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Method for automatically cleaning resist nozzle

  • US 6,170,494 B1
  • Filed: 02/22/2000
  • Issued: 01/09/2001
  • Est. Priority Date: 11/12/1999
  • Status: Expired due to Fees
First Claim
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1. A method of cleaning a photoresist dispensing nozzle, said method comprising the steps of:

  • a) providing a photoresist dispensing nozzle having a tip, said tip being clogged with dried up photoresist particles;

    b) positioning the tip of the photoresist dispensing nozzle in a nozzle base;

    c) providing a catch pan having an opening;

    d) positioning the catch pan beneath said nozzle base such that said opening of said catch pan faces said tip of said photoresist dispensing nozzle;

    e) providing a solvent dispensing needle having an opening;

    f) inserting said solvent dispensing needle through said opening of said catch pan such that said opening of said solvent dispensing needle faces said tip of said photoresist dispensing nozzle;

    g) spraying photoresist cleaning solvent upwardly through said opening of said solvent dispensing needle directly onto said tip of said photoresist dispensing nozzle and dissolving the dried up photoresist particles while said tip of said photoresist dispensing nozzle is stored in said nozzle base;

    h) collecting the photoresist cleaning solvent and the dissolved photoresist particles in said catch pan; and

    i) draining the photoresist cleaning solvent and the dissolved photoresist particles from said catch pan.

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