×

Method for making ink-jet printer nozzles

  • US 6,171,510 B1
  • Filed: 10/30/1997
  • Issued: 01/09/2001
  • Est. Priority Date: 10/30/1997
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of etching a substrate with a top surface, a portion of the top surface defining a feature with a sidewall and a bottom, the method comprising:

  • forming an etch stop in the substrate;

    forming a layer of resist over the sidewall of the feature wherein a portion of the resist disposed on the sidewall portion of the feature has a front surface and a back surface, the back surface of the portion of the resist being oriented toward the sidewall of the surface feature, but not over at least a portion of the bottom of the feature; and

    isotropically etching the substrate with a plasma to expose at least a portion of the back surface of the resist, wherein the etch stop limits the etching depth thereby forming a generally planar surface at the juncture of the bottom of the feature and the etch stop.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×