Overhead scanning profiler

• US 6,161,294 A
• Filed: 03/23/1998
• Issued: 12/19/2000
• Est. Priority Date: 03/23/1998
• Status: Expired due to Fees

• Current Assignee: Sloan Technology Company Limited (Veeco Instruments Incorporated)
• Original Assignee: Sloan Technology Company Limited (Veeco Instruments Incorporated)
• Inventors: Bland, Loren L., Cunningham, Timothy, Naumann, Walter, Short, Gilbert, Rizos, Robert G.
• Primary Examiner(s): Gibson, Randy W.
• Application Number:
  US09/046,318
• Time in Patent Office: 1,002 Days
• Field of Search: 33/1 M, 33/503, 33/533, 33/549, 33/553, 33/554, 33/555, 33/559, 33/561, 73/104, 73/105, 324/158.1, 324/754, 324/758, 324/770
• US Class Current: 33/1.00M
• CPC Class Codes: G01B 7/008 using coordinate measuring machines
• CPC Class Codes: G01B 7/012 Contact-making feeler heads therefor
• CPC Class Codes: G01B 7/34 for measuring roughness or irregularity of surfaces

Abstract

An apparatus and method for surface profile measurements of large samples. The sample is held by a stationary chuck, while a four-axis (X, Y, Z and theta axis) positioning assembly manipulates and positions an overhead scan assembly and measurement stylus to perform the profilometry. To observe the sample surface in the vicinity of the measurement stylus, an illumination and imaging capability is also provided. Backlash and error are reduced in the Z axis assembly through use of cams and cam followers, and in the scan assembly through use of multiple tensioned wires, with low-friction sliding elements. The apparatus reduces vibration and supports heavy (up to 400 kg) samples while allowing accurate profile measurements.

Claims

1. A scanning profiler, comprising:

an overhead scanning assembly including a linearly scanned distance measurement stylus to measure a surface profile of a sample;

a positioning assembly to position the overhead scanning assembly in three orthogonal directions relative to the sample; and

a base supporting the positioning assembly and the overhead scanning assembly, wherein the base supports the positioning assembly on opposite sides of the sample and the sample is fixed relative to the base.

2. The scanning profiler of claim 1, further comprising:

a rotational assembly, wherein the rotational assembly further positions the overhead scanning assembly in a rotational direction relative to the sample.

3. The scanning profiler of claim 1, wherein the overhead scanning assembly includes

a contact measurement stylus to measure the surface profile of the sample.

4. The scanning profiler of claim 1, wherein the positioning assembly further comprises:

an X-axis drive;

a Y-axis drive orthogonal to the X-axis drive; and

a Z-axis drive orthogonal to both the X-axis and Y-axis drive.

5. The scanning profiler of claim 1, wherein the positioning assembly comprises a Z-axis drive, which further comprises:

at least one slide, providing sliding linear motion of the overhead scanning assembly relative to the base;

at least one cam;

at least one cam follower, which is a rotating bearing and which rides on the cam;

at least one motor; and

at least one worm which is driven by the motor and which drives the cam.

6. The scanning profiler of claim 5, wherein the slide is at least one crossed roller slide.

7. The scanning profiler of claim 1, further comprising:

at least one pneumatic isolation leg on the base.

8. The scanning profiler of claim 1, further comprising:

a flat chuck attached to the base and adapted for holding the sample.

9. The scanning profiler of claim 8, wherein the flat chuck is made of aluminum.

10. The scanning profiler of claim 8, wherein the flat chuck is flat to a tolerance of at least 0.002 inches TIR.

11. The scanning profiler of claim 8, wherein the flat chuck has at least a three point support.

12. The scanning profiler of claim 8, wherein the flat chuck supports up to a 400 kg sample.

13. The scanning profiler of claim 8, wherein the adaptation for holding the sample further comprises:

a vacuum source operating through a plurality of openings in the chuck to removably hold the sample to the chuck.

14. An overhead scanning assembly supported by a base assembly comprising:

a distance measurement stylus to measure a surface profile of a sample, the stylus positioned in an orthogonal X, Y and Z position relative to the sample fixed to the base.

15. The overhead scanning assembly of claim 14, further comprising:

a theta drive to further position the stylus in a rotational direction relative to the sample.

16. The overhead scanning assembly of claim 14, further comprising:

a sensor assembly attached to the stylus for measuring contact displacement of the stylus relative to the sample.

17. The overhead scanning assembly of claim 14, further comprising:

at least one limit switch, the at least one limit switch operating to restrict the movement of the stylus.

