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Single-side microelectromechanical capacitive accelerometer and method of making same

  • US 6,167,757 B1
  • Filed: 08/31/1999
  • Issued: 01/02/2001
  • Est. Priority Date: 09/08/1997
  • Status: Expired due to Fees
First Claim
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1. A microelectromechanical capacitive accelerometer manufactured on a single-side of a semiconductor wafer, the accelerometer comprising:

  • a fixed electrode;

    a movable proof mass having a top surface; and

    a movable electrode attached to the top surface of the proof mass to move therewith, wherein the fixed electrode is suspended between the proof mass and the movable electrode.

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