Scan tool recipe server
First Claim
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1. A method of manufacturing a semiconductor wafer, the method comprising:
- processing a first layer on a semiconductor wafer;
determining that a recipe in a scan tool in which the semiconductor wafer is to be scanned is the current recipe,wherein the step of determining that the recipe in the scan tool in which the semiconductor wafer is to be scanned is the current recipe is accomplished by comparing the recipe in the scan tool with a recipe in a server; and
scanning the first layer of the semiconductor wafer using the current recipe.
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Abstract
A method of manufacturing a semiconductor wafer wherein each layer to be scanned is scanned in a scan tool after determination of whether the current recipe is contained in the scan tool. The recipe in the scan tool is compared to the current recipe stored in a server. If the recipe in the scan tool is not the current recipe the current recipe is loaded into the scan tool from the server. The recipes in the server are updated from associated scan tools.
25 Citations
4 Claims
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1. A method of manufacturing a semiconductor wafer, the method comprising:
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processing a first layer on a semiconductor wafer; determining that a recipe in a scan tool in which the semiconductor wafer is to be scanned is the current recipe, wherein the step of determining that the recipe in the scan tool in which the semiconductor wafer is to be scanned is the current recipe is accomplished by comparing the recipe in the scan tool with a recipe in a server; and scanning the first layer of the semiconductor wafer using the current recipe. - View Dependent Claims (2, 3, 4)
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Specification
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Current AssigneeGlobalFoundries, Inc.
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Original AssigneeAdvanced Micro Devices, Inc.
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InventorsSteffan, Paul J., Yu, Allen S.
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Primary Examiner(s)Niebling, John F.
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Assistant Examiner(s)Hack, Jonathan
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Application NumberUS09/182,942Time in Patent Office789 DaysField of Search438/14, 438/16, 438/15, 438/17, 438/18, 700/95US Class Current438/14CPC Class CodesH01L 22/20 Sequence of activities cons...
