High precision three dimensional mapping camera

• US 6,160,910 A
• Filed: 02/05/1999
• Issued: 12/12/2000
• Est. Priority Date: 12/02/1998
• Status: Expired due to Term

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: Daniel Freifeld
• Inventors: Freifeld, Daniel
• Primary Examiner(s): MEHTA, BHAVESH M
• Application Number:
  US09/245,434
• Time in Patent Office: 676 Days
• Field of Search: 382/141, 382/148, 382/154, 382/209, 382/282, 382/284, 382/299, 382/151, 348/86, 348/87, 348/92, 348/129, 356/3.1, 356/376, 700/163
• US Class Current: 382/154
• CPC Class Codes: G01B 11/2518 Projection by scanning of the object
• CPC Class Codes: G06V 10/12 Details of acquisition arrangements; Constructional details thereof
• CPC Class Codes: G06V 2201/12 Acquisition of 3D measurements of objects

Abstract

An optical imaging apparatus having focusing optics, a linear array of detectors positioned in a focal plane outputting an image of a portion of an object which is placed on a platform having a moveable mounting responsive to horizontal and vertical mechanical drive forces thereby moving the platform to known horizontal and vertical positions while images of the object are captured by the linear array and output to a computer which compiles the sectional images and generates a composite image of the object allowing measurements to be taken.

Claims

1. An optical imaging apparatus having focusing optics, with an optical axis, for sending light emitted from an object under observation placed within the field of view of said optical imaging apparatus along said optical axis from said object under observation to be focused on a focal plane, said optical imaging apparatus comprising:

(a) a linear array of detectors, said linear array of detectors being positioned in said focal plane, said linear array of detectors outputting an image of a portion of said object under view;

(b) a platform configured and dimensioned to support said object under observation in a known position with respect to said platform;

(c) a moveable mounting responsive to horizontal and vertical mechanical drive forces to move said platform to a desired horizontal and vertical position;

(d) a vertical motor having a vertical drive member for applying a vertical drive force to said movable mounting;

(e) a horizontal motor having a horizontal drive member for applying a horizontal drive force to said movable mounting;

(f) a light source emitting light onto said object under observation;

(g) a horizontal position transmitting device coupled to said platform and having the ability to transmit positional data on said platform;

(h) a vertical position transmitting device coupled to said platform and having the ability to transmit positional data on said platform;

(i) a computer receiving horizontal positional data from said horizontal position transmitting device and receiving vertical positional data from said vertical position transmitting device, said computer using said horizontal and said vertical positional data to calculate the position of said object under observation with respect to said linear array of detectors, said computer using image data output by said linear array and positional data output by said horizontal position transmitting device and vertical position transmitting device to generate a three dimensional image.

2. An optical imaging apparatus as in claim 1, wherein said image is compared by said computer to an image stored in memory to generate a comparison of said image to said stored image.

3. An optical imaging apparatus as in claim 2, wherein said comparison is a quality assessment.

4. An optical imaging apparatus as in claim 1, wherein said comparison is a tolerance assessment.

5. An optical imaging apparatus as in claim 1, wherein said image is a three dimensional image.

6. An optical imaging apparatus as in claim 1, wherein said image is a two dimensional image.

7. An optical imaging apparatus as in claim 6, wherein said two dimensional image is generated by said computer combining image data output by said linear array of detectors at various vertical positions.

15. An optical imaging apparatus as in claim 1, wherein a viewing camera is positioned on said optical axis.

16. An optical imaging apparatus as in claim 1, wherein said viewing camera has a focusing mechanism which allows a user to focus and preview said image being focused on said focal plane.

