Micromechanical accelerometer for automotive applications

• US 6,170,332 B1
• Filed: 04/19/2000
• Issued: 01/09/2001
• Est. Priority Date: 05/26/1993
• Status: Expired due to Term

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Shaw, Kevin A., MacDonald, Noel C., Adams, Scott G.
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US09/552,578
• Time in Patent Office: 265 Days
• Field of Search: 73/514.01, 73/514.16, 73/514.18, 73/514.17, 73/514.21, 73/514.23, 73/514.24, 73/514.32, 73/514.35, 73/514.38 , 73/514.36
• US Class Current: 73/514.38
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81C 1/00619 Forming high aspect ratio structures having deep steep walls
• CPC Class Codes: B81C 2201/0132 Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
• CPC Class Codes: G01P 1/006 used for thermal compensation
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum

Abstract

A micromechanical capacitive accelerometer is provided from a single silicon wafer. The basic structure of the micromechanical accelerometer is etched in the wafer to form a released portion in the substrate, and the released and remaining portions of the substrate are coated with metal under conditions sufficient to form a micromechanical capacitive accelerometer. The substrate is preferably etched using reactive-ion etching for at least the first etch step in the process that forms the basic structure, although in another preferred embodiment, all etching is reactive-ion etching. The accelerometer also may comprise a signal-conditioned accelerometer wherein signal-conditioning circuitry is provided on the same wafer from which the accelerometer is formed, and VLSI electronics may be integrated on the same wafer from which the accelerometer is formed. The micromechanical capacitive accelerometer can be used for airbag deployment, active suspension control, active steering control, anti-lock braking, and other control systems requiring accelerometers having high sensitivity, extreme accuracy and resistance to out of plane forces.

Claims

1. An accelerometer comprising:

at least two capacitively-coupled fingers, at least one of said fingers being movable relative to another finger in response to a linear acceleration to produce a change in capacitance and at least a portion of the fingers are characterized by an aspect ratio greater than about 4;

1, wherein the fingers are made from the same substrate by etching the substrate, and at least a portion of the etching is reactive-ion etching; and

a means for applying a potential across the fingers to generate an output indicating the change in capacitance of the movable finger relative to said another finger.

2. The accelerometer of claim 1 wherein the substrate comprises single crystal silicon.

3. The accelerometer of claim 1 wherein at least a portion of the etching is performed using a mixture of chlorine and boron trichloride.

4. The accelerometer of claim 1 wherein at least a portion of the fingers are characterized by an aspect ratio greater than about 6:

1.

5. The accelerometer of claim 1 wherein the aspect ratio of fingers is in a range of about 6:

1 to about 100;

1.

6. The accelerometer of claim 1, wherein said at least two capacitively coupled fingers are located on a single-layered substrate.

7. The accelerometer of claim 6, wherein the substrate comprises single crystal silicon.

8. The accelerometer of claim 6, wherein at least a portion of the etching is performed using a mixture of chlorine and boron trichloride.

9. The accelerometer of claim 6, wherein at least a portion of the fingers are characterized by an aspect ratio greater than about 6:

1.

10. The accelerometer of claim 9, wherein the aspect ratio of fingers is in a range of about 6:

1 to about 100;

1.

11. The accelerometer of claim 1, wherein said at least two fingers comprise a variable-capacitance capacitor etched from the same substrate.

12. The accelerometer of claim 11, wherein the substrate comprises single crystal silicon.

13. The accelerometer of claim 11, wherein at least a portion of the etching is performed using a mixture of chlorine and boron trichloride.

14. The accelerometer of claim 11, wherein the aspect ratio of fingers is greater than about 6:

1.

15. The accelerometer of claim 1 for producing an output signal in response to an applied linear acceleration in a desired axis of sensitivity wherein said substrate comprises a uniform silicon wafer supporting said at least two capacitively-coupled fingers.

16. The accelerometer of claim 15, wherein the aspect ratio of a finger is greater than about 6:

1.

17. The accelerometer of claim 15, wherein at least a portion of the fingers is formed by reactive ion etching performed using a mixture of chlorine and boron trichloride.

18. An accelerometer comprising a variable-capacitance capacitor having fingers, at least a portion of the fingers are characterized by an aspect ratio greater than about 4:

1, wherein the fingers of the accelerometer are made from the same substrate by etching the substrate, and at least a portion of the etching is reactive-ion etching, and the accelerometer generates a signal in response to an applied linear acceleration.

19. The accelerometer of claim 18 wherein the substrate comprises single crystal silicon.

20. The accelerometer of claim 18 wherein at least a portion of the etching is performed using a mixture of chlorine and boron trichloride.

21. The accelerometer of claim 18 wherein the aspect ratio of fingers is greater than about 6:

1.

22. An accelerometer for producing an output signal in response to an applied linear acceleration in a desired axis of sensitivity comprising:

at least two capacitively-coupled fingers, such that at least one of the fingers being movable relative to another finger in response to a linear acceleration along the desired axis of sensitivity to produce a change in capacitance upon detection of the acceleration, and the fingers being made from one wafer comprising single crystal silicon, and at least on finger having an aspect ratio greater than 4;

1; and

a means for applying a potential across the fingers to provide and output indicating the change in capacitance of the movable finger relative to said another finger.

23. The accelerometer of claim 22 wherein the aspect ratio of a finger is greater than about 6:

1.

24. The accelerometer of claim 22 wherein at least a portion of the fingers is formed by reactive ion etching performed using a mixture of chlorine and boron trichloride.