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Method for producing an electrostatic actuator and an inkjet head using it

  • US 6,164,759 A
  • Filed: 08/05/1999
  • Issued: 12/26/2000
  • Est. Priority Date: 09/21/1990
  • Status: Expired due to Fees
First Claim
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1. A method for producing an inkjet head having an ejection chamber in communication with a nozzle and an ink supply channel, said method comprising the steps of:

  • providing first, second and third substrates, each substrate having correspondingly opposed first and second surfaces;

    etching the first substrate on the first surface thereof to form a recess for the ejection chamber and a groove for the ink supply channel;

    forming a diaphragm disposed at a bottom wall of the ejection chamber;

    bonding the second substrate to the first surface of the first substrate to seal the ejection chamber while maintaining communication with the ink supply channel;

    forming an electrode on the third substrate;

    anodically bonding at a bonding temperature the third substrate to the second surface of the first substrate such that the electrode is aligned adjacent to the diaphragm with a gap therebetween;

    cooling the bonded substrates to a room temperature after said anodically bonding step; and

    prior to said anodically bonding step, determining the bonding temperature in said anodically bonding step to be within a temperature range such that a contraction of the first substrate during said cooling step is at least a contraction of the third substrate.

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