Packaging die preparation
First Claim
1. A semiconductor structure fabrication method comprising:
- providing a semiconductor substrate having a die side opposite a back side, said die side having a plurality of die formed therein, wherein the die side is situated upon a flexible plastic sheet, the flexible plastic sheet is situated upon a double-sided adhesive tape, and the double-sided adhesive tape is upon a table;
forming a recess in the die side of the semiconductor substrate, wherein;
a first portion of said semiconductor substrate having at least one die therein is on one side of said recess; and
a second portion of said semiconductor substrate having at least one die therein is on a side of said recess opposite that of said first portion of said semiconductor substrate;
removing material from said back side of said semiconductor substrate by an abrading operation sufficient to separate from contact the first portion of said semiconductor substrate from the second portion of said semiconductor substrate; and
stretching said flexible plastic sheet so as to increase the separation between said first and second portions of said semiconductor substrate.
6 Assignments
0 Petitions
Accused Products
Abstract
The present invention relates to a process for preparing a wafer for chip packaging that minimizes stress and torque on wafer components during back grinding. The wafer has fabricated thereon a plurality of dies in a die side thereof opposite a back side thereof. A protective coating is spun on the die side to protect the dies. The wafer is separated into a plurality of connected pieces by scratching or cutting a recess into streets or scribe lines in the die side. The connected pieces of the wafer are secured to a surface with the back side thereof exposed. Material is removed from the back side of the wafer by chemical, mechanical, or chemical-mechanical methods until each piece is separated or disconnected from the other pieces. The protective coating is removed. The pieces can be situated upon a flexible surface that is stretched to increase the separation between pieces. Each die in the die side of each piece is then packaged into a die package.
28 Citations
24 Claims
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1. A semiconductor structure fabrication method comprising:
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providing a semiconductor substrate having a die side opposite a back side, said die side having a plurality of die formed therein, wherein the die side is situated upon a flexible plastic sheet, the flexible plastic sheet is situated upon a double-sided adhesive tape, and the double-sided adhesive tape is upon a table; forming a recess in the die side of the semiconductor substrate, wherein; a first portion of said semiconductor substrate having at least one die therein is on one side of said recess; and a second portion of said semiconductor substrate having at least one die therein is on a side of said recess opposite that of said first portion of said semiconductor substrate; removing material from said back side of said semiconductor substrate by an abrading operation sufficient to separate from contact the first portion of said semiconductor substrate from the second portion of said semiconductor substrate; and stretching said flexible plastic sheet so as to increase the separation between said first and second portions of said semiconductor substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A semiconductor structure fabrication method comprising:
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providing a semiconductor substrate having a die side opposite a back side, said die side having a plurality of die formed therein, wherein the die side is situated upon a flexible plastic sheet, the flexible plastic sheet is situated upon a double-sided adhesive tape, and the double-sided adhesive tape is upon a table; forming a recess in the die side of the semiconductor substrate, wherein said recess is defined by a first portion of said semiconductor substrate, a second portion of said semiconductor substrate, and third portion of the semiconductor substrate connecting the first and second portions of the semiconductor substrate; removing material from said third portion of said semiconductor substrate at the back side thereof by an abrading operation until the first portion of said semiconductor substrate is unconnected to the second portion of said semiconductor substrate; and stretching said flexible plastic sheet so as to increase the separation between said first and second portions of said semiconductor substrate. - View Dependent Claims (11, 12, 13)
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14. A semiconductor structure fabrication method comprising:
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providing a semiconductor substrate having a plurality of dies in a die side thereof opposite a back side, wherein the die side is situated upon a flexible plastic sheet, the flexible plastic sheet is situated upon a double-sided adhesive tape, and the double-sided adhesive tape is upon a table; forming a plurality of recesses in the die side of said semiconductor substrate defining therebetween a plurality of pieces of said semiconductor substrate, each piece of said plurality of pieces having at least one die therein; removing material from said back side of said semiconductor substrate by an abrading operation sufficient to separate said pieces; and stretching said flexible plastic sheet so as to increase the separation between said first and second portions of said semiconductor substrate. - View Dependent Claims (15, 16)
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17. A chip packaging method comprising:
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providing a semiconductor substrate having a die side opposite a back side, said die side having a plurality of dies formed therein and a plurality of recesses formed therein separating the dies of said plurality of dies, wherein the die side is situated upon a flexible plastic sheet, the flexible plastic sheet is situated upon a double-sided adhesive tape, and the double-sided adhesive tape is upon a table; dividing said semiconductor substrate into a plurality of pieces by an abrading operation, wherein; each said piece has; a predetermined thickness; said back side opposite said die side; one die of said plurality of dies formed in the die side thereof; and said dividing of said semiconductor substrate comprises removing material from the back side of the semiconductor substrate; packaging the dies in the die side of said plurality of pieces; and stretching said flexible surface so as to increase the separation between said first and second portions of said semiconductor substrate.
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18. A chip packaging method comprising:
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providing a semiconductor wafer having a die side opposite a back side, said die side having a plurality of die thereon separated by a plurality of scratches cut into scribe lines on the die side; forming a protective coating upon the die side, wherein the protective coating includes a flexible plastic sheet situated upon a double-sided adhesive tape that is upon a table; grinding the back side to divide the semiconductor wafer into plurality of separated, unconnected die, each said die having said back side opposite said die side and having a thickness in a range between 0.762 millimeters to about 0.2 millimeters; stretching said flexible plastic sheet so as to increase the separation between said first and second portions of said semiconductor substrate; and performing a chip packaging process upon each die of said plurality of die to package each die of said plurality of dies in a die package.
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19. A chip packaging method comprising:
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providing a semiconductor wafer having integrated circuitry including a plurality of dies formed within a die side opposite a back side thereof; cutting recesses into the die side, each recess having an opening at said die side and a closed end proximal said back side; forming a protective covering over said die side, wherein the protective coating includes a flexible plastic sheet situated upon a double-sided adhesive tape that is upon a table; positioning the protective covering upon a surface with the back side of the semiconductor substrate exposed; thinning the thickness of the semiconductor wafer by grinding the back side thereof until the closed end of each of the recesses is breached, whereby the semiconductor wafer is separated into a plurality of unconnected pieces each having said die side and said back side and one die of said plurality of dies therein; stretching said flexible plastic sheet so as to increase the separation between said first and second portions of said semiconductor substrate; and forming a die package for each die of said plurality of dies. - View Dependent Claims (20, 21, 22, 23)
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24. A chip packaging method comprising:
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providing a silicon wafer; fabricating a plurality of dies in a die side of said silicon wafer, said die side being opposite a back side of said silicon wafer; forming a photoresist layer over said die side; cutting into but not through said die side so as to define in said die side a plurality of pieces; securing said semiconductor wafer to a grinding surface such that the back side thereof is exposed; removing material from the back side of said semiconductor wafer by an abrading operation until each of said plurality of pieces is out of contact with other of said pieces, said material being removed by a process selected from a group consisting of mechanical planarization and chemical-mechanical planarization, wherein said silicon wafer is situated upon a flexible surface, each said piece having; said back side opposite said die side; and at least one die formed in the die side thereof; stretching said flexible surface so as to increase the separation between said plurality of pieces; performing a die packaging sequence comprising; removing said photoresist layer from the die side of each said piece; and packaging in a die package each said at least one die in the die side of each said piece of said plurality of pieces.
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Specification