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Birefringence measurement optical system and high spatial resolution polarimetric apparatus

  • US 6,157,448 A
  • Filed: 10/08/1999
  • Issued: 12/05/2000
  • Est. Priority Date: 10/08/1999
  • Status: Expired due to Fees
First Claim
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1. A birefringence measurement optical system comprising:

  • a polarized light emission optical system emitting a light signal in a predetermined polarization state toward a target to be measured;

    a polarized light detection optical system detecting the light signal from the polarized light emission optical system through the target, the light signal including birefringence information on the target which can be polarimetrically analyzed;

    a photo detector converting the light signal from the polarized light detection optical system into an electric signal and detecting the electric signal; and

    a light transmission path arranged between the target and the photo detector, the light transmission path taking part of light fluxes of the light signal along an axial direction of the light signal from the target at a target side thereof and transmitting the part of light fluxes from the target side toward a photo detector side thereof, the photo detector receiving the part of light fluxes including the birefringence information, which is higher in spatial resolution than all of the light fluxes. for the birefringence measurement of the target.

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