Disk carrier with transponder

• US 6,164,530 A
• Filed: 04/08/1994
• Issued: 12/26/2000
• Est. Priority Date: 04/08/1994
• Status: Expired due to Fees

• Current Assignee: Entegris Incorporated
• Original Assignee: Fluoroware, Inc. (Entegris Incorporated)
• Inventors: Williams, Randy S., Cheesebrow, Nicholas T., Kos, Robert D., Eggum, Shawn D.
• Primary Examiner(s): Hajec, Donald
• Assistant Examiner(s): TREMBLAY, MARK STEPHEN
• Application Number:
  US08/225,228
• Time in Patent Office: 2,454 Days
• Field of Search: 235/376, 235/380, 40/660, 40/663
• US Class Current: 235/380
• CPC Class Codes: G06K 17/00 Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations

Abstract

The present invention provides a method and apparatus for monitoring the progress of a plurality of batches of semiconductor wafer or memory disks through a multiplicity of processing operations at various locations within a plant facility and maintaining information regarding the progress of each batch at the respective batch. The method includes the step of inserting each of the batches of wafers or memory disks in a carrier constructed and arranged for supporting the wafers or disks in parallel, axially arranged, spaced arrays. A transponder is embedded in a planar wall portion within each carrier by way of a recess extending inwardly from a lower edge of the wall portion. The transponder has a code to identify the carrier and a batch of wafers or disks contained therein and to further identify the various processing operations to which the batch has been subjected. The proximity of each carrier to various locations within the processing facility is detected by limited range read units each of which is positioned at one of the various locations and is constructed and arranged for determining the unique identification of any carrier within its detection range. Write units at various locations alter a status code in transponder to designate that a batch has been through a particular processing stage. Carrier identification information from the reader units also is stored and updated remotely to monitor the progress of batches through processing operations.

Claims

1. A disk carrier for carrying a plurality of wafers, the carrier comprising:

a molded body having two pairs of opposing walls, the pairs of opposing walls joined together to form a generally rectangular body defining an interior, the body having a plurality of interiorly facing channels for receiving wafers in the interior, one of the walls having an integral wall portion with an inwardly facing surface, an opposite exteriorly facing surface, and an edge extending from the interiorly facing surface to the exteriorly facing surface, the wall portion further having a recess extending from the edge into the wall portion, the recess positioned intermediate the interiorly facing surface and the exteriorly facing surface;

a radio frequency transponder inserted in the elongate recess, the transponder having a unique identification code readable with an external reader unit; and

a cover inserted in the recess for sealably enclosing the transponder within said recess the cover meeting the wall portion at a junction, the recess being elongate into the wall portion whereby the size of the junction is minimized.

2. The carrier of claim 1, wherein the edge is substantially normal to the interiorly facing surface and the exteriorly facing surface and the recess is substantially normal to the edge.

3. The disk carrier of claim 1, wherein the cover is welded into the recess thereby embedding the transponder into the carrier.

4. The disk carrier of claim 1, wherein one of the surfaces of the wall portion has a protruding portion along the recess for accommodating the recess with the inserted transponder.

5. The disk carrier of claim 1, wherein the transponder is programmable to accept a status code by an external write unit.

6. The disk carrier of claim 1, wherein the edge of the wall portion, from which the recess extends, faces downwardly whereby the junction also faces downwardly.

7. The disk carrier of claim 1, wherein the recess is parallel to the interiorly facing surface and the exteriorly facing surface.