Volumetric control of the flow of a filtering pump
First Claim
1. A device of control of a volume issued by a pump for providing a liquid product, the pump being provided with a membrane for separation between a dispensation chamber and a control chamber, the membrane being deformable by a pressurized fluid, the device comprising:
- a capacitive presence sensor for detecting a first predetermined position of the membrane with respect to a bottom of the control chamber; and
a control system for measuring, for each cycle of dispensation of the liquid product, a first duration taken by the membrane to reach the first predetermined position, and determining from this first duration an additional duration for the membrane to reach a second predetermined position corresponding to a supply of a desired volume of the liquid product.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention relates to a pump of resin deposition on a semiconductive wafer including a pump body divided by a membrane of definition of a resin dispensation chamber and of a control chamber and an element of filtration of the resin before its dispensation to an outlet access of the pump body. The pump includes a control system for injecting the resin under constant pressure into the control chamber and aspiring the resin from the control chamber, and a capacitive presence sensor for detecting a first position of the membrane.
-
Citations
25 Claims
-
1. A device of control of a volume issued by a pump for providing a liquid product, the pump being provided with a membrane for separation between a dispensation chamber and a control chamber, the membrane being deformable by a pressurized fluid, the device comprising:
-
a capacitive presence sensor for detecting a first predetermined position of the membrane with respect to a bottom of the control chamber; and a control system for measuring, for each cycle of dispensation of the liquid product, a first duration taken by the membrane to reach the first predetermined position, and determining from this first duration an additional duration for the membrane to reach a second predetermined position corresponding to a supply of a desired volume of the liquid product. - View Dependent Claims (2, 3)
-
-
4. A pump for resin deposition on a semiconductive wafer comprising:
-
a pump body having a membrane dividing a resin dispensation chamber and a control chamber, the control chamber being in fluid communication with a source of pressurized fluid; an element for filtration of the resin; a control system for, alternately, injecting the pressurized fluid under constant pressure into the control chamber and aspiring the pressurized fluid from the control chamber; and a capacitive presence sensor for detecting a first position of the membrane corresponding to a first distance from a bottom of the control chamber. - View Dependent Claims (5, 6, 7, 8)
-
-
9. A pump for dispensing a fluid product in discrete amounts comprising:
-
a body having a wall and a bottom defining an interior chamber of the body; a flexible membrane inside the interior chamber of the body having edges fixed to the body, the membrane dividing the interior chamber of the body into a pump chamber and a control chamber, the control chamber being defined between the bottom and the membrane; an inlet formed in the wall in fluid communication with the pump chamber for providing the fluid product to the pump chamber; an outlet formed in the wall in fluid communication with the pump chamber for dispensing the fluid product from the pump chamber; a duct formed in the bottom in fluid communication between the control chamber and a first valve, the first valve being structured to provide a control fluid to the control chamber through the duct; a sensor fixed to the body, the sensor being structured to determine a position of the membrane; and a control circuit having an input coupled to the sensor to receive data from the sensor and an output coupled to the first valve, the control circuit being structured to control the first valve to provide the control fluid to the control chamber in response to the data from the sensor to control a position of the membrane. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
-
-
19. A method for controlling a pump to discharge a liquid in discrete amounts, the pump having a first chamber and a second chamber divided by a deformable membrane inside a pump shell, the first chamber having an inlet in the pump shell for receiving the liquid and an outlet in the pump shell for discharging the liquid, the second chamber being coupled to a valve through a bottom of the pump shell for receiving a control fluid through the valve, the method comprising:
-
coupling the second chamber to a source of reduced pressure control fluid to draw the membrane into contact with the bottom of the pump shell and draw the liquid through the inlet into the first chamber; coupling the second chamber to a source of pressurized control fluid to move the membrane to a first predetermined distance from the bottom of the pump shell to discharge the liquid from the first chamber through the outlet; detecting a first time period during which the membrane is moved from the bottom of the pump shell to the first predetermined distance; calculating a second time period required to move the membrane to a second predetermined distance from the first predetermined distance based on the first time period; terminating the coupling between the second chamber and the pressured control fluid at an end of the second time period to stop the movement of the membrane and the discharge of the liquid; and coupling the second chamber to the source of reduced pressure control fluid to draw the membrane into contact with the bottom of the pump shell. - View Dependent Claims (20, 21, 22, 23, 24, 25)
-
Specification