Method for manufacturing thin films of multi-element group oxide or nitride

• US 6,162,501 A
• Filed: 01/29/1999
• Issued: 12/19/2000
• Est. Priority Date: 03/17/1998
• Status: Expired due to Term

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Yeong-kwan
• Primary Examiner(s): Meeks, Timothy
• Assistant Examiner(s): CHEN, BRET P
• Application Number:
  US09/239,777
• Time in Patent Office: 690 Days
• Field of Search: 427/255.32, 427/255.394, 427/99, 438/680, 438/681
• US Class Current: 438/680
• CPC Class Codes: C23C 16/409 of the type ABO3 with A representing alkali, alkaline earth metal or lead and B representing a refractory metal, nickel, scandium or a lanthanide
• CPC Class Codes: C23C 16/56 After-treatment

Abstract

A method of manufacturing thin films formed from multi-element group oxide includes supplying precursors containing elements later forming an oxide layer into a reaction chamber containing a semiconductor substrate on which an under-layer is formed, reacting an oxidizing gas supplied into the reaction chamber with the precursors to form the oxide layer on the under-layer, and supplying an organic ligand into the reaction chamber to improve planarity of the surface of the oxide layer.

Claims

1. A method for manufacturing a thin film formed from a multi-element group oxide, comprising the steps of:

(a) loading into a reaction chamber a semiconductor substrate on which an under-layer is formed;

(b) supplying precursors containing elements for later forming an oxide layer, into the reaction chamber;

(c) reacting an oxidizing gas supplied into the reaction chamber with the precursors to form an oxide layer on the under-layer; and

(d) after the oxidizing gas has reacted with the precursor to form the oxide layer, supplying an organic ligand into the reaction chamber to improve planarity of the surface of the oxide layer.

2. The method of claim 1, wherein the organic ligand is hexafluoroacetylacetone (hfac).

3. The method of claim 1, wherein the organic ligand is acetylacetone (acac).

4. The method of claim 1, further comprising the step of supplying a gas containing oxygen into the reaction chamber to remove impurities from the oxide layer following step (d).

5. The method of claim 1, further comprising the step of forming an oxygen network layer for the oxide layer on the under-layer before step (b).

6. The method of claim 5, wherein the step of forming the oxygen network layer comprises the substeps of:

supplying a precursor containing a metal element which is a base of a crystal lattice forming the oxide layer into the reaction chamber; and

,

supplying a gas containing oxygen into the reaction chamber.

7. The method of claim 1, further comprising the step of supplying a purging gas into the reaction chamber to purge the precursors remaining in the reaction chamber following step (b).

8. The method of claim 7, wherein the purging gas is one selected from the group consisting of Ar and N₂.

9. The method of claim 1, further comprising the step of supplying a purging gas into the reaction chamber to purge the oxidizing gas remaining in the reaction chamber following step (c).

10. The method of claim 9, wherein the purging gas is one selected from the group consisting of Ar and N₂.

11. The method of claim 1, further comprising the step of annealing the oxide layer following step (d).

12. The method of claim 1, further comprising the step of performing a rapid thermal process on the oxide layer following step (d).

13. A method of manufacturing a thin film formed from a multi-element group nitride, comprising the steps of:

(a) loading into a reaction chamber a semiconductor substrate on which an under-layer is formed;

(b) supplying precursors containing elements for later forming a nitride layer, into the reaction chamber;

(c) reacting a nitriding gas supplied into the reaction chamber with the precursors to form a nitride layer on the under-layer; and

(d) after the nitriding gas has reacted with the precursor to form the nitride layer, supplying an organic ligand into the reaction chamber to improve planarity of the surface of the nitride layer.

14. The method of claim 13, wherein the organic ligand is hexafluoroacetylacetone (hfac).

15. The method of claim 13, wherein the organic ligand is acetylacetone (acac).

16. The method of claim 13, further comprising the step of supplying a gas containing nitrogen into the reaction chamber to remove impurities from the nitride layer following step (d).

17. The method of claim 13, further comprising the step of forming a nitrogen network layer for the nitride layer prior to step (b).

18. The method of claim 17, wherein the step of forming the nitrogen network layer comprises the substeps of:

supplying a precursor containing a metal element which is a base of a crystal lattice forming the nitride layer into the reaction chamber; and

supplying a gas containing nitrogen into the reaction chamber.

19. The method of claim 13, further comprising the step of supplying a purging gas into the reaction chamber to purge the precursors remaining in the reaction chamber following step (b).

20. The method of claim 19, wherein the purging gas is one selected from the group consisting of Ar and N₂.

21. The method of claim 13, further comprising the step of supplying a purging gas into the reaction chamber to purge the nitriding gas remaining in the reaction chamber following step (c).

22. The method of claim 21, wherein the purging gas is one selected from the group consisting of Ar and N₂.

23. The method of claim 22, further comprising the step of annealing the nitride layer following step (d).

24. The method of claim 22, further comprising the step of performing a rapid thermal process on the nitride layer following step (d).