18. The overhead scanning assembly of claim 14, further comprising:

an imaging device oriented to provide a view of the area surrounding the stylus.

19. The overhead scanning assembly of claim 14, further comprising:

an illuminator oriented to illuminate the area surrounding the stylus.

20. The overhead scanning assembly of claim 14, further comprising:

a leveling assembly, operating to adjust the slope of a scanned sample.

21. The overhead scanning assembly of claim 14, further comprising:

at least one motor;

at least one wire;

at least one wire tensioning hub attached to the wire, the tensioning hub driven by the motor and having means for tensioning the wire;

at least one front pulley, rotatably engaging the wire; and

at least one wire-driven slider follower fixably attached to the wire, the slider acting to linearly scan the stylus.

22. The overhead scanning assembly of claim 21, further comprising:

at least one reference surface along which the slider slides; and

at least one flexure, which applies pressure between the slider and the reference surface.

23. The overhead scanning assembly of claim 22, wherein the at least one reference surface further comprises glass.

24. The overhead scanning assembly of claim 22, wherein the at least one reference surface further comprises a surface that is flat to a tolerance of 50 nanometers.

25. The overhead scanning assembly of claim 22, wherein the at least one flexure further comprises a flexure containing a low friction material.

26. An overhead scanning assembly supported by a base assembly comprising:

a motor;

two wires;

two tensioning hubs attached to the wires, the tensioning hubs driven by the motor and having means for tensioning the wires;

two front pulleys, rotatably engaging the wires;

a single slide; and

a wire-driven slider follower fixably attached to the wires and slidably contacting the single slide.

27. The overhead scanning assembly of claim 26, further comprising:

three reference surfaces; and

two flexures which apply pressure between the slider and one of the reference surfaces.

28. The overhead scanning assembly of claim 27, wherein the reference surfaces further comprise glass.

29. The overhead scanning assembly of claim 27, wherein the reference surfaces further comprise a surface that is flat to a tolerance of 50 nanometers.

30. The overhead scanning assembly of claim 27, wherein the flexures further comprise flexures containing a low friction material.

31. A vertical drive of an overhead scanning assembly comprising:

a slider connected to a distance measurement stylus to provide sliding linear motion of the stylus in the vertical direction relative to the overhead scanning assembly;

a cam attached to the overhead scanning assembly;

a cam follower, connected to the slider and the measurement stylus, which rotates and rides on the cam;

a motor; and

a worm driven by the motor and driving the cam to move the slider and the stylus in the vertical direction.

32. The overhead scanning assembly of claim 31, wherein the slider further comprises a crossed roller slide.

33. A linear scan assembly comprising:

at least one reference surface on a single slide;

a sliding follower with a center plane of symmetry and slidably engaging the reference surface of the single slide;

at least one wire fixably and symmetrically attached to the sliding follower about the center plane;

a drive motor;

at least one tensioning pulley driven by the drive motor, the tensioning pulley having means for tension attachment of the wire; and

at least one front pulley, rotatably engaging the wire, and wherein the symmetric attachment of the wire to the sliding follower reduces or eliminates torque or tilt of the sliding follower.

34. A linear scan assembly comprising:

three reference surfaces on a single slide;

a sliding follower with a center plane of symmetry and slidably engaging the reference surfaces of the single slide;

two wires fixably and symmetrically attached to the sliding follower about the center plane;

a drive motor;

two tensioning pulleys driven by the drive motor, the tensioning pulleys having means for tension attachment of the wires; and

two front pulleys, rotatably engaging the wires.

35. A method for scanning a sample comprising:

providing an overhead scanning assembly with a linearly scanned distance measurement stylus to measure a surface profile of the sample;

providing a positioning assembly to position the overhead scanning assembly in three orthogonal directions relative to the sample;

providing a base supporting the positioning assembly and the overhead scanning assembly, the base supporting the positioning assembly on opposite sides of the sample;

mounting the sample on the base; and

scanning the sample with the stylus, wherein the sample and base are stationary.

36. The method of claim 35, further comprising:

positioning the overhead scanning assembly in one rotational direction relative to the sample.

37. The method of claim 35, further comprising:

measuring vertical displacement of areas on the sample relative to the base using a contact measurement stylus.

38. The method of claim 35, further comprising:

vacuum mounting the sample in a chuck that is attached to the base.

39. The method of claim 35, further comprising:

viewing the sample with an imaging device attached to the overhead scanning assembly.