Metallization process and method

• US 6,169,030 B1
• Filed: 01/14/1998
• Issued: 01/02/2001
• Est. Priority Date: 01/14/1998
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Beinglass, Israel, Chen, Liang-Yuh, Guo, Ted, Naik, Mehul B., Mosely, Roderick Craig
• Primary Examiner(s): Everhart, Caridad
• Application Number:
  US09/007,233
• Time in Patent Office: 1,084 Days
• Field of Search: 438/597, 438/680, 438/681, 438/688, 438/654, 438/676
• US Class Current: 438/680
• CPC Class Codes: C23C 14/025 Metallic sublayers
• CPC Class Codes: C23C 14/046 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: H01L 21/2855 by physical means, e.g. sputtering, evaporation H01L21/28518 - H01L21/28537 and H01L21/28568 take precedence
• CPC Class Codes: H01L 21/76877 Filling of holes, grooves or trenches, e.g. vias, with conductive material

Abstract

The invention generally provides an improved process for providing uniform step coverage on a substrate and planarization of metal layers to form continuous, void-free interconnections in high aspect ratio, sub-half micron applications. The invention provides a multi-step PVD process in which the plasma power is varied for each of the steps to obtain favorable fill characteristics as well as good reflectivity, morphology and throughput. The initial plasma powers are relatively low to ensure good, void-free filling of the aperture and, then, the plasma powers are increased to obtain the desired reflectivity and morphology characteristics. The invention provides an aperture filling process comprising physical vapor depositing a metal over the substrate and varying the plasma power during the physical vapor deposition. Preferably, the plasma power is varied from a first discrete low plasma power to a second discrete high plasma power. Even more preferably, the plasma power is varied from a first discrete low plasma power to a second discrete low plasma power to a third discrete high plasma power.

Claims

1. A method of forming an interconnection on a substrate, comprising:

physical vapor depositing a metal over the substrate; and

varying the plasma power during the physical vapor deposition, while the substrate is maintained at a floating potential.

2. The method of claim 1, further comprising:

chemical vapor depositing a metal wetting layer over the substrate before performing the physical vapor deposition step.

3. The method of claim 1 wherein the step of varying the plasma power comprises increasing the plasma power from an initial low power during the physical vapor deposition.

4. The method of claim 1 wherein the step of varying the plasma power comprises providing a first discrete low plasma power and then a second discrete high plasma power.

5. The method of claim 4 wherein the deposition thickness during the first discrete low plasma power is less than the deposition thickness of the second discrete high plasma power and wherein the first discrete low plasma power is about 9.55 W/cm² and the second discrete high plasma power is about 31.8 W/cm².

6. The method of claim 5 wherein the deposition thickness during the first discrete low plasma power is about 500 Å

and the deposition thickness of the second discrete high plasma power is about 4500 Å

.

7. The method of claim 1 wherein the step of varying the plasma power comprises providing sequentially a first discrete low plasma power, a second discrete low plasma power different from the first discrete low plasma power, and then a third discrete high plasma power.

8. The method of claim 7 wherein the second discrete low plasma power is less than the first discrete low plasma power.

9. The method of claim 7 wherein the combined deposition thickness during the first discrete low plasma power and the second discrete low plasma power is less than the deposition thickness of the third discrete high plasma power.

10. The method of claim 9 wherein the deposition thickness during the first discrete low plasma power is about 500 Å

, the deposition thickness during the second discrete low plasma power is about 500 Å

, and the deposition thickness during the third discrete high plasma power is about 4000 Å

.

19. The method of claim 1, wherein varying the plasma power sequentially through discrete levels the temperature of the substrate will be maintained substantially constant at about 300°

C. to 400°

C.

11. A method of forming an interconnection on a substrate, comprising:

chemical vapor depositing a liner over the substrate;

chemical vapor depositing a metal wetting layer over the liner;

physical vapor depositing a first metal layer over the metal wetting layer using a first plasma power; and

physical vapor depositing a second metal layer over the first metal layer using a second plasma power, while the substrate is maintained at a floating potential during the physical vapor deposition of at least one of the first or second metal layers.

12. The method of claim 11 wherein the second plasma power is higher than the first plasma power.

13. The method of claim 11 further comprising physical vapor depositing a third metal layer over the second metal layer using a third plasma power.

14. A process for providing uniform step coverage on a substrate, comprising:

forming a thin conformal CVD metal layer on a substrate;

forming a PVD metal layer over the CVD metal layer; and

varying the plasma power and maintaining the substrate at a floating potential while forming the PVD metal layer.

15. The process of claim 14 wherein the step of forming a PVD metal layer comprises:

forming a first PVD metal layer over the CVD metal layer using a first, low plasma power selected to provide good fill characteristics; and

forming a second PVD metal layer over the first PVD metal layer using a second, high plasma power selected to provide good morphology and reflectivity characteristics.

16. The process of claim 14 wherein the step of forming a PVD metal layer comprises:

forming a first PVD metal layer over the CVD metal layer using a first, low plasma power selected to provide good fill characteristics;

forming a second PVD metal layer over the first PVD metal layer using a second, low plasma power selected to provide good fill characteristics; and

forming a third PVD metal layer over the second PVD metal layer using a third, high plasma power selected to provide good morphology and reflectivity characteristics.

17. A method of forming an interconnection on a substrate, comprising:

physical vapor depositing a metal onto the substrate; and

varying the plasma power during the physical vapor deposition sequentially between a first low plasma power density of about 9.55 W/cm², a second low plasma power density of about 3.18 W/cm², and then a third high plasma power density of about 31.8 W/cm², wherein the combined deposition thickness deposited during the first discrete low plasma power and second low plasma power is less than the deposition thickness of the third high plasma power.

18. A method of forming an interconnection on a substrate, comprising:

depositing a liner over the substrate;

depositing a metal wetting layer over the liner;

physical vapor depositing a first metal layer over the metal wetting layer using a first plasma power;

physical vapor depositing a second metal layer over the first metal layer using a second plasma power; and

physical vapor depositing a third metal layer over the second metal layer using a third plasma power wherein the second plasma power is lower than the first plasma power, and the third plasma power is higher than the first plasma power.

20. A method of forming an interconnection on a substrate, comprising:

physical vapor depositing a metal over the substrate; and

varying the plasma power during the physical vapor deposition, while maintaining the substrate at a temperature less than about 400°

C.

21. The method of claim 20 wherein the step of varying the plasma power comprises providing a first discrete low plasma power and then a second discrete high plasma power.

22. A method of forming an interconnection on a substrate, comprising:

physical vapor depositing a metal over the substrate; and

varying the plasma power during the physical vapor deposition wherein the step of varying the plasma power comprises providing a first discrete low plasma power density of about 9.55 W/cm² and then a second discrete high plasma power density of about 31.8 W/cm².

23. A method of forming an interconnection on a substrate, comprising:

physical vapor depositing a metal over the substrate and

varying the plasma power during the physical vapor deposition while maintaining the substrate at a temperature less than about 400°

C. wherein the step of varying the plasma power comprises providing a first discrete low plasma power density of about 9.55 W/cm² and then a second discrete high plasma power density of about 31.8 W/cm².

24. The method of claim 23 wherein the deposition thickness during the first discrete low plasma power is less than the deposition thickness of the second discrete high plasma power.

25. The method of claim 24 wherein the deposition thickness during the first discrete low plasma power is about 500 Å

and the deposition thickness of the second discrete high plasma power is about 4500 Å

.