17. A method of increasing pixel resolution in an optical imaging apparatus according to claim 1, the apparatus having a linear array of detectors which capture an image of an object placed on a platform within the field of view of said linear array of detectors, said linear array of detectors having a direction of movement horizontally away from a first point and towards a second point, said linear array of detectors having a longitudinal axis transverse to said direction of movement, said method comprising the steps of:

a) signaling said linear array to capture a first area of said image of said object;

b) moving said linear array a known distance in the direction of said second point;

c) signaling said linear array to capture a second area of said image of said object, said second area of said image containing a portion of said first area;

d) moving said linear array a known distance in the direction of said second point;

(e) signaling said linear array to capture a third area of said image of said object, said third area of said image containing a portion of said second area; and

f) moving said linear array to subsequent positions in the direction of said second point and signaling subsequent captures of subsequent areas of said image of said object, each of said subsequent captures capturing a portion of the preceding area captured.

18. A method as in claim 17, wherein said computer compiles overlapping portions of said image data to generate an image of said object.

8. An optical imaging apparatus having focusing optics with an optical axis, for sending light emitted from an object under observation placed within the field of view of said optical imaging apparatus along said optical axis from said object under observation to be focused on a focal plane, said optical imaging apparatus comprising:

(a) a linear array of detectors, said linear array of detectors being positioned in said focal plane, said linear array of detectors outputting an image of a portion of said object under view;

(b) a support structure configured and dimensioned to support said focusing optics and said linear array of detectors in a known position with respect to said support structure;

(c) a platform configured and dimensioned to support said object under observation in a known position with respect to said platform;

(d) a first moveable mounting responsive to horizontal mechanical drive forces to move said platform to a desired horizontal position;

(e) a horizontal motor having a horizontal drive member for applying a horizontal drive force to said first movable mounting;

(f) a second moveable mounting responsive to vertical mechanical drive forces to move said support structure to a desired vertical position;

(f) a vertical motor having a vertical drive member for applying a vertical drive force to said second movable mounting;

(f) a light source emitting light onto said object under observation;

(g) a horizontal position transmitting device coupled to said platform and having the ability to transmit positional data on said platform;

(h) a vertical position transmitting device coupled to said support structure and having the ability to transmit positional data on said support structure;

(i) a computer receiving horizontal positional data from said horizontal position transmitting device and receiving vertical positional data from said vertical position transmitting device, said computer using said horizontal and said vertical positional data to calculate the position of said object under observation with respect to said linear array of detectors, said computer using image data output by said linear array and positional data output by said horizontal position transmitting device and vertical position transmitting device to generate an image.

9. An optical imaging apparatus as in claim 8, wherein said platform has a direction of movement horizontally away from a first point and towards a second point, said linear array of detectors having a longitudinal axis transverse to said direction of movement, said longitudinal axis having a right end and a left end, said light source further comprising a first light source emitting a first elongated line of light on said object under observation, said first elongated line of light being transverse to said direction of movement, said first light source being on the same side of said optical access as said right end.

10. An optical imaging apparatus as in claim 9, wherein a second light source is emitting a second elongated line of light on said object under observation, said second elongated line of light being transverse to said direction of movement, said second light source being on the same side of said optical axis as said left end.

11. An optical imaging apparatus as in claim 10, wherein a third light source is emitting a third elongated line of light on said object under observation, said third elongated line of light being transverse to said direction of movement, said third light source being positioned on the same side of said optical axis as said first point.

12. An optical imaging apparatus as in claim 11, wherein a fourth light source is emitting a fourth elongated line of light on said object under observation, said fourth elongated line of light being transverse to said direction of movement, said fourth light source being positioned on the same side of said optical axis as said second point.

13. An optical imaging apparatus as in claim 8, wherein a fifth light source is emitting a fifth elongated line of light on said object under observation, said fifth elongated line of light being transverse to said direction of movement, said fifth light source being positioned beneath said object under observation.

14. An optical imaging apparatus as in claim 8, wherein a sixth light source is emitting a sixth elongated line of light on said object under observation, said sixth elongated line of light being transverse to said direction of movement, said sixth light source being positioned to project said sixth elongated line of light along said optical axis from above said object under observation.