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Process for manufacture of micro electromechanical devices having high electrical isolation

  • US 6,159,385 A
  • Filed: 05/08/1998
  • Issued: 12/12/2000
  • Est. Priority Date: 05/08/1998
  • Status: Expired due to Term
First Claim
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1. A method for fabricating a micro electromechanical (MEM) component on a substrate comprising the steps of:

  • Providing a first substrate;

    Providing a second substrate;

    Bonding said first substrate to said second substrate to form a composite structure with an adhesive polymer layer between said substrates;

    Etching a portion of said first substrate to define a MEM component; and

    Selectively etching a portion of said adhesive bond to release said MEM component, said MEM component supported by said first substrate and said first substrate, other than said MEM component, remains coupled to said second substrate by a remaining portion of said adhesive polymer layer.

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