Bistable microactuator with coupled membranes

• US 6,168,395 B1
• Filed: 10/13/1998
• Issued: 01/02/2001
• Est. Priority Date: 02/10/1996
• Status: Expired due to Fees

• Current Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Original Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Inventors: Quenzer, Hans Joachim, Wagner, Bernd
• Primary Examiner(s): Walberg, Teresa
• Assistant Examiner(s): ROBINSON, DANIEL LEON
• Application Number:
  US09/117,919
• Time in Patent Office: 812 Days
• Field of Search: 417/413.3, 417/413.2, 251/129.01, 251/129.02, 605/12
• US Class Current: 417/413.3
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/0069 Bistable microvalves
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0051 using electrostatic means
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence

Abstract

A bistable electrostatic actuator with pneumatic or liquid coupling. The actuator has enclosed metallic electrodes. It can be used for a microvalve or micropump. The actuator has buckled membrane sections in pairs and curved substrate electrodes, locally associated with said membrane sections.

Claims

1. Electrostatic membrane actuator for one of a microvalve and a micropump, comprising at least one pair of membrane sections, at least one pair of substrate electrodes locally associated with said membrane sections, said membrane sections enclosing said electrodes to define cavities linked by a linking channel, wherein the membrane sections have at least one layer on each membrane section for providing an intrinsic compressive stress to said sections wherein said sections are operable to buckle out and back between two stable operating points.

2. The electrostatic membrane actuator according to claim 1, wherein the cavities have bottoms and the substrate electrodes are curved and located close to the bottom of said cavities, thereby forming electrostatic driving electrodes for providing driving forces to corresponding counter electrodes provided at the membrane sections.

3. The electrostatic membrane actuator according to claim 1 wherein the linking channel for coupling of the two membrane sections allows the second membrane section of the actuator, which is the one not electrostatically attracted, to move in a direction opposite of the electrostatically attracted first membrane section, by a fluid flow through said channel.

4. The electrostatic membrane actuator according to claim 2, wherein the membrane sections both have metallic layers and are operable in counteraction in a flip-flop manner.

5. The electrostatic membrane actuator according to claim 2, comprising a substrate to which at least a portion outside of the membrane sections is attached, the substrate having two cavities enclosed by said membrane sections and a flat area outside of the membrane sections, said cavities being adapted closely to the shape of the membrane sections.

6. The electrostatic membrane actuator according to claim 5, cavities wherein the linking channel allows fluid to move from one of said cavities—

when one membrane section is attracted by electrostatic force—

to the other of said cavities and urge the other membrane section off and outwards of the other cavity.

7. The electrostatic membrane actuator according to claim 5, wherein the cavities are connected by a channel in the substrate and covered by a further membrane portion located between the pair of membrane sections.

8. The electrostatic membrane actuator according to claim 1, having separate electrodes for each membrane section, incorporated in the bottom of said cavities and closely adapted to their shape.

9. The electrostatic membrane actuator according to claim 1, in which numerous pairs of membrane sections are lined up to form a pump line and two neighbored cavities for each pair of membranes are respectively coupled though a linking channel at least one of pneumatically and by fluid.

10. The electrostatic membrane actuator according to claim 1, having an electrically conducting contact section in the center of at least one of the membrane sections, adapted to operate with an electrically conducting seat arranged oppositely of the cavities.

13. The electrostatic membrane actuator according to claim 3, wherein the membrane sections both have metallic layers and are operable in counteraction in a flip-flop manner.

14. The electrostatic membrane actuator according to claim 3, comprising an attaching portion and a substrate to which said portion is attached, the substrate having two cavities enclosed by said membrane sections and a flat area outside of the membrane sections, said cavities being adapted closely to the shape of the membrane sections.

11. Method for manufacturing a membrane for an electrostatic membrane actuator, having at least two oppositely buckling membrane sections comprising:

providing a stress-free flat carrier having a first substrate with a layer of insulator on one side, for providing intrinsic stress to the carrier;

bonding the flat carrier with the insulating layer downwards to a second substrate;

removing at least the first substrate of the flat carrier until the intrinsic stress providing layer buckles out at least one of the membrane sections.

12. Method according to claim 11, wherein an electrode is provided in a cavity of the second substrate and the removal of the first substrate of the top-down-bonded wafer is stopped by a further insulating layer, forming an intermediate layer between two semiconductor layers, wherein the stop layer is partly removed, before metallizing the intermediate layer to form a second electrode at least one of in and on the membrane opposite to said electrode in said cavity of the second substrate.

15. A membrane for an electrostatic membrane actuator, having at least two oppositely buckling membrane sections, prepared by a process comprising the steps of:

providing a stress-free flat carrier having a first substrate with a layer of insulator on one side, for providing intrinsic stress to the carrier;

bonding the flat carrier with the insulating layer downwards to a second substrate;

removing at least the first substrate of the flat carrier until the intrinsic stress providing layer buckles out at least one of the membrane sections.