Safety system for gas purifier

• US 6,168,645 B1
• Filed: 10/15/1998
• Issued: 01/02/2001
• Est. Priority Date: 10/15/1997
• Status: Expired due to Term

• Current Assignee: Entegris GP, Inc. (Entegris Incorporated)
• Original Assignee: SAES Getters SpA (SAES Getters S)
• Inventors: Vergani, Giorgio, Succi, Marco, Lorimer, DʼArcy H.
• Primary Examiner(s): Spitzer, Robert H.
• Application Number:
  US09/174,055
• Time in Patent Office: 810 Days
• Field of Search: 95/8, 95/11, 95/14, 95/90, 951/16, 961/08, 961/11, 961/12, 961/17, 961/30--32, 964/19, 964/20, 964/24
• US Class Current: 95/8
• CPC Class Codes: B01D 53/0454 Controlling adsorption controlling temperature swing adsorption B01D53/0462, controlling pressure swing adsorption B01D53/047
• CPC Class Codes: B01D 53/30 Controlling by gas-analysis apparatus regulating non electrical variables in general G05D
• CPC Class Codes: B01D 53/346 Controlling the process
• CPC Class Codes: C23C 16/4402 Reduction of impurities in the source gas
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber

Abstract

A gas purification system includes a gas purification unit and one or more safety devices. The gas purification unit includes an enclosure containing a purification material that exhibits an exothermic reaction when exposed to certain gas contaminants. The gas purification unit also has an inlet coupled to an unpurified gas inlet line and an outlet coupled to a purified gas outlet line. A safety device can be coupled either to the unpurified gas input line or the purified output line, or both, and develops an alarm signal when gas contaminants exceed a given concentration level for a period of time.

Claims

1. A method for safely purifying gases comprising:

providing a source of unpurified gas;

passing said unpurified gas through a first safety device capable of developing an alarm signal when certain gas contaminants within said first safety device are above a given concentration level over a period of time;

passing said unpurified gas through a gas purification unit that includes a purification material to provide a purified gas, where said purification material exhibits an exothermic reaction when exposed to said certain gas contaminants; and

passing said purified gas through a second safety device capable of developing an alarm signal when said certain gas contaminants within said second safety device are above said given concentration level over said period of time.

2. A method for safely purifying gases as recited in claim 1 wherein at least one of a first valve situated between said source of unpurified gas and said first safety device and a second valve situated between said gas purification unit and said second safety device is closed upon the generation of said alarm signal.

3. A gas purification system with safety device comprising:

a gas purification unit including an enclosure and a purification material disposed within said enclosure that exhibits an exothermic reaction when exposed to certain gas contaminants which may be present within said enclosure, said gas purification unit having an inlet coupled to an unpurified gas input line and an outlet coupled to a purified gas output line;

a safety device coupled to one of said unpurified gas input line and said purified output line, where said safety device develops an alarm signal when gas contaminants within said safety device that are similar to said certain gas contaminants within said gas purification unit are above a given concentration level over a period of time; and

wherein said safety device includes a detection material that is a getter material and a thermocouple for detecting a temperature of said getter material.

4. A gas purification system with safety device as recited in claim 3 wherein said getter material is a powder.

5. A gas purification system with safety device as recited in claim 3 wherein said getter material is applied to a substrate.

6. A gas purification system with safety device as recited in claim 3 wherein said safety device includes a filament which can melt when said certain gas contaminants are above said predetermined concentration levels.

7. A gas purification system with safety device as recited in claim 6 wherein said filament is under tension.

8. A gas purification system with safety device comprising:

a gas purification unit including an enclosure and a purification material disposed within said enclosure that exhibits an exothermic reaction when exposed to certain gas contaminants which may be present within said enclosure, said gas purification unit having an inlet coupled to an unpurified gas input line and an outlet coupled to a purified gas output line;

a first safety device coupled to said unpurified gas input line, wherein said safety device develops an alarm signal when gas contaminants within said safety device that are similar to said certain gas contaminants within said gas purification unit are above a given concentration level over a period of time; and

a second safety device coupled to said purified gas output line.

9. A gas purification system with safety device as recited in claim 8 wherein said safety device determines that said certain gas contaminants are present above a predetermined concentration level by an exothermic reaction between said certain gas contaminant and a detection material.

10. A gas purification system with safety device as recited in claim 9 wherein said detection material is of the same type as said purification material.

11. A gas purification system with safety device as recited in claim 8 wherein said first safety device is coupled in series with said unpurified gas input line and said second safety device is coupled in series with said purified output line.

12. A gas purification system with safety device as recited in claim 8 wherein said first safety device is coupled in parallel with said unpurified gas input line and said second safety device is coupled in parallel with said purified output line.

13. A gas purification system with safety device as recited in claim 8 wherein said first safety device is tapped into said unpurified gas input line and said second safety device is tapped into said purified output line.

14. gas purification system with safety device as recited in claim 8 further comprising an automated valve which closes in response to said alarm signal to prevent gas from flowing into said gas purification unit.

15. A gas purification system with safety device as recited in claim 8 wherein said first and second safety devices each include a detection material that is a getter material and each said safety device further includes a thermocouple for detecting the temperature of said getter material.

16. A gas purification system with safety device as recited in claim 15 wherein said getter material is a powdered getter material.

17. A gas purification system with safety device as recited in claim 15 wherein said getter material is applied to a substrate.

18. A gas purification system with safety device as recited in claim 8 wherein each said safety device includes a filament which can melt when said certain gas contaminants are above said predetermined concentration levels.

19. A gas purification system with safety device as recited in claim 18 wherein aid filament is under tension.