Method for automatically cleaning resist nozzle
First Claim
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1. A method of cleaning a photoresist dispensing nozzle, said method comprising the steps of:
- a) providing a photoresist dispensing nozzle having a tip, said tip being clogged with dried up photoresist particles;
b) positioning the tip of the photoresist dispensing nozzle in a nozzle base;
c) providing a catch pan having an opening;
d) positioning the catch pan beneath said nozzle base such that said opening of said catch pan faces said tip of said photoresist dispensing nozzle;
e) providing a solvent dispensing needle having an opening;
f) inserting said solvent dispensing needle through said opening of said catch pan such that said opening of said solvent dispensing needle faces said tip of said photoresist dispensing nozzle;
g) spraying photoresist cleaning solvent upwardly through said opening of said solvent dispensing needle directly onto said tip of said photoresist dispensing nozzle and dissolving the dried up photoresist particles while said tip of said photoresist dispensing nozzle is stored in said nozzle base;
h) collecting the photoresist cleaning solvent and the dissolved photoresist particles in said catch pan; and
i) draining the photoresist cleaning solvent and the dissolved photoresist particles from said catch pan.
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Accused Products
Abstract
A storage apparatus for photoresist dispensing nozzles has solvent inlets positioned directly opposite the nozzles when the nozzles are in their home positions. Photoresist cleaning solvent is introduced through these inlets at periodic intervals and directly applied on the nozzles to keep them clean.
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Citations
4 Claims
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1. A method of cleaning a photoresist dispensing nozzle, said method comprising the steps of:
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a) providing a photoresist dispensing nozzle having a tip, said tip being clogged with dried up photoresist particles;
b) positioning the tip of the photoresist dispensing nozzle in a nozzle base;
c) providing a catch pan having an opening;
d) positioning the catch pan beneath said nozzle base such that said opening of said catch pan faces said tip of said photoresist dispensing nozzle;
e) providing a solvent dispensing needle having an opening;
f) inserting said solvent dispensing needle through said opening of said catch pan such that said opening of said solvent dispensing needle faces said tip of said photoresist dispensing nozzle;
g) spraying photoresist cleaning solvent upwardly through said opening of said solvent dispensing needle directly onto said tip of said photoresist dispensing nozzle and dissolving the dried up photoresist particles while said tip of said photoresist dispensing nozzle is stored in said nozzle base;
h) collecting the photoresist cleaning solvent and the dissolved photoresist particles in said catch pan; and
i) draining the photoresist cleaning solvent and the dissolved photoresist particles from said catch pan. - View Dependent Claims (2, 3, 4)
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Specification
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Current AssigneeAdvanced Micro Devices, Inc.
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Original AssigneeAdvanced Micro Devices, Inc.
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InventorsKent, Eric, Wakamiya, Ted, Marinaro, Vincent L.
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Primary Examiner(s)CARRILLO, BIBI SHARIDAN
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Application NumberUS09/510,411Time in Patent Office322 DaysField of Search134/170, 134/171, 134/198, 134/199, 134/166.R, 134/169.R, 134/22.1, 134/22.11, 134/22.14, 134/22.18, 134/22.19, 134/25.4, 134/42, 422/99, 422/100US Class Current134/22.18CPC Class CodesB05B 14/00 Arrangements for collecting...B05B 15/55 using cleaning fluidsB05B 15/555 discharged by cleaning nozzlesG03F 7/162 Coating on a rotating suppo...
