said barrier region contiguous with the surfaces of said isolation trench; and

d) then forming a second silicon oxide layer over said barrier region in said trench to act as a cap layer to confine said nitrogen atoms in said barrier region said second silicon oxide layer formed by the steps of;

i) forming an amorphous silicon layer over said barrier region in said trench; and

ii) then oxidizing said layer of amorphous silicon to form said layer of silicon oxide over said barrier region in said trench.

7. The process of claim 6 wherein said step of treating said trench structure with said nitrogen atoms from said nitrogen plasma further comprises treating said trench structure with nitrogen atoms from a remote nitrogen plasma.

8. The process of claim 6 wherein said step of treating said first silicon oxide layer with nitrogen atoms from a nitrogen plasma to form said barrier region containing silicon atoms, oxygen atoms, and nitrogen atoms further comprises forming a barrier region comprising a silicon oxynitride barrier region.

9. The process of claim 6 wherein the thickness of said silicon oxynitride barrier region ranges from about 3.5 nm to about 5 nm.

10. The process of claim 6 wherein the thickness of said silicon oxide barrier layer ranges from about 11 nm to about 48 nm.

11. The process of claim 6 including the further step of filling the remainder of said trench with a filler material.

12. The process of claim 6 wherein said step of filling the remainder of said trench with a filler material comprises filling the remainder of said trench with silicon oxide.

13. The process of claim 6 wherein said step of filling the remainder of said trench with a filler material comprises filling the remainder of said trench with silicon.

14. The process of claim 6 wherein said isolation trench is formed with an aspect ratio ranging from about 1:

1 to about 1;

4.

15. An improved isolation trench in a silicon semiconductor substrate comprising a barrier region containing nitrogen atoms in said trench which comprises:

a) an isolation trench formed in a silicon semiconductor substrate;

b) a barrier region containing nitrogen atoms formed in said isolation trench by treating said trench structure with nitrogen atoms from a nitrogen plasma, said barrier region formed contiguous with the silicon semiconductor substrate surfaces of said isolation trench; and

c) a silicon oxide layer formed over said barrier region in said trench to confine said nitrogen atoms in said barrier region, said silicon oxide layer comprising an amorphous silicon layer formed over said barrier region in said trench and then oxidized to form said layer of silicon oxide over said barrier region in said trench.

16. The isolation trench of claim 15 wherein said barrier region consists essentially of silicon atoms and nitrogen atoms formed by treating the silicon semiconductor substrate surfaces of said trench structure with said nitrogen atoms from said nitrogen plasma.

17. The isolation trench of claim 15 wherein said barrier region consists essentially of silicon atoms, oxygen atoms, and nitrogen atoms formed by first forming a silicon oxide layer over the silicon semiconductor substrate surfaces in said trench, and then treating said silicon oxide layer with said nitrogen atoms from said nitrogen plasma to form on said silicon semiconductor surfaces of said trench said barrier region containing said silicon atoms, oxygen atoms, and nitrogen atoms.